DE69621388D1 - Trockengasvorhang für kryogenische Oberfläche - Google Patents

Trockengasvorhang für kryogenische Oberfläche

Info

Publication number
DE69621388D1
DE69621388D1 DE69621388T DE69621388T DE69621388D1 DE 69621388 D1 DE69621388 D1 DE 69621388D1 DE 69621388 T DE69621388 T DE 69621388T DE 69621388 T DE69621388 T DE 69621388T DE 69621388 D1 DE69621388 D1 DE 69621388D1
Authority
DE
Germany
Prior art keywords
dry gas
gas curtain
cryogenic surface
cryogenic
curtain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69621388T
Other languages
English (en)
Other versions
DE69621388T2 (de
Inventor
Herman Vogel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applera Corp
Original Assignee
Perkin Elmer Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Perkin Elmer Corp filed Critical Perkin Elmer Corp
Publication of DE69621388D1 publication Critical patent/DE69621388D1/de
Application granted granted Critical
Publication of DE69621388T2 publication Critical patent/DE69621388T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K17/00—Measuring quantity of heat
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F9/00—Use of air currents for screening, e.g. air curtains

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Separation By Low-Temperature Treatments (AREA)
DE69621388T 1995-09-07 1996-07-04 Trockengasvorhang für kryogenische Oberfläche Expired - Fee Related DE69621388T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/524,555 US5590537A (en) 1995-09-07 1995-09-07 Dry gas curtain for cryogenic surface

Publications (2)

Publication Number Publication Date
DE69621388D1 true DE69621388D1 (de) 2002-07-04
DE69621388T2 DE69621388T2 (de) 2002-09-19

Family

ID=24089717

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69621388T Expired - Fee Related DE69621388T2 (de) 1995-09-07 1996-07-04 Trockengasvorhang für kryogenische Oberfläche

Country Status (4)

Country Link
US (1) US5590537A (de)
EP (1) EP0762094B1 (de)
JP (1) JPH09119692A (de)
DE (1) DE69621388T2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6393847B1 (en) * 2001-01-12 2002-05-28 Chart Inc. Liquid cryogen freezer
US7282183B2 (en) * 2001-12-24 2007-10-16 Agilent Technologies, Inc. Atmospheric control in reaction chambers
US6890080B2 (en) * 2002-01-25 2005-05-10 Ircon, Inc. Air purge system for optical sensor
DE10305258A1 (de) * 2002-02-08 2003-08-21 Creo Inc Verfahren und Vorrichtung zum Schutz von optischen Elementen
US6867844B2 (en) 2003-06-19 2005-03-15 Asml Holding N.V. Immersion photolithography system and method using microchannel nozzles
US20090073397A1 (en) * 2005-06-30 2009-03-19 Asml Holding N.V. Laminar Flow Gas Curtains for Lithographic Applications
US7375791B2 (en) * 2005-06-30 2008-05-20 Asml Holding N.V. Laminar flow gas curtains for lithographic applications
CA2696611A1 (en) * 2007-08-28 2009-03-12 Air Products And Chemicals, Inc. Apparatus and method for providing condensation-and frost-free surfaces on cryogenic components
PL2307824T3 (pl) * 2008-06-23 2016-12-30 Urządzenie oraz sposób efektywnego skraplania
US11788783B2 (en) 2017-11-07 2023-10-17 MVE Biological Solutions US, LLC Cryogenic freezer

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2135388B1 (de) * 1971-05-03 1973-05-11 Air Liquide
US4023398A (en) * 1975-03-03 1977-05-17 John Barry French Apparatus for analyzing trace components
JPS62138638A (ja) * 1985-12-11 1987-06-22 Yukimasa Yamazaki エア−カ−テン設備
JPS6413718A (en) * 1987-07-08 1989-01-18 Sumitomo Electric Industries Method for storing semiconductor substrate
FR2621887B1 (fr) * 1987-10-20 1990-03-30 Sgn Soc Gen Tech Nouvelle Confinement dynamique et accostage sans contact
NL8802430A (nl) * 1988-10-04 1990-05-01 Biddle F H Bv Luchtgordijn-inrichting.
US5261243A (en) * 1992-09-28 1993-11-16 Lockheed Corporation Supplemental cooling system for avionic equipment

Also Published As

Publication number Publication date
EP0762094A1 (de) 1997-03-12
EP0762094B1 (de) 2002-05-29
US5590537A (en) 1997-01-07
DE69621388T2 (de) 2002-09-19
JPH09119692A (ja) 1997-05-06

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee