DE69634010D1 - Ein verfahren zum herstellen von mikrogefertigden strukturen - Google Patents
Ein verfahren zum herstellen von mikrogefertigden strukturenInfo
- Publication number
- DE69634010D1 DE69634010D1 DE1996634010 DE69634010T DE69634010D1 DE 69634010 D1 DE69634010 D1 DE 69634010D1 DE 1996634010 DE1996634010 DE 1996634010 DE 69634010 T DE69634010 T DE 69634010T DE 69634010 D1 DE69634010 D1 DE 69634010D1
- Authority
- DE
- Germany
- Prior art keywords
- micropowering
- structures
- manufacturing
- micropowering structures
- manufacturing micropowering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00912—Treatments or methods for avoiding stiction of flexible or moving parts of MEMS
- B81C1/0092—For avoiding stiction during the manufacturing process of the device, e.g. during wet etching
- B81C1/00952—Treatments or methods for avoiding stiction during the manufacturing process not provided for in groups B81C1/00928 - B81C1/00944
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12389—All metal or with adjacent metals having variation in thickness
- Y10T428/12396—Discontinuous surface component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12472—Microscopic interfacial wave or roughness
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12486—Laterally noncoextensive components [e.g., embedded, etc.]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12528—Semiconductor component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
- Y10T428/12542—More than one such component
- Y10T428/12549—Adjacent to each other
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
- Y10T428/12556—Organic component
- Y10T428/12569—Synthetic resin
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12674—Ge- or Si-base component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12771—Transition metal-base component
- Y10T428/12806—Refractory [Group IVB, VB, or VIB] metal-base component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12771—Transition metal-base component
- Y10T428/12861—Group VIII or IB metal-base component
- Y10T428/12875—Platinum group metal-base component
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Micromachines (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE9500849A SE9500849D0 (sv) | 1995-03-10 | 1995-03-10 | Methods for the manufacturing of micromachined structures and micromachined structures manufactured using such methods |
SE9500849 | 1995-03-10 | ||
PCT/SE1996/000308 WO1996028841A1 (en) | 1995-03-10 | 1996-03-08 | A method for the manufacturing of micromachined structures and a micromachined structure manufactured using such method |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69634010D1 true DE69634010D1 (de) | 2005-01-13 |
DE69634010T2 DE69634010T2 (de) | 2005-12-15 |
Family
ID=20397494
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69634010T Expired - Lifetime DE69634010T2 (de) | 1995-03-10 | 1996-03-08 | Ein verfahren zum herstellen von mikrogefertigten strukturen |
Country Status (7)
Country | Link |
---|---|
US (1) | US6103399A (de) |
EP (1) | EP0870319B1 (de) |
JP (1) | JP4056559B2 (de) |
AU (1) | AU5017996A (de) |
DE (1) | DE69634010T2 (de) |
SE (1) | SE9500849D0 (de) |
WO (1) | WO1996028841A1 (de) |
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6245444B1 (en) * | 1997-10-02 | 2001-06-12 | New Jersey Institute Of Technology | Micromachined element and method of fabrication thereof |
US6206914B1 (en) | 1998-04-30 | 2001-03-27 | Medtronic, Inc. | Implantable system with drug-eluting cells for on-demand local drug delivery |
US6101371A (en) * | 1998-09-12 | 2000-08-08 | Lucent Technologies, Inc. | Article comprising an inductor |
SE519023C2 (sv) | 1999-06-21 | 2002-12-23 | Micromuscle Ab | Kateterburna mikrokirurgiska verktygsset |
US6677225B1 (en) * | 2000-07-14 | 2004-01-13 | Zyvex Corporation | System and method for constraining totally released microcomponents |
AU2002227181A1 (en) * | 2000-11-16 | 2002-05-27 | Burstein Technologies, Inc. | Optical biodiscs with reflective layers |
US6812217B2 (en) | 2000-12-04 | 2004-11-02 | Medtronic, Inc. | Medical device and methods of use |
US6534249B2 (en) * | 2001-02-09 | 2003-03-18 | Xerox Corporation | Method of making low cost integrated out-of-plane micro-device structures |
US6838228B2 (en) * | 2001-05-14 | 2005-01-04 | Fairchild Semiconductor Corporation | System to enable photolithography on severe structure topologies |
DE10133014B4 (de) * | 2001-07-06 | 2005-01-20 | Forschungszentrum Karlsruhe Gmbh | Verfahren zur Erzeugung von dreidimensionalen, mikrostrukturierten Komponenten |
US7033514B2 (en) * | 2001-08-27 | 2006-04-25 | Micron Technology, Inc. | Method and apparatus for micromachining using a magnetic field and plasma etching |
US6750076B2 (en) * | 2001-09-17 | 2004-06-15 | Advion Biosciences, Inc. | Fabrication of a microchip-based electrospray device |
US6777319B2 (en) * | 2001-12-19 | 2004-08-17 | Formfactor, Inc. | Microelectronic spring contact repair |
SE0104452D0 (sv) * | 2001-12-28 | 2001-12-28 | Forskarpatent I Vaest Ab | Metod för framställning av nanostrukturer in-situ, och in-situ framställda nanostrukturer |
US6762116B1 (en) * | 2002-06-12 | 2004-07-13 | Zyvex Corporation | System and method for fabricating microcomponent parts on a substrate having pre-fabricated electronic circuitry thereon |
US7047638B2 (en) * | 2002-07-24 | 2006-05-23 | Formfactor, Inc | Method of making microelectronic spring contact array |
US7270940B2 (en) * | 2002-12-18 | 2007-09-18 | International Business Machines Corporation | Method of structuring of a substrate |
SE526192C2 (sv) * | 2003-04-17 | 2005-07-26 | Micromuscle Ab | Metod för att framställa en anordning |
US7096568B1 (en) | 2003-07-10 | 2006-08-29 | Zyvex Corporation | Method of manufacturing a microcomponent assembly |
US7025619B2 (en) * | 2004-02-13 | 2006-04-11 | Zyvex Corporation | Sockets for microassembly |
US6923669B1 (en) * | 2004-02-13 | 2005-08-02 | Zyvex Corporation | Microconnectors and non-powered microassembly therewith |
US7081630B2 (en) * | 2004-03-12 | 2006-07-25 | Zyvex Corporation | Compact microcolumn for automated assembly |
US6956219B2 (en) * | 2004-03-12 | 2005-10-18 | Zyvex Corporation | MEMS based charged particle deflector design |
US8152992B2 (en) * | 2004-08-31 | 2012-04-10 | University Of Maryland | Cell-based sensing: biological transduction of chemical stimuli to electrical signals (nose-on-a-chip) |
US7456092B2 (en) * | 2004-10-07 | 2008-11-25 | Palo Alto Research Center Incorporated | Self-releasing spring structures and methods |
US7314382B2 (en) | 2005-05-18 | 2008-01-01 | Zyvex Labs, Llc | Apparatus and methods of manufacturing and assembling microscale and nanoscale components and assemblies |
DE102006005517B3 (de) * | 2006-02-07 | 2007-03-15 | Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. | Ventil |
US9242073B2 (en) | 2006-08-18 | 2016-01-26 | Boston Scientific Scimed, Inc. | Electrically actuated annelid |
US7605377B2 (en) * | 2006-10-17 | 2009-10-20 | Zyvex Corporation | On-chip reflectron and ion optics |
US7761966B2 (en) * | 2007-07-16 | 2010-07-27 | Touchdown Technologies, Inc. | Method for repairing a microelectromechanical system |
DE102018203065A1 (de) * | 2018-03-01 | 2019-09-05 | Robert Bosch Gmbh | Verfahren zur Herstellung eines Injektors |
CN110643038A (zh) * | 2019-09-30 | 2020-01-03 | 天津大学 | 一种基于聚吡咯-宣纸致动器的制备方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5015906A (en) * | 1989-11-03 | 1991-05-14 | Princeton University | Electrostatic levitation control system for micromechanical devices |
JP2923813B2 (ja) * | 1991-06-11 | 1999-07-26 | キヤノン株式会社 | カンチレバー型変位素子、及びこれを用いた走査型トンネル顕微鏡、情報処理装置 |
DE4223215C2 (de) * | 1992-07-15 | 1996-07-11 | Bosch Gmbh Robert | Verfahren zur Bearbeitung von Siliziumwafern |
DE4317274A1 (de) * | 1993-05-25 | 1994-12-01 | Bosch Gmbh Robert | Verfahren zur Herstellung oberflächen-mikromechanischer Strukturen |
US5475318A (en) * | 1993-10-29 | 1995-12-12 | Robert B. Marcus | Microprobe |
US5447600A (en) * | 1994-03-21 | 1995-09-05 | Texas Instruments | Polymeric coatings for micromechanical devices |
US5472539A (en) * | 1994-06-06 | 1995-12-05 | General Electric Company | Methods for forming and positioning moldable permanent magnets on electromagnetically actuated microfabricated components |
DE4423396C2 (de) * | 1994-07-04 | 2001-10-25 | Fraunhofer Ges Forschung | Verfahren zum Herstellen einer mikromechanischen Oberflächenstruktur |
US5658636A (en) * | 1995-01-27 | 1997-08-19 | Carnegie Mellon University | Method to prevent adhesion of micromechanical structures |
US5665648A (en) * | 1995-12-21 | 1997-09-09 | Hughes Electronics | Integrated circuit spring contact fabrication methods |
US5796152A (en) * | 1997-01-24 | 1998-08-18 | Roxburgh Ltd. | Cantilevered microstructure |
-
1995
- 1995-03-10 SE SE9500849A patent/SE9500849D0/xx unknown
-
1996
- 1996-03-08 AU AU50179/96A patent/AU5017996A/en not_active Abandoned
- 1996-03-08 JP JP52751496A patent/JP4056559B2/ja not_active Expired - Fee Related
- 1996-03-08 EP EP96906987A patent/EP0870319B1/de not_active Expired - Lifetime
- 1996-03-08 US US08/913,232 patent/US6103399A/en not_active Expired - Fee Related
- 1996-03-08 DE DE69634010T patent/DE69634010T2/de not_active Expired - Lifetime
- 1996-03-08 WO PCT/SE1996/000308 patent/WO1996028841A1/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
EP0870319A1 (de) | 1998-10-14 |
DE69634010T2 (de) | 2005-12-15 |
JP4056559B2 (ja) | 2008-03-05 |
JPH11502061A (ja) | 1999-02-16 |
US6103399A (en) | 2000-08-15 |
WO1996028841A1 (en) | 1996-09-19 |
AU5017996A (en) | 1996-10-02 |
SE9500849D0 (sv) | 1995-03-10 |
EP0870319B1 (de) | 2004-12-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69634010D1 (de) | Ein verfahren zum herstellen von mikrogefertigden strukturen | |
DE69622505D1 (de) | Verfahren zum herstellen von luftreifen | |
DE69519071D1 (de) | Verfahren zum herstellen von expandiertem polytetrafluorethylen | |
DE69613946D1 (de) | Verfahren zum Herstellen einer Wegwerfwischeinrichtung | |
DE69627642D1 (de) | Verfahren zum herstellen von pflasterungen | |
DE59814223D1 (de) | Verfahren zum Herstellen von einkristallinen Strukturen | |
DE59810047D1 (de) | Verfahren zum Herstellen eines Pleuels | |
DE69618304D1 (de) | Verfahren zum herstellen von mehrschichtigen geformten gegenständen | |
DE4480109T1 (de) | Verfahren zum Herstellen einer Hartwalze | |
DE69810359D1 (de) | Verfahren zum Herstellen von rohrförmigen Behältern | |
DE59408739D1 (de) | Verfahren zum Herstellen von lackierten Teilen | |
DE59814474D1 (de) | Verfahren zum Herstellen einer Mehrzahl von Halbleiterlasern | |
DE69513236D1 (de) | Verfahren zum Herstellen einer Schraubenfeder | |
DE69713532D1 (de) | Verfahren zum Herstellen einer Schichtstoffplatte | |
DE59805905D1 (de) | Verfahren zum herstellen einer zahnstange | |
DE69419991D1 (de) | Verfahren zum Fassen von Schmuck | |
DE59813943D1 (de) | Verfahren zum Herstellen von elektronischen Elementen | |
DE69518500D1 (de) | Verfahren zum Herstellen von Methylmethacrylat | |
DE59601949D1 (de) | Verfahren zum herstellen von wellpappe | |
DE69615051D1 (de) | Verfahren zum herstellen von einer fender schützenden struktur | |
DE59302516D1 (de) | Verfahren zum Herstellen einer Wellenabdichtung | |
DE69623099D1 (de) | Verfahren zum herstellen von styrolharz | |
DE59804142D1 (de) | Verfahren zum herstellen einer schaltklappe | |
DE59604726D1 (de) | Verfahren zum Bewegen von Bauwerken | |
ATA66195A (de) | Verfahren zum herstellen von gehäusen |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: CREGANNA SOLUTIONS, GALWAY, IE |