DE69900384D1 - Kostengünstiger mikrobiegebalken aus photoplastischem material - Google Patents

Kostengünstiger mikrobiegebalken aus photoplastischem material

Info

Publication number
DE69900384D1
DE69900384D1 DE69900384T DE69900384T DE69900384D1 DE 69900384 D1 DE69900384 D1 DE 69900384D1 DE 69900384 T DE69900384 T DE 69900384T DE 69900384 T DE69900384 T DE 69900384T DE 69900384 D1 DE69900384 D1 DE 69900384D1
Authority
DE
Germany
Prior art keywords
microbending
effective
cost
beams made
photoplastic material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69900384T
Other languages
English (en)
Other versions
DE69900384T2 (de
Inventor
Cornel Andreoli
P Brugger
Ute Drechsler
Peter Vettiger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NanoWorld AG
Original Assignee
Ohlsson Olaf
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ohlsson Olaf filed Critical Ohlsson Olaf
Application granted granted Critical
Publication of DE69900384D1 publication Critical patent/DE69900384D1/de
Publication of DE69900384T2 publication Critical patent/DE69900384T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G01Q70/14—Particular materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/16—Probe manufacture
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2049—Exposure; Apparatus therefor using a cantilever
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/875—Scanning probe structure with tip detail
    • Y10S977/879—Material

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Micromachines (AREA)
DE69900384T 1998-04-28 1999-04-28 Kostengünstiger mikrobiegebalken aus photoplastischem material Expired - Fee Related DE69900384T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP98107662 1998-04-28
PCT/IB1999/000765 WO1999056176A1 (en) 1998-04-28 1999-04-28 Low-cost photoplastic cantilever

Publications (2)

Publication Number Publication Date
DE69900384D1 true DE69900384D1 (de) 2001-11-29
DE69900384T2 DE69900384T2 (de) 2003-02-27

Family

ID=8231839

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69900384T Expired - Fee Related DE69900384T2 (de) 1998-04-28 1999-04-28 Kostengünstiger mikrobiegebalken aus photoplastischem material

Country Status (4)

Country Link
US (1) US6291140B1 (de)
EP (1) EP0990195B1 (de)
DE (1) DE69900384T2 (de)
WO (1) WO1999056176A1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6368275B1 (en) * 1999-10-07 2002-04-09 Acuson Corporation Method and apparatus for diagnostic medical information gathering, hyperthermia treatment, or directed gene therapy
JP3514207B2 (ja) * 2000-03-15 2004-03-31 株式会社村田製作所 強誘電体薄膜素子ならびにセンサ、および強誘電体薄膜素子の製造方法
DE10027060B4 (de) * 2000-06-05 2006-11-30 Nanosurf Ag Abtastspitzen,Verfahren zur Herstellung und Verwendung derselben, insbesondere für die Rastersondenmikroskopie
EP1191331B1 (de) * 2000-09-18 2016-02-24 Imec Herstellungsverfahren für Spitzen und Probenköpfe von STM's oder AFM's
EP1359388B1 (de) * 2002-05-03 2004-12-08 Nanoworld AG SPM-Sensor und Verfahren zu dessen Herstellung
US6835589B2 (en) * 2002-11-14 2004-12-28 International Business Machines Corporation Three-dimensional integrated CMOS-MEMS device and process for making the same
US7217396B2 (en) * 2003-05-05 2007-05-15 The Board Of Trustees Of The University Of Illinois Microfabricated micro fluid channels
US20040228962A1 (en) * 2003-05-16 2004-11-18 Chang Liu Scanning probe microscopy probe and method for scanning probe contact printing
US7460462B2 (en) * 2003-12-17 2008-12-02 Hewlett-Packard Development Company, L.P. Contact probe storage fet sensor and write heater arrangements
US7449280B2 (en) * 2004-05-26 2008-11-11 Microchem Corp. Photoimageable coating composition and composite article thereof
US7541219B2 (en) * 2004-07-02 2009-06-02 Seagate Technology Llc Integrated metallic contact probe storage device
EP1938334A2 (de) * 2005-08-19 2008-07-02 BEYDER, Arthur Oszillator und herstellungsverfahren für ein mikroskop atomischer kräfte und andere anwendungen
US7281419B2 (en) * 2005-09-21 2007-10-16 The Board Of Trustees Of The University Of Illinois Multifunctional probe array system
JP4660726B2 (ja) * 2006-03-16 2011-03-30 セイコーインスツル株式会社 カンチレバー及びカンチレバーの製造方法
US8539905B2 (en) * 2008-11-07 2013-09-24 The Research Foundation For The State University Of New York Polymeric micro-cantilevers for ultra-low volume fluid and living cell deposition
EP2477038A1 (de) * 2011-01-14 2012-07-18 Centre National de la Recherche Scientifique Herstellung einer optischen Nahfeldsonde mittels Organomineralmaterial und Sol-Gel-Verfahren
US8479309B2 (en) 2011-04-28 2013-07-02 The Board Of Trustees Of The University Of Illinois Ultra-low damping imaging mode related to scanning probe microscopy in liquid

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3842354A1 (de) * 1988-12-16 1990-06-21 Kernforschungsz Karlsruhe Verfahren zur lithographischen herstellung von galvanisch abformbaren mikrostrukturen mit dreieckigem oder trapezfoermigem querschnitt
US4968585A (en) * 1989-06-20 1990-11-06 The Board Of Trustees Of The Leland Stanford Jr. University Microfabricated cantilever stylus with integrated conical tip
EP0413042B1 (de) * 1989-08-16 1992-12-16 International Business Machines Corporation Verfahren für die Herstellung mikromechanischer Messfühler für AFM/STM-Profilometrie und mikromechanischer Messfühlerkopf
JP3053456B2 (ja) * 1990-08-31 2000-06-19 オリンパス光学工業株式会社 走査型プローブ顕微鏡用カンチレバー及びその作製方法
JP2508928B2 (ja) * 1991-03-11 1996-06-19 日本電装株式会社 半導体加速度センサの製造方法
DE4435635A1 (de) * 1994-10-06 1996-06-05 Inst Physikalische Hochtech Ev Mikrobiegebalken für die atomare Kraftmikroskopie und Verfahren zu seiner Herstellung

Also Published As

Publication number Publication date
EP0990195B1 (de) 2001-10-24
WO1999056176A1 (en) 1999-11-04
EP0990195A1 (de) 2000-04-05
DE69900384T2 (de) 2003-02-27
US6291140B1 (en) 2001-09-18

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: NANO WORLD AG, NEUCHATEL, CH

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee