DE69702299D1 - Verfahren zur herstellung einer wellenleiterpaar mit optischem mantel - Google Patents

Verfahren zur herstellung einer wellenleiterpaar mit optischem mantel

Info

Publication number
DE69702299D1
DE69702299D1 DE69702299T DE69702299T DE69702299D1 DE 69702299 D1 DE69702299 D1 DE 69702299D1 DE 69702299 T DE69702299 T DE 69702299T DE 69702299 T DE69702299 T DE 69702299T DE 69702299 D1 DE69702299 D1 DE 69702299D1
Authority
DE
Germany
Prior art keywords
producing
optical sheath
wave ladder
ladder pair
pair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69702299T
Other languages
English (en)
Other versions
DE69702299T2 (de
Inventor
Francis Grant
Stephen Day
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nortel Networks Ltd
Original Assignee
Nortel Networks Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nortel Networks Corp filed Critical Nortel Networks Corp
Application granted granted Critical
Publication of DE69702299D1 publication Critical patent/DE69702299D1/de
Publication of DE69702299T2 publication Critical patent/DE69702299T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/125—Bends, branchings or intersections
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12147—Coupler
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12169—Annealing

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
DE69702299T 1996-01-09 1997-01-08 Verfahren zur herstellung einer wellenleiterpaar mit optischem mantel Expired - Fee Related DE69702299T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB9600345A GB2309096A (en) 1996-01-09 1996-01-09 Optical waveguide pair with cladding on buffered substrate
PCT/GB1997/000040 WO1997025636A1 (en) 1996-01-09 1997-01-08 Waveguide pair with cladding

Publications (2)

Publication Number Publication Date
DE69702299D1 true DE69702299D1 (de) 2000-07-20
DE69702299T2 DE69702299T2 (de) 2000-12-21

Family

ID=10786753

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69702299T Expired - Fee Related DE69702299T2 (de) 1996-01-09 1997-01-08 Verfahren zur herstellung einer wellenleiterpaar mit optischem mantel

Country Status (7)

Country Link
US (1) US6044192A (de)
EP (1) EP0873531B1 (de)
JP (1) JP2000503135A (de)
CA (1) CA2239118A1 (de)
DE (1) DE69702299T2 (de)
GB (1) GB2309096A (de)
WO (1) WO1997025636A1 (de)

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* Cited by examiner, † Cited by third party
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US5930439A (en) * 1997-10-01 1999-07-27 Northern Telecom Limited Planar optical waveguide
US6775453B1 (en) * 1998-12-21 2004-08-10 Lsi Logic Corporation On-chip graded index of refraction optical waveguide and damascene method of fabricating the same
US6803222B2 (en) * 2000-11-22 2004-10-12 Kao Corporation Alkaline proteases
US6887514B2 (en) 2001-05-31 2005-05-03 Dalsa Semiconductor Inc. Method of depositing optical films
US6553170B2 (en) * 2001-08-31 2003-04-22 Lightwave Microsystems Corporation Method and system for a combination of high boron and low boron BPSG top clad fabrication process for a planar lightwave circuit
US6732550B2 (en) * 2001-09-06 2004-05-11 Lightwave Microsystems, Inc. Method for performing a deep trench etch for a planar lightwave circuit
US20030070451A1 (en) * 2001-10-11 2003-04-17 Luc Ouellet Method of reducing stress-induced mechanical problems in optical components
JP3770158B2 (ja) * 2001-12-26 2006-04-26 ソニー株式会社 Ｍｅｍｓ素子の製造方法
AU2003233788A1 (en) * 2002-06-04 2003-12-19 Nkt Integration A/S Integrated splitter with reduced losses
US6768828B2 (en) 2002-11-04 2004-07-27 Little Optics Inc. Integrated optical circuit with dense planarized cladding layer
US7062141B2 (en) * 2002-12-12 2006-06-13 Applied Materials, Inc. Deposition of thick BPSG layers as upper and lower cladding for optoelectronics applications
EP1656573A1 (de) * 2003-08-19 2006-05-17 Ignis Technologies AS Spot-grössenumsetzer in integrierter optik und herstellungsverfahren
JP3911271B2 (ja) * 2004-01-27 2007-05-09 Ｔｄｋ株式会社 光導波路及びその製造方法
JP2005249895A (ja) * 2004-03-02 2005-09-15 Tdk Corp 石英光導波路及びその製造方法
JP2006119379A (ja) * 2004-10-21 2006-05-11 Sumitomo Electric Ind Ltd 光導波路デバイスの製造方法、および光導波路デバイス
US7712333B2 (en) * 2006-03-29 2010-05-11 Asahi Glass Company, Limited Method for smoothing a surface of a glass substrate for a reflective mask blank used in EUV lithography
US8045834B2 (en) * 2008-05-19 2011-10-25 California Institute Of Technology Silica-on-silicon waveguides and related fabrication methods
US8917444B2 (en) 2011-06-17 2014-12-23 California Institute Of Technology Chip-based frequency comb generator with microwave repetition rate
US9293887B2 (en) 2011-06-17 2016-03-22 California Institute Of Technology Chip-based laser resonator device for highly coherent laser generation
US9087542B1 (en) 2012-12-10 2015-07-21 Western Digital (Fremont), Llc Method for providing a structure having reduced voids in a magnetic recording transducer
CN107124910B (zh) 2014-01-24 2019-08-23 加州理工学院 稳定的微波频率源
US9595918B2 (en) 2014-03-06 2017-03-14 California Institute Of Technology Stable microwave-frequency source based on cascaded brillouin lasers
US9905999B2 (en) 2015-02-26 2018-02-27 California Institute Of Technology Optical frequency divider based on an electro-optical-modulator frequency comb
US10469589B2 (en) 2017-11-14 2019-11-05 Ford Global Technologies, Llc Vehicle cabin mobile device sensor system
US10476967B2 (en) 2017-11-14 2019-11-12 Ford Global Technologies, Llc Vehicle cabin mobile device detection system

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3536780A1 (de) * 1985-10-16 1987-04-16 Schott Glaswerke Verfahren zur herstellung eines planaren lichtwellenleiters
JPH01152420A (ja) * 1987-12-09 1989-06-14 Hitachi Ltd 導波路型光合分波器
JP2585332B2 (ja) * 1987-12-25 1997-02-26 株式会社日立製作所 導波路型光デバイス
FR2626082B1 (fr) * 1988-01-14 1991-10-18 Commissariat Energie Atomique Dispositif d'optique integree permettant de separer les composantes polarisees d'un champ electromagnetique guide et procede de realisation du dispositif
JP3070018B2 (ja) * 1991-12-06 2000-07-24 日本電信電話株式会社 石英系光導波路及びその製造方法
CA2084461A1 (en) * 1991-12-06 1993-06-07 Hiroo Kanamori Method for fabricating an optical waveguide
GB9202463D0 (en) * 1992-02-05 1992-03-18 British Telecomm Silica waveguide structure
JPH0659147A (ja) * 1992-08-11 1994-03-04 Hitachi Cable Ltd 光導波路及びその製造方法
JP2637891B2 (ja) * 1993-03-26 1997-08-06 日本電気株式会社 光導波路の製造方法
JPH07140336A (ja) * 1993-09-22 1995-06-02 Shin Etsu Chem Co Ltd 光導波路
US5467415A (en) * 1994-04-22 1995-11-14 At&T Corp. Method for making polarization independent silica optical circuits
JPH0854528A (ja) * 1994-08-10 1996-02-27 Furukawa Electric Co Ltd:The 光導波路の製造方法
US5483613A (en) * 1994-08-16 1996-01-09 At&T Corp. Optical device with substrate and waveguide structure having thermal matching interfaces
WO1996009563A1 (en) * 1994-09-23 1996-03-28 British Telecommunications Public Limited Company Planar waveguides
US5749132A (en) * 1995-08-30 1998-05-12 Ramar Corporation Method of fabrication an optical waveguide
JP3001406B2 (ja) * 1995-11-09 2000-01-24 日本電気株式会社 光導波路の製造方法
JP2765545B2 (ja) * 1995-12-26 1998-06-18 日本電気株式会社 光波長弁別回路およびその製造方法
GB2312525A (en) * 1996-04-24 1997-10-29 Northern Telecom Ltd Providing cladding on planar optical waveguide by heating to flow

Also Published As

Publication number Publication date
DE69702299T2 (de) 2000-12-21
GB9600345D0 (en) 1996-03-13
GB2309096A (en) 1997-07-16
WO1997025636A1 (en) 1997-07-17
EP0873531A1 (de) 1998-10-28
CA2239118A1 (en) 1997-07-17
EP0873531B1 (de) 2000-06-14
JP2000503135A (ja) 2000-03-14
US6044192A (en) 2000-03-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: NORTEL NETWORKS LTD., ST.LAURENT, QUEBEC, CA

8339 Ceased/non-payment of the annual fee