DE69835013D1 - Herstellung einer elektronenemittierenden vorrichtung mit leiterähnlicher emitterelektrode - Google Patents

Herstellung einer elektronenemittierenden vorrichtung mit leiterähnlicher emitterelektrode

Info

Publication number
DE69835013D1
DE69835013D1 DE69835013T DE69835013T DE69835013D1 DE 69835013 D1 DE69835013 D1 DE 69835013D1 DE 69835013 T DE69835013 T DE 69835013T DE 69835013 T DE69835013 T DE 69835013T DE 69835013 D1 DE69835013 D1 DE 69835013D1
Authority
DE
Germany
Prior art keywords
preparation
emitting device
emitter electrode
linear emitter
electronic emitting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69835013T
Other languages
English (en)
Other versions
DE69835013T2 (de
Inventor
J Spindt
J Oberg
A Haven
Roger W Barton
J Learn
A Bascom
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Candescent Intellectual Property Services Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Candescent Intellectual Property Services Inc filed Critical Candescent Intellectual Property Services Inc
Application granted granted Critical
Publication of DE69835013D1 publication Critical patent/DE69835013D1/de
Publication of DE69835013T2 publication Critical patent/DE69835013T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J19/00—Details of vacuum tubes of the types covered by group H01J21/00
    • H01J19/02—Electron-emitting electrodes; Cathodes
    • H01J19/24—Cold cathodes, e.g. field-emissive cathode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H01J3/022—Electron guns using a field emission, photo emission, or secondary emission electron source with microengineered cathode, e.g. Spindt-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00—Electron emission display panels, e.g. field emission display panels

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Cold Cathode And The Manufacture (AREA)
DE69835013T 1997-05-30 1998-05-26 Herstellung einer elektronenemittierenden vorrichtung mit leiterähnlicher emitterelektrode Expired - Lifetime DE69835013T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/866,150 US6002199A (en) 1997-05-30 1997-05-30 Structure and fabrication of electron-emitting device having ladder-like emitter electrode
US866150 1997-05-30
PCT/US1998/009907 WO1998054741A1 (en) 1997-05-30 1998-05-26 Structure and fabrication of electron-emitting device having ladder-like emitter electrode

Publications (2)

Publication Number Publication Date
DE69835013D1 true DE69835013D1 (de) 2006-08-03
DE69835013T2 DE69835013T2 (de) 2007-01-11

Family

ID=25347028

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69835013T Expired - Lifetime DE69835013T2 (de) 1997-05-30 1998-05-26 Herstellung einer elektronenemittierenden vorrichtung mit leiterähnlicher emitterelektrode

Country Status (6)

Country Link
US (4) US6002199A (de)
EP (1) EP0985220B1 (de)
JP (1) JP4234794B2 (de)
KR (1) KR20010013022A (de)
DE (1) DE69835013T2 (de)
WO (1) WO1998054741A1 (de)

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US6641933B1 (en) 1999-09-24 2003-11-04 Semiconductor Energy Laboratory Co., Ltd. Light-emitting EL display device
KR100464314B1 (ko) * 2000-01-05 2004-12-31 삼성에스디아이 주식회사 전계방출소자 및 그 제조방법
KR20010082831A (ko) * 2000-02-21 2001-08-31 구본준, 론 위라하디락사 액정표시장치의 제조방법
US6596146B1 (en) * 2000-05-12 2003-07-22 Candescent Technologies Corporation Electroplated structure for a flat panel display device
US6801002B2 (en) * 2000-05-26 2004-10-05 Exaconnect Corp. Use of a free space electron switch in a telecommunications network
US6407516B1 (en) 2000-05-26 2002-06-18 Exaconnect Inc. Free space electron switch
US6545425B2 (en) 2000-05-26 2003-04-08 Exaconnect Corp. Use of a free space electron switch in a telecommunications network
US6800877B2 (en) * 2000-05-26 2004-10-05 Exaconnect Corp. Semi-conductor interconnect using free space electron switch
US7064500B2 (en) * 2000-05-26 2006-06-20 Exaconnect Corp. Semi-conductor interconnect using free space electron switch
EP1258915A1 (de) * 2001-05-17 2002-11-20 Infineon Technologies SC300 GmbH & Co. KG Verfahren und Vorrichtung zur Erkennung von Defekten auf einem Halbleiterbauelement in einer Vorarbeitungsvorrichtung
US6406926B1 (en) * 2001-08-15 2002-06-18 Motorola, Inc. Method of forming a vacuum micro-electronic device
US6879097B2 (en) * 2001-09-28 2005-04-12 Candescent Technologies Corporation Flat-panel display containing electron-emissive regions of non-uniform spacing or/and multi-part lateral configuration
US6734620B2 (en) 2001-12-12 2004-05-11 Candescent Technologies Corporation Structure, fabrication, and corrective test of electron-emitting device having electrode configured to reduce cross-over capacitance and/or facilitate short-circuit repair
KR20050014430A (ko) * 2003-07-31 2005-02-07 삼성에스디아이 주식회사 평판 표시소자의 전자 방출원 형성용 조성물 및 이로부터제조되는 전자 방출원
KR20050058617A (ko) * 2003-12-12 2005-06-17 삼성에스디아이 주식회사 전계방출소자와, 이를 적용한 표시소자 및 그 제조방법
KR20050086238A (ko) * 2004-02-25 2005-08-30 삼성에스디아이 주식회사 전계 방출 표시장치
KR20050104562A (ko) * 2004-04-29 2005-11-03 삼성에스디아이 주식회사 전자 방출 표시장치
US7235745B2 (en) * 2005-01-10 2007-06-26 Endicott Interconnect Technologies, Inc. Resistor material with metal component for use in circuitized substrates, circuitized substrate utilizing same, method of making said ciruitized substrate, and information handling system utilizing said ciruitized substrate
KR20060104652A (ko) * 2005-03-31 2006-10-09 삼성에스디아이 주식회사 전자 방출 소자
KR20060104657A (ko) * 2005-03-31 2006-10-09 삼성에스디아이 주식회사 전자 방출 소자
KR20060124332A (ko) * 2005-05-31 2006-12-05 삼성에스디아이 주식회사 전자 방출 소자
KR20070046663A (ko) * 2005-10-31 2007-05-03 삼성에스디아이 주식회사 전자 방출 표시 디바이스
US8421275B2 (en) * 2009-11-19 2013-04-16 Electrolux Home Products, Inc. Apparatus for providing zero standby power control in an appliance
JP5331041B2 (ja) * 2010-03-30 2013-10-30 日本放送協会 電子放出源アレイ、撮像装置、及び表示装置
KR102076380B1 (ko) * 2012-03-16 2020-02-11 나녹스 이미징 피엘씨 전자 방출 구조체를 갖는 장치

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FR2623013A1 (fr) * 1987-11-06 1989-05-12 Commissariat Energie Atomique Source d'electrons a cathodes emissives a micropointes et dispositif de visualisation par cathodoluminescence excitee par emission de champ,utilisant cette source
US4874981A (en) * 1988-05-10 1989-10-17 Sri International Automatically focusing field emission electrode
FR2641412B1 (fr) * 1988-12-30 1991-02-15 Thomson Tubes Electroniques Source d'electrons du type a emission de champ
NL8901075A (nl) * 1989-04-28 1990-11-16 Philips Nv Inrichting ten behoeve van elektronengeneratie en weergeefinrichting.
US5235244A (en) * 1990-01-29 1993-08-10 Innovative Display Development Partners Automatically collimating electron beam producing arrangement
FR2669465B1 (fr) * 1990-11-16 1996-07-12 Thomson Rech Source d'electrons et procede de realisation.
US5191217A (en) * 1991-11-25 1993-03-02 Motorola, Inc. Method and apparatus for field emission device electrostatic electron beam focussing
US5418094A (en) * 1991-12-17 1995-05-23 Fuji Photo Film Co., Ltd. Method for forming a light shielding pattern
US5477105A (en) * 1992-04-10 1995-12-19 Silicon Video Corporation Structure of light-emitting device with raised black matrix for use in optical devices such as flat-panel cathode-ray tubes
US5374868A (en) * 1992-09-11 1994-12-20 Micron Display Technology, Inc. Method for formation of a trench accessible cold-cathode field emission device
CA2112733C (en) * 1993-01-07 1999-03-30 Naoto Nakamura Electron beam-generating apparatus, image-forming apparatus, and driving methods thereof
US5564959A (en) * 1993-09-08 1996-10-15 Silicon Video Corporation Use of charged-particle tracks in fabricating gated electron-emitting devices
US5559389A (en) * 1993-09-08 1996-09-24 Silicon Video Corporation Electron-emitting devices having variously constituted electron-emissive elements, including cones or pedestals
US5528103A (en) * 1994-01-31 1996-06-18 Silicon Video Corporation Field emitter with focusing ridges situated to sides of gate
US5569975A (en) * 1994-11-18 1996-10-29 Texas Instruments Incorporated Cluster arrangement of field emission microtips
WO1996016429A2 (en) * 1994-11-21 1996-05-30 Candescent Technologies Corporation Field emission device with internal structure for aligning phosphor pixels with corresponding field emitters
US5543683A (en) * 1994-11-21 1996-08-06 Silicon Video Corporation Faceplate for field emission display including wall gripper structures
US5650690A (en) * 1994-11-21 1997-07-22 Candescent Technologies, Inc. Backplate of field emission device with self aligned focus structure and spacer wall locators
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US6046539A (en) * 1997-04-29 2000-04-04 Candescent Technologies Corporation Use of sacrificial masking layer and backside exposure in forming openings that typically receive light-emissive material
US5920151A (en) * 1997-05-30 1999-07-06 Candescent Technologies Corporation Structure and fabrication of electron-emitting device having focus coating contacted through underlying access conductor

Also Published As

Publication number Publication date
EP0985220B1 (de) 2006-06-21
JP4234794B2 (ja) 2009-03-04
JP2002508879A (ja) 2002-03-19
US6338662B1 (en) 2002-01-15
US6146226A (en) 2000-11-14
WO1998054741A1 (en) 1998-12-03
DE69835013T2 (de) 2007-01-11
US6201343B1 (en) 2001-03-13
US6002199A (en) 1999-12-14
EP0985220A4 (de) 2002-11-27
EP0985220A1 (de) 2000-03-15
KR20010013022A (ko) 2001-02-26

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: CANON K.K., TOKYO, JP

8328 Change in the person/name/address of the agent

Representative=s name: BOEHMERT & BOEHMERT, 28209 BREMEN