DE69816967D1 - Positionnierungsvorrichtung mit h-antrieb - Google Patents

Positionnierungsvorrichtung mit h-antrieb

Info

Publication number
DE69816967D1
DE69816967D1 DE69816967T DE69816967T DE69816967D1 DE 69816967 D1 DE69816967 D1 DE 69816967D1 DE 69816967 T DE69816967 T DE 69816967T DE 69816967 T DE69816967 T DE 69816967T DE 69816967 D1 DE69816967 D1 DE 69816967D1
Authority
DE
Germany
Prior art keywords
drive
positioning device
positioning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69816967T
Other languages
English (en)
Other versions
DE69816967T2 (de
Inventor
Gastel Martinus Van
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Assembleon BV
Original Assignee
Assembleon BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Assembleon BV filed Critical Assembleon BV
Application granted granted Critical
Publication of DE69816967D1 publication Critical patent/DE69816967D1/de
Publication of DE69816967T2 publication Critical patent/DE69816967T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04—Mounting of components, e.g. of leadless components

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Supply And Installment Of Electrical Components (AREA)
  • Control Of Position Or Direction (AREA)
DE69816967T 1997-11-12 1998-10-19 Positionnierungsvorrichtung mit h-antrieb Expired - Fee Related DE69816967T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP97203519 1997-11-12
EP97203519 1997-11-12
PCT/IB1998/001655 WO1999024885A1 (en) 1997-11-12 1998-10-19 Positioning device with h-drive

Publications (2)

Publication Number Publication Date
DE69816967D1 true DE69816967D1 (de) 2003-09-11
DE69816967T2 DE69816967T2 (de) 2004-07-29

Family

ID=8228919

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69816967T Expired - Fee Related DE69816967T2 (de) 1997-11-12 1998-10-19 Positionnierungsvorrichtung mit h-antrieb

Country Status (5)

Country Link
US (1) US6189875B1 (de)
EP (1) EP0951664B1 (de)
JP (1) JP2001507999A (de)
DE (1) DE69816967T2 (de)
WO (1) WO1999024885A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6695297B2 (en) * 2001-12-19 2004-02-24 Agilent Technologies, Inc. Flexural device-based suspension having high compliance in a direction of travel and low compliance in a direction orthogonal thereto
NL1032371C2 (nl) * 2006-08-28 2008-02-29 Assembleon Bv Verplaatsingsinrichting alsmede componentplaatsingsinrichting.
DE102007020779B3 (de) * 2007-05-03 2008-12-18 Siemens Ag Bestückautomat zum Bestücken von elektrischen und/oder optischen Bauteilen auf Substrate
CN102674041B (zh) * 2012-04-24 2014-07-23 华中科技大学 一种片材真空拾放装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2793028A (en) * 1954-09-10 1957-05-21 Hughes Aircraft Co Cross-spring flexure pivot
DE1120711B (de) * 1955-10-03 1961-12-28 Erik Gunnar Ljungstroem Stoerkraftkompensierte Lagerung
US2947067A (en) * 1957-12-09 1960-08-02 Sandberg Serrell Corp Method of manufacture of flexure member
US2932482A (en) * 1958-05-26 1960-04-12 Robinson Aviat Inc Stabilized mounting system
US2966049A (en) * 1959-09-29 1960-12-27 Alfred N Ormond Universal flexure joint
US4030815A (en) * 1975-10-31 1977-06-21 Rca Corporation Hydrostatic bearing apparatus
NL7802131A (nl) 1978-02-27 1979-08-29 Philips Nv Instelinrichting voor het in twee onderling loodrechte instelrichtingen instellen van de positie van een optische of opto-electronische component.
NL8204450A (nl) 1982-11-17 1984-06-18 Philips Nv Verplaatsingsinrichting, in het bijzonder voor het stralingslithografisch behandelen van een substraat.
FR2659716A1 (fr) * 1990-03-19 1991-09-20 Kodak Pathe Dispositif de guidage d'un mouvement de translation d'un premier element par rapport a un second.

Also Published As

Publication number Publication date
WO1999024885A1 (en) 1999-05-20
JP2001507999A (ja) 2001-06-19
DE69816967T2 (de) 2004-07-29
EP0951664A1 (de) 1999-10-27
US6189875B1 (en) 2001-02-20
EP0951664B1 (de) 2003-08-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: ACKMANN MENGES PATENT- UND RECHTSANWAELTE, 80469 M

8339 Ceased/non-payment of the annual fee