DE69910661D1 - Verfahren zur Abtrennung von Wasser aus Vakuumkammern oder aus Gasen - Google Patents

Verfahren zur Abtrennung von Wasser aus Vakuumkammern oder aus Gasen

Info

Publication number
DE69910661D1
DE69910661D1 DE69910661T DE69910661T DE69910661D1 DE 69910661 D1 DE69910661 D1 DE 69910661D1 DE 69910661 T DE69910661 T DE 69910661T DE 69910661 T DE69910661 T DE 69910661T DE 69910661 D1 DE69910661 D1 DE 69910661D1
Authority
DE
Germany
Prior art keywords
gases
separation
water
vacuum chambers
chambers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69910661T
Other languages
English (en)
Other versions
DE69910661T2 (de
Inventor
Paolo Battilana
Giorgio Vergani
Claudio Boffito
Marco Succi
Luca Toia
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SAES Getters SpA
Original Assignee
SAES Getters SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SAES Getters SpA filed Critical SAES Getters SpA
Application granted granted Critical
Publication of DE69910661D1 publication Critical patent/DE69910661D1/de
Publication of DE69910661T2 publication Critical patent/DE69910661T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/26—Drying gases or vapours
    • B01D53/28—Selection of materials for use as drying agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/26—Drying gases or vapours
    • B01D53/261—Drying gases or vapours by adsorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
    • B01J20/06—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising oxides or hydroxides of metals not provided for in group B01J20/04

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Inorganic Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Drying Of Gases (AREA)
  • Treating Waste Gases (AREA)
  • Gas Separation By Absorption (AREA)
DE69910661T 1998-05-21 1999-05-17 Verfahren zur Abtrennung von Wasser aus Vakuumkammern oder aus Gasen Expired - Fee Related DE69910661T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
ITMI981138 1998-05-21
IT98MI001138A ITMI981138A1 (it) 1998-05-21 1998-05-21 Processo per la rimozione di acqua da camere evacuate o da gas

Publications (2)

Publication Number Publication Date
DE69910661D1 true DE69910661D1 (de) 2003-10-02
DE69910661T2 DE69910661T2 (de) 2004-06-17

Family

ID=11380085

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69910661T Expired - Fee Related DE69910661T2 (de) 1998-05-21 1999-05-17 Verfahren zur Abtrennung von Wasser aus Vakuumkammern oder aus Gasen

Country Status (11)

Country Link
US (1) US6304367B1 (de)
EP (1) EP0960647B1 (de)
JP (1) JP3510986B2 (de)
KR (1) KR100350963B1 (de)
CN (1) CN1091634C (de)
CA (1) CA2271588C (de)
DE (1) DE69910661T2 (de)
HK (1) HK1024195A1 (de)
IT (1) ITMI981138A1 (de)
SG (1) SG73634A1 (de)
TW (1) TW445170B (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6522457B2 (en) * 1999-05-20 2003-02-18 Paolo Battilana Apparatus for removal of water from evacuated chambers or from gasses using boron oxide
TW550307B (en) 2000-04-19 2003-09-01 Getters Spa A process for the purification of organometallic compounds or heteroatomic organic compounds with hydrogenated getter alloys
IT1317981B1 (it) 2000-06-16 2003-07-21 Getters Spa Dispositivi assorbitori di umidita' per amplificatori laser e processo per la loro produzione.
US6561012B1 (en) * 2000-10-20 2003-05-13 Arizona Instrument Llc Continuous flow moisture analyzer
US6905616B2 (en) * 2003-03-05 2005-06-14 Applied Materials, Inc. Method of releasing devices from a substrate
US6914323B2 (en) * 2003-03-20 2005-07-05 Honeywell International Inc. Methods and apparatus for attaching getters to MEMS device housings
US20050069475A1 (en) * 2003-09-30 2005-03-31 Hage Daniel B. System and process for reducing impurities
US7560820B2 (en) * 2004-04-15 2009-07-14 Saes Getters S.P.A. Integrated getter for vacuum or inert gas packaged LEDs
US20100273326A1 (en) * 2005-11-30 2010-10-28 Masahiro Nakamura Method for purifying unsaturated fluorocarbon compound, method for forming fluorocarbon film, and method for producing semiconductor device
CN104909381A (zh) * 2015-05-14 2015-09-16 广东先导稀材股份有限公司 一种高纯度无水氧化硼的浇注成型方法及系统
CN114617959A (zh) 2015-09-03 2022-06-14 诺瓦瓦克斯股份有限公司 具有改进的稳定性和免疫原性的疫苗组合物
AT518448B1 (de) * 2016-03-16 2017-12-15 Technische Universität Wien Verfahren zur thermochemischen Energiespeicherung
CN108622912B (zh) * 2018-07-11 2021-08-24 广东先导先进材料股份有限公司 高温覆盖剂级氧化硼的生产方法
CN110987716B (zh) * 2019-12-17 2022-07-22 佛山纬达光电材料股份有限公司 一种碘系偏光膜加工槽液中硼酸浓度的测定方法
CN111111387A (zh) * 2019-12-25 2020-05-08 中船重工（邯郸）派瑞特种气体有限公司 一种氟化氢钢瓶除水的方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1603222A (de) * 1968-10-17 1971-03-22
JP3052317B2 (ja) * 1989-10-25 2000-06-12 三菱瓦斯化学株式会社 脱酸素剤
US5424052A (en) * 1993-11-24 1995-06-13 U.S. Borax Inc. Production of boric oxide
US5696785A (en) * 1994-10-11 1997-12-09 Corning Incorporated Impurity getters in laser enclosures
US5955393A (en) * 1995-04-21 1999-09-21 Project Earth Industries, Inc. Enhanced adsorbent and room temperature catalyst particle and method of making therefor

Also Published As

Publication number Publication date
CA2271588A1 (en) 1999-11-21
DE69910661T2 (de) 2004-06-17
CA2271588C (en) 2005-12-13
US6304367B1 (en) 2001-10-16
KR20000005696A (ko) 2000-01-25
HK1024195A1 (en) 2000-10-05
EP0960647A1 (de) 1999-12-01
JP2000005552A (ja) 2000-01-11
EP0960647B1 (de) 2003-08-27
JP3510986B2 (ja) 2004-03-29
CN1091634C (zh) 2002-10-02
CN1236661A (zh) 1999-12-01
TW445170B (en) 2001-07-11
KR100350963B1 (ko) 2002-08-28
ITMI981138A1 (it) 1999-11-21
SG73634A1 (en) 2000-06-20

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee