DE69832665D1 - Verfahren zum Herstellen einer Reinraum-Atmosphäre - Google Patents
Verfahren zum Herstellen einer Reinraum-AtmosphäreInfo
- Publication number
- DE69832665D1 DE69832665D1 DE69832665T DE69832665T DE69832665D1 DE 69832665 D1 DE69832665 D1 DE 69832665D1 DE 69832665 T DE69832665 T DE 69832665T DE 69832665 T DE69832665 T DE 69832665T DE 69832665 D1 DE69832665 D1 DE 69832665D1
- Authority
- DE
- Germany
- Prior art keywords
- producing
- clean room
- room atmosphere
- atmosphere
- clean
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F5/00—Air-conditioning systems or apparatus not covered by F24F1/00 or F24F3/00, e.g. using solar heat or combined with household units such as an oven or water heater
- F24F5/0007—Air-conditioning systems or apparatus not covered by F24F1/00 or F24F3/00, e.g. using solar heat or combined with household units such as an oven or water heater cooling apparatus specially adapted for use in air-conditioning
- F24F5/0017—Air-conditioning systems or apparatus not covered by F24F1/00 or F24F3/00, e.g. using solar heat or combined with household units such as an oven or water heater cooling apparatus specially adapted for use in air-conditioning using cold storage bodies, e.g. ice
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/0001—Control or safety arrangements for ventilation
- F24F2011/0002—Control or safety arrangements for ventilation for admittance of outside air
- F24F2011/0004—Control or safety arrangements for ventilation for admittance of outside air to create overpressure in a room
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/14—Thermal energy storage
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Ventilation (AREA)
- Separation By Low-Temperature Treatments (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9712198.2A GB9712198D0 (en) | 1997-06-12 | 1997-06-12 | Clean room atmosphere control |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69832665D1 true DE69832665D1 (de) | 2006-01-12 |
Family
ID=10814017
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69832665T Expired - Lifetime DE69832665D1 (de) | 1997-06-12 | 1998-05-08 | Verfahren zum Herstellen einer Reinraum-Atmosphäre |
Country Status (6)
Country | Link |
---|---|
US (1) | US6055816A (de) |
EP (1) | EP0884541B1 (de) |
AU (1) | AU735428B2 (de) |
CA (1) | CA2237838A1 (de) |
DE (1) | DE69832665D1 (de) |
GB (1) | GB9712198D0 (de) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012106484A2 (en) * | 2011-02-02 | 2012-08-09 | Robert Amblad | Positive air pressure ice making and dispensing system |
DE102012020202A1 (de) * | 2012-10-16 | 2014-04-17 | Schilling Engineering GmbH | Reinraumsystem |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB482542A (en) * | 1936-02-10 | 1938-03-31 | Andre Louis Emile Maigret | Improvements relating to sealed shelters, notably those for protection against aerial or other bombardment |
US2650481A (en) * | 1948-01-27 | 1953-09-01 | Kellogg M W Co | Separation of gaseous mixtures |
US2873582A (en) * | 1957-01-25 | 1959-02-17 | Garrett Corp | Air conditioning system for space ships |
US2943459A (en) * | 1958-04-07 | 1960-07-05 | Fairchild Engine & Airplane | Air conditioning system |
US4337071A (en) * | 1979-08-02 | 1982-06-29 | Yang Lien C | Air purification system using cryogenic techniques |
GB2121950B (en) * | 1982-06-04 | 1985-09-04 | Nader Dadabhoy Daroga | Nuclear blast and fall-out shelter |
US5148681A (en) * | 1990-03-08 | 1992-09-22 | Bechtel Group, Inc. | Passive emergency ventilation system |
GB9515782D0 (en) * | 1995-08-01 | 1995-10-04 | Boc Group Plc | Temperature control |
GB9603669D0 (en) * | 1996-02-21 | 1996-04-17 | Boc Group Plc | Cool room temperature control apparatus |
US5749232A (en) * | 1996-12-18 | 1998-05-12 | Air Liquide America Corporation | Apparatus and method for producing and injecting sterile cryogenic liquids |
US5913893A (en) * | 1996-12-24 | 1999-06-22 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Process for the purification of a cryogenic fluid by filtration and/or adsorption |
-
1997
- 1997-06-12 GB GBGB9712198.2A patent/GB9712198D0/en not_active Ceased
-
1998
- 1998-05-08 DE DE69832665T patent/DE69832665D1/de not_active Expired - Lifetime
- 1998-05-08 EP EP98303636A patent/EP0884541B1/de not_active Expired - Lifetime
- 1998-05-15 CA CA002237838A patent/CA2237838A1/en not_active Abandoned
- 1998-06-10 AU AU70072/98A patent/AU735428B2/en not_active Ceased
- 1998-06-10 US US09/095,172 patent/US6055816A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0884541B1 (de) | 2005-12-07 |
AU735428B2 (en) | 2001-07-05 |
EP0884541A2 (de) | 1998-12-16 |
CA2237838A1 (en) | 1998-12-12 |
AU7007298A (en) | 1998-12-17 |
GB9712198D0 (en) | 1997-08-13 |
US6055816A (en) | 2000-05-02 |
EP0884541A3 (de) | 2002-02-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8332 | No legal effect for de |