Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Polymer Co Ltd
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Polymer Co Ltd
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Polymer Co Ltd, Shin Etsu Chemical Co LtdfiledCriticalShin Etsu Polymer Co Ltd
Priority claimed from EP97121526Aexternal-prioritypatent/EP0921401B1/de
Application grantedgrantedCritical
Publication of DE69727941D1publicationCriticalpatent/DE69727941D1/de
Publication of DE69727941T2publicationCriticalpatent/DE69727941T2/de