DE69706635D1 - Schliess- und Öffnungsvorrichtung - Google Patents

Schliess- und Öffnungsvorrichtung

Info

Publication number
DE69706635D1
DE69706635D1 DE69706635T DE69706635T DE69706635D1 DE 69706635 D1 DE69706635 D1 DE 69706635D1 DE 69706635 T DE69706635 T DE 69706635T DE 69706635 T DE69706635 T DE 69706635T DE 69706635 D1 DE69706635 D1 DE 69706635D1
Authority
DE
Germany
Prior art keywords
closing
opening device
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69706635T
Other languages
English (en)
Other versions
DE69706635T2 (de
Inventor
Tadahiro Ohmi
Yuji Kawano
Keiji Hirao
Hisashi Tanaka
Hiroshi Morokoshi
Yukio Minami
Masayuki Hatano
Shigeaki Tanaka
Michio Yamaji
Michio Kuramochi
Nobukazu Ikeda
Shigeru Itoi
Michihiro Kashiwa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Inc filed Critical Fujikin Inc
Application granted granted Critical
Publication of DE69706635D1 publication Critical patent/DE69706635D1/de
Publication of DE69706635T2 publication Critical patent/DE69706635T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0832—Modular valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0807—Manifolds
    • F15B13/0817—Multiblock manifolds
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0871—Channels for fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0878—Assembly of modular units
    • F15B13/0885—Assembly of modular units using valves combined with other components
    • F15B13/0892—Valves combined with fluid components
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0878—Assembly of modular units
    • F15B13/0896—Assembly of modular units using different types or sizes of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87249—Multiple inlet with multiple outlet
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87571—Multiple inlet with single outlet
    • Y10T137/87676—With flow control
    • Y10T137/87684—Valve in each inlet
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87917—Flow path with serial valves and/or closures

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Valve Housings (AREA)
  • Pipeline Systems (AREA)
  • Multiple-Way Valves (AREA)
  • Feeding And Controlling Fuel (AREA)
DE69706635T 1996-11-20 1997-11-18 Schliess- und Öffnungsvorrichtung Expired - Fee Related DE69706635T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30886996 1996-11-20

Publications (2)

Publication Number Publication Date
DE69706635D1 true DE69706635D1 (de) 2001-10-18
DE69706635T2 DE69706635T2 (de) 2002-07-04

Family

ID=17986247

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69706635T Expired - Fee Related DE69706635T2 (de) 1996-11-20 1997-11-18 Schliess- und Öffnungsvorrichtung

Country Status (9)

Country Link
US (1) US5983933A (de)
EP (1) EP0845623B1 (de)
JP (1) JP4022696B2 (de)
KR (1) KR100481774B1 (de)
CA (1) CA2221911C (de)
DE (1) DE69706635T2 (de)
IL (1) IL122252A0 (de)
SG (1) SG63775A1 (de)
TW (1) TW342433B (de)

Families Citing this family (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5992463A (en) 1996-10-30 1999-11-30 Unit Instruments, Inc. Gas panel
US6394138B1 (en) * 1996-10-30 2002-05-28 Unit Instruments, Inc. Manifold system of removable components for distribution of fluids
US6293310B1 (en) 1996-10-30 2001-09-25 Unit Instruments, Inc. Gas panel
JP3774800B2 (ja) * 1997-09-24 2006-05-17 株式会社フジキン 下段部材の固定装置およびこれを備えた流体制御装置
JP4378553B2 (ja) * 1997-10-13 2009-12-09 忠弘 大見 流体制御装置
CN1289851C (zh) 1998-03-05 2006-12-13 斯瓦戈洛克公司 歧管系统
EP1571381B1 (de) * 1998-03-05 2009-12-02 The Swagelok Company Verteiler mit modularer Oberflächenmontierung
US6629546B2 (en) 1998-03-05 2003-10-07 Swagelok Company Modular surface mount manifold assemblies
US7048007B2 (en) * 1998-03-05 2006-05-23 Swagelok Company Modular surface mount manifold assemblies
US7036528B2 (en) 1998-05-18 2006-05-02 Swagelok Company Modular surface mount manifold assemblies
DE69916046T2 (de) 1998-05-18 2004-12-30 The Swagelok Co., Cleveland Oberflächenmontierbarer verteiler
JP2003526759A (ja) * 1998-05-18 2003-09-09 スウエイジロク・カンパニー モジュール式面取付型マニホルド組立体
JP4110304B2 (ja) * 1998-06-30 2008-07-02 株式会社フジキン 流体制御装置および流体制御装置組立て方法
JP3921565B2 (ja) * 1998-07-10 2007-05-30 株式会社フジキン 流体制御装置
JP2000145979A (ja) * 1998-11-16 2000-05-26 Fujikin Inc 下段部材の固定装置およびこれを備えた流体制御装置
US6345642B1 (en) * 1999-02-19 2002-02-12 Applied Materials, Inc. Method and apparatus for removing processing liquid from a processing liquid path
US6817381B2 (en) * 1999-08-24 2004-11-16 Tokyo Electron Limited Gas processing apparatus, gas processing method and integrated valve unit for gas processing apparatus
AU6620600A (en) * 1999-09-01 2001-03-26 Silicon Valley Group, Inc. Layered block fluid delivery system
US6729353B2 (en) 1999-09-01 2004-05-04 Asml Us, Inc. Modular fluid delivery apparatus
US6640835B1 (en) * 2000-03-03 2003-11-04 Creative Pathways, Inc. Micromount™ system
JP4487135B2 (ja) * 2001-03-05 2010-06-23 東京エレクトロン株式会社 流体制御装置
US6769463B2 (en) 2001-05-16 2004-08-03 Celerity Group, Inc. Fluid flow system
US7334605B2 (en) 2002-08-27 2008-02-26 Celerity, Inc. Modular substrate gas panel having manifold connections in a common plane
EP1555471A4 (de) * 2002-10-21 2005-12-14 Ckd Corp Integriertes gasventil
AU2003291156A1 (en) 2002-11-26 2004-06-18 Swagelok Company Modular surface mount fluid system
US6874538B2 (en) * 2003-03-26 2005-04-05 Kevin S. Bennett Fluid delivery system
US20050005981A1 (en) * 2003-03-26 2005-01-13 Paul Eidsmore Modular fluid components and assembly
JP2004340199A (ja) * 2003-05-14 2004-12-02 Fujikin Inc 加熱装置付き流体制御装置
US7048008B2 (en) 2004-04-13 2006-05-23 Ultra Clean Holdings, Inc. Gas-panel assembly
US20060070674A1 (en) * 2004-10-01 2006-04-06 Eidsmore Paul G Substrate with offset flow passage
US7299825B2 (en) 2005-06-02 2007-11-27 Ultra Clean Holdings, Inc. Gas-panel assembly
US7320339B2 (en) 2005-06-02 2008-01-22 Ultra Clean Holdings, Inc. Gas-panel assembly
JP2007034667A (ja) * 2005-07-27 2007-02-08 Surpass Kogyo Kk 流量コントローラ、これに用いるレギュレータユニット、バルブユニット
JP2007102754A (ja) * 2005-09-09 2007-04-19 Advance Denki Kogyo Kk 流量制御装置
JP4780558B2 (ja) * 2005-12-09 2011-09-28 株式会社フジキン 流体制御装置用継手およびそれを用いた流体制御装置
US20080009977A1 (en) * 2006-07-10 2008-01-10 Ultra Clean Holdings Apparatus and Method for Monitoring a Chemical-Supply System
US20080029170A1 (en) * 2006-08-02 2008-02-07 O'reilly Edward Three-in-one valve and control system
US20100112814A1 (en) * 2006-09-06 2010-05-06 Sowmya Krishnan Pre-certified process chamber and method
US20080302426A1 (en) * 2007-06-06 2008-12-11 Greg Patrick Mulligan System and method of securing removable components for distribution of fluids
US7806143B2 (en) * 2007-06-11 2010-10-05 Lam Research Corporation Flexible manifold for integrated gas system gas panels
US20090078324A1 (en) * 2007-09-21 2009-03-26 Ultra Clean Technology, Inc. Gas-panel system
US20090114295A1 (en) * 2007-11-06 2009-05-07 Ultra Clean Holdings, Inc. Gas-panel assembly
US8307854B1 (en) 2009-05-14 2012-11-13 Vistadeltek, Inc. Fluid delivery substrates for building removable standard fluid delivery sticks
CN102804335B (zh) 2009-06-10 2015-10-21 威斯塔德尔特有限责任公司 极限流速和/或高温流体递送基体
US8950433B2 (en) 2011-05-02 2015-02-10 Advantage Group International Inc. Manifold system for gas and fluid delivery
JP5785813B2 (ja) * 2011-08-10 2015-09-30 株式会社フジキン 流体制御装置
KR101599344B1 (ko) * 2011-09-30 2016-03-03 가부시키가이샤 후지킨 가스 공급 장치
US9188990B2 (en) * 2011-10-05 2015-11-17 Horiba Stec, Co., Ltd. Fluid mechanism, support member constituting fluid mechanism and fluid control system
US8985152B2 (en) * 2012-06-15 2015-03-24 Novellus Systems, Inc. Point of use valve manifold for semiconductor fabrication equipment
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
JP6147113B2 (ja) * 2013-06-27 2017-06-14 株式会社フジキン 流体制御装置用継手および流体制御装置
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
WO2018168559A1 (ja) * 2017-03-15 2018-09-20 株式会社フジキン 継手および流体制御装置
TW202117217A (zh) 2019-09-19 2021-05-01 美商應用材料股份有限公司 清潔減少滯留區的隔離閥
JP7393788B2 (ja) * 2020-01-08 2023-12-07 アドバンス電気工業株式会社 弁構造体

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3797524A (en) * 1972-06-15 1974-03-19 Reedmer Plastics Inc Fluid metering device
US4558845A (en) * 1982-09-22 1985-12-17 Hunkapiller Michael W Zero dead volume valve
US4773446A (en) * 1986-08-27 1988-09-27 Porton Instruments, Inc. Valve block assembly
JP2568365B2 (ja) 1993-02-10 1997-01-08 株式会社東芝 ガス供給装置
US5320139A (en) * 1993-03-30 1994-06-14 Millipore Corporation Fluid delivery system
EP0619450A1 (de) * 1993-04-09 1994-10-12 The Boc Group, Inc. Gasgehäuse ohne Toträume

Also Published As

Publication number Publication date
JPH10205636A (ja) 1998-08-04
DE69706635T2 (de) 2002-07-04
KR100481774B1 (ko) 2005-07-12
JP4022696B2 (ja) 2007-12-19
CA2221911A1 (en) 1998-05-20
EP0845623A1 (de) 1998-06-03
IL122252A0 (en) 1998-04-05
TW342433B (en) 1998-10-11
KR19980042523A (ko) 1998-08-17
CA2221911C (en) 2006-09-12
SG63775A1 (en) 1999-03-30
EP0845623B1 (de) 2001-09-12
US5983933A (en) 1999-11-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee