DE69713375D1 - Integrierter interferometer - Google Patents

Integrierter interferometer

Info

Publication number
DE69713375D1
DE69713375D1 DE69713375T DE69713375T DE69713375D1 DE 69713375 D1 DE69713375 D1 DE 69713375D1 DE 69713375 T DE69713375 T DE 69713375T DE 69713375 T DE69713375 T DE 69713375T DE 69713375 D1 DE69713375 D1 DE 69713375D1
Authority
DE
Germany
Prior art keywords
integrated interferometer
interferometer
integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69713375T
Other languages
English (en)
Other versions
DE69713375T2 (de
Inventor
Ralf-Dieter Pechstedt
James Stuart Mckenzie
Yicheng Lu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lumentum Technology UK Ltd
Original Assignee
Bookham Technology PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bookham Technology PLC filed Critical Bookham Technology PLC
Publication of DE69713375D1 publication Critical patent/DE69713375D1/de
Application granted granted Critical
Publication of DE69713375T2 publication Critical patent/DE69713375T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
    • G02B6/423—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02023—Indirect probing of object, e.g. via influence on cavity or fibre
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G01B9/02028—Two or more reference or object arms in one interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G01B9/02051—Integrated design, e.g. on-chip or monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02064—Active error reduction, i.e. varying with time by particular adjustment of coherence gate, i.e. adjusting position of zero path difference in low coherence interferometry
    • G01B9/02065—Active error reduction, i.e. varying with time by particular adjustment of coherence gate, i.e. adjusting position of zero path difference in low coherence interferometry using a second interferometer before or after measuring interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/25—Fabry-Perot in interferometer, e.g. etalon, cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
DE69713375T 1996-11-15 1997-11-14 Integrierter interferometer Expired - Fee Related DE69713375T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB9623762A GB2319335B (en) 1996-11-15 1996-11-15 Integrated interferometer
PCT/GB1997/003144 WO1998022775A1 (en) 1996-11-15 1997-11-14 Integrated interferometer

Publications (2)

Publication Number Publication Date
DE69713375D1 true DE69713375D1 (de) 2002-07-18
DE69713375T2 DE69713375T2 (de) 2003-03-27

Family

ID=10802974

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69713375T Expired - Fee Related DE69713375T2 (de) 1996-11-15 1997-11-14 Integrierter interferometer

Country Status (9)

Country Link
EP (1) EP0938643B1 (de)
JP (1) JP2001508173A (de)
KR (1) KR20000053301A (de)
CN (1) CN1238041A (de)
AU (1) AU722535B2 (de)
CA (1) CA2269828A1 (de)
DE (1) DE69713375T2 (de)
GB (1) GB2319335B (de)
WO (1) WO1998022775A1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2338059B (en) * 1998-05-20 2000-03-08 Bookham Technology Ltd An optically addressed sensing system
GB2348293A (en) 1999-03-25 2000-09-27 Bookham Technology Ltd Optical phase modulator
GB2390152A (en) * 2002-06-25 2003-12-31 Denselight Semiconductors Pte Waveguide absorption measurement
CN100395516C (zh) * 2004-12-25 2008-06-18 鸿富锦精密工业（深圳）有限公司 光纤干涉式厚度测量装置
KR100812083B1 (ko) * 2006-09-12 2008-03-07 경북대학교 산학협력단 반사형 마이크로 옵틱 간섭계형 필터 및 그의 응용 장치
KR101033537B1 (ko) * 2007-09-05 2011-05-11 에프엔티주식회사 선박용 배출폐유 오염도 측정시스템
JP2009216638A (ja) * 2008-03-12 2009-09-24 Nec Corp 微小変位測定装置とその測定方法
US8018597B2 (en) 2008-06-20 2011-09-13 Com Dev International Ltd. Slab waveguide spatial heterodyne spectrometer assembly
CN101608930B (zh) * 2009-07-09 2012-05-23 复旦大学 一种光纤干涉仪π/2相位偏置的实现方法
JP2014501053A (ja) * 2010-10-12 2014-01-16 コーニンクレッカ フィリップス エヌ ヴェ テラヘルツ放射線に対するワイヤ型ウェーブガイド
GB201106204D0 (en) * 2011-04-12 2011-05-25 Oxsensis Ltd Optical sensor
GB2495518B (en) * 2011-10-12 2016-08-31 Oxsensis Ltd Optical sensor for sensing temperature of an adjacent gas
EP3357180B1 (de) 2015-09-29 2022-04-20 Rockley Photonics Limited Optoelektronischer schalter
GB2545912A (en) * 2015-12-29 2017-07-05 Nokia Technologies Oy Interferometry
US9893816B2 (en) * 2016-03-25 2018-02-13 Intel Corporation Dynamic beam steering optoelectronic packages
EP3581993A1 (de) * 2018-06-11 2019-12-18 IMEC vzw Monolithischer iii-v/si-wellenleiter-phasenmodulator
EP3828506B1 (de) * 2019-11-29 2022-06-29 Meggitt SA Optischer sensor zur messung physikalische grösse in rauer umgebung sowie verfahren zu herstellung und zum gebrauch derselben

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4445751A (en) * 1981-10-19 1984-05-01 Westinghouse Electric Corp. Metal coated, tapered, optical fiber coupled to substrate and method of fabrication
EP0331332A3 (de) * 1988-03-03 1991-01-16 AT&T Corp. Bauelement mit einer gegenüber einem Substrat-Wellenleiter ausgerichteten Komponente
DE8809825U1 (de) * 1988-08-02 1989-11-30 Hommelwerke Gmbh, 7730 Villingen-Schwenningen, De
DE4204521C1 (de) * 1992-02-15 1993-06-24 Daimler-Benz Aktiengesellschaft, 7000 Stuttgart, De
WO1994011708A1 (en) * 1992-11-06 1994-05-26 Martin Marietta Corporation Interferometric optical sensor read-out system
WO1995008787A1 (en) * 1993-09-21 1995-03-30 Bookham Technology Limited An electro-optic device

Also Published As

Publication number Publication date
CA2269828A1 (en) 1998-05-28
WO1998022775A1 (en) 1998-05-28
JP2001508173A (ja) 2001-06-19
AU4959297A (en) 1998-06-10
KR20000053301A (ko) 2000-08-25
GB2319335B (en) 1998-11-11
DE69713375T2 (de) 2003-03-27
GB2319335A (en) 1998-05-20
AU722535B2 (en) 2000-08-03
GB9623762D0 (en) 1997-01-08
EP0938643B1 (de) 2002-06-12
EP0938643A1 (de) 1999-09-01
CN1238041A (zh) 1999-12-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee