DE69801080D1 - Zweistufige vakuumpumpanlage - Google Patents

Zweistufige vakuumpumpanlage

Info

Publication number
DE69801080D1
DE69801080D1 DE69801080T DE69801080T DE69801080D1 DE 69801080 D1 DE69801080 D1 DE 69801080D1 DE 69801080 T DE69801080 T DE 69801080T DE 69801080 T DE69801080 T DE 69801080T DE 69801080 D1 DE69801080 D1 DE 69801080D1
Authority
DE
Germany
Prior art keywords
vacuum pump
pump system
stage vacuum
stage
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69801080T
Other languages
English (en)
Other versions
DE69801080T2 (de
Inventor
Marsbed Hablanian
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Inc
Original Assignee
Varian Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Inc filed Critical Varian Inc
Application granted granted Critical
Publication of DE69801080D1 publication Critical patent/DE69801080D1/de
Publication of DE69801080T2 publication Critical patent/DE69801080T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0246—Details concerning the involute wraps or their base, e.g. geometry
    • F04C18/0253—Details concerning the base
    • F04C18/0261—Details of the ports, e.g. location, number, geometry
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/005—Axial sealings for working fluid

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)
DE69801080T 1997-02-25 1998-02-25 Zweistufige vakuumpumpanlage Expired - Fee Related DE69801080T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US80688297A 1997-02-25 1997-02-25
PCT/US1998/003676 WO1998037327A1 (en) 1997-02-25 1998-02-25 Two stage vacuum pumping apparatus

Publications (2)

Publication Number Publication Date
DE69801080D1 true DE69801080D1 (de) 2001-08-16
DE69801080T2 DE69801080T2 (de) 2002-03-14

Family

ID=25195044

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69801080T Expired - Fee Related DE69801080T2 (de) 1997-02-25 1998-02-25 Zweistufige vakuumpumpanlage

Country Status (7)

Country Link
US (1) US5947694A (de)
EP (1) EP0904494B1 (de)
JP (1) JP2000509786A (de)
KR (1) KR100319011B1 (de)
CA (1) CA2252755A1 (de)
DE (1) DE69801080T2 (de)
WO (1) WO1998037327A1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000220584A (ja) * 1999-02-02 2000-08-08 Toyota Autom Loom Works Ltd スクロール型圧縮機
US6185944B1 (en) * 1999-02-05 2001-02-13 Midwest Research Institute Refrigeration system with a compressor-pump unit and a liquid-injection desuperheating line
FR2822200B1 (fr) * 2001-03-19 2003-09-26 Cit Alcatel Systeme de pompage pour gaz a faible conductivite thermique
US6638040B2 (en) * 2001-12-31 2003-10-28 Industrial Technology Research Institute Dry vacuum pump
US6658866B2 (en) * 2002-02-13 2003-12-09 Carrier Corporation Scroll expressor
JP4709016B2 (ja) * 2006-01-12 2011-06-22 アネスト岩田株式会社 複合圧縮機
GB201007028D0 (en) * 2010-04-28 2010-06-09 Edwards Ltd Scroll pump
WO2012141979A1 (en) * 2011-04-13 2012-10-18 The Regents Of The University Of California Compression-ratio dehumidifier
US9982666B2 (en) * 2015-05-29 2018-05-29 Agilient Technologies, Inc. Vacuum pump system including scroll pump and secondary pumping mechanism
US11234754B2 (en) 2017-11-29 2022-02-01 Megadyne Medical Products, Inc. Smoke evacuation device
US11725664B2 (en) * 2017-11-29 2023-08-15 Megadyne Medical Products, Inc. Noise and vibration management for smoke evacuation system
CN110630498A (zh) * 2019-09-11 2019-12-31 河北昊方新能源科技有限公司 具有吸气增压的涡旋制冷压缩机
US11519419B2 (en) 2020-04-15 2022-12-06 Kin-Chung Ray Chiu Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface
GB2600716B (en) * 2020-11-05 2023-05-03 Edwards Ltd Scroll pump

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US801182A (en) 1905-06-26 1905-10-03 Leon Creux Rotary engine.
US1376291A (en) * 1918-02-26 1921-04-26 Rolkerr Retlow Fluid-compressor
US5051075A (en) 1990-02-20 1991-09-24 Arthur D. Little, Inc. Gearing system having interdigited teeth with convex and concave surface portions
US5258046A (en) 1991-02-13 1993-11-02 Iwata Air Compressor Mfg. Co., Ltd. Scroll-type fluid machinery with seals for the discharge port and wraps
JP2718295B2 (ja) 1991-08-30 1998-02-25 ダイキン工業株式会社 スクロール圧縮機
US5417554A (en) * 1994-07-19 1995-05-23 Ingersoll-Rand Company Air cooling system for scroll compressors
US5616015A (en) * 1995-06-07 1997-04-01 Varian Associates, Inc. High displacement rate, scroll-type, fluid handling apparatus

Also Published As

Publication number Publication date
KR100319011B1 (ko) 2002-06-20
DE69801080T2 (de) 2002-03-14
KR20000065002A (ko) 2000-11-06
CA2252755A1 (en) 1998-08-27
EP0904494B1 (de) 2001-07-11
JP2000509786A (ja) 2000-08-02
EP0904494A1 (de) 1999-03-31
US5947694A (en) 1999-09-07
WO1998037327A1 (en) 1998-08-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee