DE69822097T2 - Dehnungsaufnehmer und dessen Verwendung - Google Patents

Dehnungsaufnehmer und dessen Verwendung Download PDF

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Publication number
DE69822097T2
DE69822097T2 DE69822097T DE69822097T DE69822097T2 DE 69822097 T2 DE69822097 T2 DE 69822097T2 DE 69822097 T DE69822097 T DE 69822097T DE 69822097 T DE69822097 T DE 69822097T DE 69822097 T2 DE69822097 T2 DE 69822097T2
Authority
DE
Germany
Prior art keywords
strain sensor
strain
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69822097T
Other languages
English (en)
Other versions
DE69822097D1 (de
Inventor
Stephen C Jacobsen
Mark R Whitaker
Michael G Mladejovsky
Brian J Maclean
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sarcos LC
Original Assignee
Sarcos LC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sarcos LC filed Critical Sarcos LC
Application granted granted Critical
Publication of DE69822097D1 publication Critical patent/DE69822097D1/de
Publication of DE69822097T2 publication Critical patent/DE69822097T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
DE69822097T 1997-11-28 1998-11-20 Dehnungsaufnehmer und dessen Verwendung Expired - Lifetime DE69822097T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/980,325 US5936411A (en) 1997-11-28 1997-11-28 Apparatus and method for measuring strain within a structure

Publications (2)

Publication Number Publication Date
DE69822097D1 DE69822097D1 (de) 2004-04-08
DE69822097T2 true DE69822097T2 (de) 2004-10-21

Family

ID=25527476

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69822097T Expired - Lifetime DE69822097T2 (de) 1997-11-28 1998-11-20 Dehnungsaufnehmer und dessen Verwendung

Country Status (4)

Country Link
US (1) US5936411A (de)
EP (1) EP0922935B1 (de)
JP (1) JP4261653B2 (de)
DE (1) DE69822097T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3822577A1 (de) 2019-11-18 2021-05-19 Philip Schmitt Mikromechanisches dehnungsmesssystem

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6346807B1 (en) * 1999-10-22 2002-02-12 Bently Nevada Corporation Digital eddy current proximity system: apparatus and method
DE19956545C1 (de) * 1999-11-24 2001-04-26 Wet Automotive Systems Ag Detektoreinrichtung
US7167009B2 (en) * 2002-04-16 2007-01-23 Mide Technology Corporation Method and apparatus for determining electrical properties of structures
US6829119B2 (en) * 2002-10-24 2004-12-07 Seagate Technology Llc Disc drive microactuator with lateral position sensor
US6925411B1 (en) 2003-04-02 2005-08-02 Sun Microsystems, Inc. Method and apparatus for aligning semiconductor chips using an actively driven vernier
FI20065063A0 (fi) 2006-01-30 2006-01-30 Visicamet Oy Menetelmä ja mittalaite mitata pinnan siirtymä
JP5302501B2 (ja) * 2006-10-25 2013-10-02 東海ゴム工業株式会社 車両の外装部材変形センサ
JP6026238B2 (ja) * 2012-11-19 2016-11-16 日本防蝕工業株式会社 構造物亀裂検知センサ、構造物亀裂検知装置および構造物亀裂検知方法
US10041855B2 (en) * 2014-01-21 2018-08-07 Quest Integrated, Inc. Fuse-like sensor, detection and measurement systems
WO2016092475A1 (en) 2014-12-10 2016-06-16 Okulov Paul D Micro electro-mechanical strain displacement sensor and usage monitoring system
US10012552B2 (en) 2015-11-23 2018-07-03 General Electric Company Systems and methods for monitoring component strain
US11137241B2 (en) * 2019-03-27 2021-10-05 Vishay Advanced Technologies, Ltd. Three dimensional strain gage

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4030347A (en) * 1975-10-31 1977-06-21 Electrical Power Research Institute Biaxial capacitance strain transducer
SE411392B (sv) * 1977-12-09 1979-12-17 Inst Mikrovagsteknik Vid Tekni Metanordning for kapacitiv bestemning av det inbordes leget hos tva relativt varandra rorliga delar
JPS6093312A (ja) * 1983-10-27 1985-05-25 Mitsutoyo Mfg Co Ltd 容量式変位測定機
JPS62235504A (ja) * 1986-04-04 1987-10-15 Mitsutoyo Corp 容量型位置測定トランスデユ−サ
US5014327A (en) * 1987-06-15 1991-05-07 Digital Equipment Corporation Parallel associative memory having improved selection and decision mechanisms for recognizing and sorting relevant patterns
GB2223589B (en) * 1988-09-14 1991-07-24 Valk Rob V D Measurement of capacitance and parameters related thereto
CH685214A5 (fr) * 1991-10-15 1995-04-28 Hans Ulrich Meyer Capteur capacitif de position.
DE4313344A1 (de) * 1993-04-23 1994-11-03 Roch Pierre Ets Kapazitive Meßeinrichtung
US5731707A (en) * 1996-04-17 1998-03-24 Mitutoyo Corporation Method and apparatus for synthesizing spatial waveforms in an electronic position encoder

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3822577A1 (de) 2019-11-18 2021-05-19 Philip Schmitt Mikromechanisches dehnungsmesssystem
EP4336143A2 (de) 2019-11-18 2024-03-13 Philip Schmitt Mikromechanisches messsystem zur messung von dehnungen an einem messobjekt und kompensation isotrop wirkender dehnung
EP4354082A2 (de) 2019-11-18 2024-04-17 Philip Schmitt Mikromechanische vorrichtung zur energieautarken messung und speicherung eines mechanischen verschiebungssignals

Also Published As

Publication number Publication date
JP4261653B2 (ja) 2009-04-30
EP0922935A1 (de) 1999-06-16
EP0922935B1 (de) 2004-03-03
US5936411A (en) 1999-08-10
DE69822097D1 (de) 2004-04-08
JPH11230710A (ja) 1999-08-27

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