DE69630509D1 - Magnetschwebe-Dämpfungsgerät - Google Patents

Magnetschwebe-Dämpfungsgerät

Info

Publication number
DE69630509D1
DE69630509D1 DE69630509T DE69630509T DE69630509D1 DE 69630509 D1 DE69630509 D1 DE 69630509D1 DE 69630509 T DE69630509 T DE 69630509T DE 69630509 T DE69630509 T DE 69630509T DE 69630509 D1 DE69630509 D1 DE 69630509D1
Authority
DE
Germany
Prior art keywords
damping device
magnetic levitation
levitation damping
magnetic
levitation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69630509T
Other languages
English (en)
Other versions
DE69630509T2 (de
Inventor
Katsuhide Watanabe
Yoichi Kanemitsu
Takahide Haga
Kenichi Yano
Takayuki Mizuno
Ryuta Katamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of DE69630509D1 publication Critical patent/DE69630509D1/de
Application granted granted Critical
Publication of DE69630509T2 publication Critical patent/DE69630509T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/03—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using magnetic or electromagnetic means

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Electromagnetism (AREA)
  • Vibration Prevention Devices (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
DE69630509T 1995-08-11 1996-08-08 Magnetschwebe-Dämpfungsgerät Expired - Fee Related DE69630509T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP22707895 1995-08-11
JP22707895 1995-08-11

Publications (2)

Publication Number Publication Date
DE69630509D1 true DE69630509D1 (de) 2003-12-04
DE69630509T2 DE69630509T2 (de) 2004-08-12

Family

ID=16855175

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69630509T Expired - Fee Related DE69630509T2 (de) 1995-08-11 1996-08-08 Magnetschwebe-Dämpfungsgerät

Country Status (3)

Country Link
US (1) US5793598A (de)
EP (1) EP0789160B1 (de)
DE (1) DE69630509T2 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6704001B1 (en) * 1995-11-17 2004-03-09 Immersion Corporation Force feedback device including actuator with moving magnet
NL1007127C2 (nl) * 1997-09-26 1999-03-29 Univ Delft Tech Draagsysteem.
US6213442B1 (en) 1998-10-08 2001-04-10 Lord Corporation Isolation system for isolation tables and the like
GB2353873A (en) 1999-09-03 2001-03-07 Marconi Electronic Syst Ltd Improvements in or relating to the control of electro-magnets
JP2002031187A (ja) * 2000-07-13 2002-01-31 Ebara Corp 磁気浮上装置を用いた除振装置
US7084854B1 (en) 2000-09-28 2006-08-01 Immersion Corporation Actuator for providing tactile sensations and device for directional tactile sensations
US6501203B2 (en) * 2001-06-01 2002-12-31 Canadian Space Agency Vibration control apparatus
US7623114B2 (en) 2001-10-09 2009-11-24 Immersion Corporation Haptic feedback sensations based on audio output from computer devices
WO2003054909A1 (en) * 2001-12-20 2003-07-03 Fei Company Scanning electron microscope assembly and method for using same
JP4432530B2 (ja) * 2004-02-23 2010-03-17 パナソニック株式会社 デジタル信号処理アンプ
US8803796B2 (en) * 2004-08-26 2014-08-12 Immersion Corporation Products and processes for providing haptic feedback in a user interface
JP4860625B2 (ja) 2004-10-08 2012-01-25 イマージョン コーポレーション タッチ式入力装置におけるボタンおよびスクロール動作シミュレーション用の触覚フィードバック
US7352198B2 (en) * 2006-01-18 2008-04-01 Electroglas, Inc. Methods and apparatuses for improved stabilization in a probing system
US7825903B2 (en) 2005-05-12 2010-11-02 Immersion Corporation Method and apparatus for providing haptic effects to a touch panel
EP1744215B1 (de) * 2005-07-16 2012-09-12 Integrated Dynamics Engineering GmbH Tragevorrichtung für vibrationsempfindliche Komponente
US8519728B2 (en) * 2008-12-12 2013-08-27 Formfactor, Inc. Compliance control methods and apparatuses
DE102009009562A1 (de) 2009-02-19 2010-09-09 Integrated Dynamics Engineering Gmbh Kombinierter Bewegungssensor zum Einsatz in Feedback-Regelsystemen zur Schwingungsisolation
EP2241502B1 (de) * 2009-04-13 2017-03-08 Sikorsky Aircraft Corporation Aktive Schwingungsunterdrückung durch Leistungsminimierung
US8542105B2 (en) 2009-11-24 2013-09-24 Immersion Corporation Handheld computer interface with haptic feedback
US9478237B2 (en) 2013-09-18 2016-10-25 Seagate Technology Llc Work piece contact pad with centering feature
JP6231457B2 (ja) 2014-10-23 2017-11-15 ファナック株式会社 除振装置及びロボットを搭載した位置決め装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4336917A (en) * 1979-10-11 1982-06-29 Optimetrix Corporation Shock and vibration isolation system
US4935838A (en) * 1988-08-25 1990-06-19 Westinghouse Electric Corp. Structural magnetic vibration controller and method for actively controlling vibrations on stationary components of rotary machinery
JP2539906B2 (ja) * 1989-01-31 1996-10-02 鹿島建設株式会社 磁気式防振装置
JPH0765635B2 (ja) * 1989-04-04 1995-07-19 株式会社荏原総合研究所 除振台用制振装置
US5011108A (en) * 1989-08-10 1991-04-30 Mechanical Technology Incorporated Active mounts
US5285995A (en) * 1992-05-14 1994-02-15 Aura Systems, Inc. Optical table active leveling and vibration cancellation system
JPH06294445A (ja) * 1993-04-07 1994-10-21 Ebara Corp 除振装置
JP2954815B2 (ja) * 1993-06-24 1999-09-27 キヤノン株式会社 鉛直方向除振装置

Also Published As

Publication number Publication date
EP0789160B1 (de) 2003-10-29
EP0789160A2 (de) 1997-08-13
DE69630509T2 (de) 2004-08-12
US5793598A (en) 1998-08-11
EP0789160A3 (de) 1998-07-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee