DE69721144D1 - Verfahren und Vorrichtung zum Steuern der Funktion eines Oberflächenbehandlungssystems für einen laufenden festen Substrat - Google Patents

Verfahren und Vorrichtung zum Steuern der Funktion eines Oberflächenbehandlungssystems für einen laufenden festen Substrat

Info

Publication number
DE69721144D1
DE69721144D1 DE69721144T DE69721144T DE69721144D1 DE 69721144 D1 DE69721144 D1 DE 69721144D1 DE 69721144 T DE69721144 T DE 69721144T DE 69721144 T DE69721144 T DE 69721144T DE 69721144 D1 DE69721144 D1 DE 69721144D1
Authority
DE
Germany
Prior art keywords
assembly
speed
substrate
data processing
processing unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69721144T
Other languages
English (en)
Other versions
DE69721144T2 (de
Inventor
Gilles Lagrange
Isabelle Hibon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA a Directoire et Conseil de Surveillance pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA, LAir Liquide SA a Directoire et Conseil de Surveillance pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Publication of DE69721144D1 publication Critical patent/DE69721144D1/de
Application granted granted Critical
Publication of DE69721144T2 publication Critical patent/DE69721144T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/10Surface shaping of articles, e.g. embossing; Apparatus therefor by electric discharge treatment
    • B29C59/12Surface shaping of articles, e.g. embossing; Apparatus therefor by electric discharge treatment in an environment other than air
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C37/00Component parts, details, accessories or auxiliary operations, not covered by group B29C33/00 or B29C35/00
    • B29C2037/90Measuring, controlling or regulating
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S205/00Electrolysis: processes, compositions used therein, and methods of preparing the compositions
    • Y10S205/918Use of wave energy or electrical discharge during pretreatment of substrate or post-treatment of coating

Landscapes

  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical Vapour Deposition (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Drying Of Semiconductors (AREA)
  • Weting (AREA)
  • Coating Apparatus (AREA)
  • Manufacturing Of Printed Wiring (AREA)
DE69721144T 1996-07-23 1997-07-01 Verfahren und Vorrichtung zum Steuern der Funktion eines Oberflächenbehandlungssystems für einen laufenden festen Substrat Expired - Lifetime DE69721144T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9609233A FR2751664B1 (fr) 1996-07-23 1996-07-23 Procede et dispositif de commande du fonctionnement d'un systeme de traitement de surface d'un substrat solide en defilement
FR9609233 1996-07-23

Publications (2)

Publication Number Publication Date
DE69721144D1 true DE69721144D1 (de) 2003-05-28
DE69721144T2 DE69721144T2 (de) 2004-03-11

Family

ID=9494361

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69721144T Expired - Lifetime DE69721144T2 (de) 1996-07-23 1997-07-01 Verfahren und Vorrichtung zum Steuern der Funktion eines Oberflächenbehandlungssystems für einen laufenden festen Substrat

Country Status (12)

Country Link
US (1) US6144898A (de)
EP (1) EP0820852B1 (de)
JP (1) JP4112652B2 (de)
KR (1) KR980010674A (de)
AT (1) ATE238160T1 (de)
AU (1) AU729512B2 (de)
CA (1) CA2211440C (de)
DE (1) DE69721144T2 (de)
DK (1) DK0820852T3 (de)
ES (1) ES2198537T3 (de)
FR (1) FR2751664B1 (de)
TW (1) TW366678B (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100765584B1 (ko) 2006-11-20 2007-10-09 현대자동차주식회사 크랭크케이스의 환기장치

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5550034A (en) * 1978-10-05 1980-04-11 Toray Ind Inc Surface-treatment of plastic
AU544534B2 (en) * 1983-06-14 1985-06-06 Toyota Jidosha Kabushiki Kaisha Plasma coating
JPS60228673A (ja) * 1984-04-25 1985-11-13 Hitachi Ltd プラズマ処理装置用制御装置
JPS62274080A (ja) * 1986-05-21 1987-11-28 Hitachi Ltd プラズマ処理方法
DE3622737C1 (de) * 1986-07-05 1987-10-08 Klaus Kalwar Verfahren zur Korona-Behandlung von bahnfoermigen Materialien sowie Vorrichtung zur Durchfuehrung des Verfahrens
FR2670506B1 (fr) * 1990-12-17 1993-02-19 Air Liquide Procede de depot d'une couche d'oxyde de silicium liee a un substrat en polyolefine.
US5527629A (en) * 1990-12-17 1996-06-18 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Process of depositing a layer of silicon oxide bonded to a substrate of polymeric material using high pressure and electrical discharge
DE59409654D1 (de) * 1993-11-23 2001-03-15 Dyconex Patente Ag Zug Verfahren zur Strukturierung von Polymerfolien
DE4442746C1 (de) * 1994-12-01 1996-05-02 Voith Sulzer Finishing Gmbh Verfahren und Vorrichtung zum Behandeln einer Materialbahn
CA2177803A1 (en) * 1995-06-01 1996-12-02 Robert H. Moore Nip pressure sensing system
US5763892A (en) * 1995-06-19 1998-06-09 Dainippon Screen Manufacturing Company, Ltd. Ultraviolet irradiator for substrate, substrate treatment system, and method of irradiating substrate with ultraviolet light
DE19546260C1 (de) * 1995-12-12 1996-11-21 Weitmann & Konrad Fa Verfahren zur Überwachung der Sprühmenge einer zur Befeuchtung bewegter Materialbahnen in die Breite versprühten Flüssigkeit über deren Breite, Vorrichtung zur Durchführung des Verfahrens, sowie Verwendung der Vorrichtung
US5711147A (en) * 1996-08-19 1998-01-27 The Regents Of The University Of California Plasma-assisted catalytic reduction system
US5891409A (en) * 1996-08-19 1999-04-06 The Regents Of The University Of California Pre-converted nitric oxide gas in catalytic reduction system

Also Published As

Publication number Publication date
CA2211440A1 (fr) 1998-01-23
ATE238160T1 (de) 2003-05-15
EP0820852A1 (de) 1998-01-28
DK0820852T3 (da) 2003-08-04
ES2198537T3 (es) 2004-02-01
AU2614997A (en) 1998-01-29
EP0820852B1 (de) 2003-04-23
CA2211440C (fr) 2006-10-03
JPH10212584A (ja) 1998-08-11
US6144898A (en) 2000-11-07
JP4112652B2 (ja) 2008-07-02
FR2751664A1 (fr) 1998-01-30
TW366678B (en) 1999-08-11
FR2751664B1 (fr) 1998-09-04
KR980010674A (ko) 1998-04-30
DE69721144T2 (de) 2004-03-11
AU729512B2 (en) 2001-02-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition