DE69635189D1 - Elektronenstrahlgerät mit einem einkristallfenster und angepasster anode - Google Patents

Elektronenstrahlgerät mit einem einkristallfenster und angepasster anode

Info

Publication number
DE69635189D1
DE69635189D1 DE69635189T DE69635189T DE69635189D1 DE 69635189 D1 DE69635189 D1 DE 69635189D1 DE 69635189 T DE69635189 T DE 69635189T DE 69635189 T DE69635189 T DE 69635189T DE 69635189 D1 DE69635189 D1 DE 69635189D1
Authority
DE
Germany
Prior art keywords
electron beam
beam unit
circular window
adjusted anode
anode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69635189T
Other languages
English (en)
Other versions
DE69635189T2 (de
Inventor
George Wakalopulos
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Publication of DE69635189D1 publication Critical patent/DE69635189D1/de
Application granted granted Critical
Publication of DE69635189T2 publication Critical patent/DE69635189T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C71/00—After-treatment of articles without altering their shape; Apparatus therefor
    • B29C71/04—After-treatment of articles without altering their shape; Apparatus therefor by wave energy or particle radiation, e.g. for curing or vulcanising preformed articles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J33/00—Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J33/00—Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
    • H01J33/02—Details
    • H01J33/04—Windows
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/02—Vessels; Containers; Shields associated therewith; Vacuum locks
    • H01J5/18—Windows permeable to X-rays, gamma-rays, or particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
    • B29C35/0866—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using particle radiation
    • B29C2035/0877—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using particle radiation using electron radiation, e.g. beta-rays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2007/00—Flat articles, e.g. films or sheets
    • B29L2007/008—Wide strips, e.g. films, webs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00—Other particular articles
    • B29L2031/34—Electrical apparatus, e.g. sparking plugs or parts thereof
    • B29L2031/3462—Cables
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/16—Vessels
    • H01J2237/164—Particle-permeable windows

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Lasers (AREA)
DE69635189T 1995-01-05 1996-01-03 Elektronenstrahlgerät mit einem einkristallfenster und angepasster anode Expired - Lifetime DE69635189T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/369,127 US5612588A (en) 1993-05-26 1995-01-05 Electron beam device with single crystal window and expansion-matched anode
US369127 1995-01-05
PCT/US1996/000272 WO1996021238A1 (en) 1995-01-05 1996-01-03 Electron beam device with single crystal window and matching anode

Publications (2)

Publication Number Publication Date
DE69635189D1 true DE69635189D1 (de) 2005-10-20
DE69635189T2 DE69635189T2 (de) 2006-07-06

Family

ID=23454190

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69635189T Expired - Lifetime DE69635189T2 (de) 1995-01-05 1996-01-03 Elektronenstrahlgerät mit einem einkristallfenster und angepasster anode

Country Status (9)

Country Link
US (1) US5612588A (de)
EP (1) EP0871972B1 (de)
JP (1) JP3899524B2 (de)
KR (1) KR100385583B1 (de)
AU (1) AU685350B2 (de)
CA (1) CA2209593A1 (de)
DE (1) DE69635189T2 (de)
TW (1) TW282551B (de)
WO (1) WO1996021238A1 (de)

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Also Published As

Publication number Publication date
KR19980701219A (ko) 1998-05-15
EP0871972A4 (de) 2000-03-01
AU4749596A (en) 1996-07-24
US5612588A (en) 1997-03-18
EP0871972A1 (de) 1998-10-21
DE69635189T2 (de) 2006-07-06
TW282551B (de) 1996-08-01
KR100385583B1 (ko) 2003-08-19
EP0871972B1 (de) 2005-09-14
JP3899524B2 (ja) 2007-03-28
JPH10512092A (ja) 1998-11-17
AU685350B2 (en) 1998-01-15
CA2209593A1 (en) 1996-07-11
WO1996021238A1 (en) 1996-07-11

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