DE69619525T2 - Niederinduktive, grossflächige spule für eine induktiv gekoppelte plasmaquelle - Google Patents

Niederinduktive, grossflächige spule für eine induktiv gekoppelte plasmaquelle

Info

Publication number
DE69619525T2
DE69619525T2 DE69619525T DE69619525T DE69619525T2 DE 69619525 T2 DE69619525 T2 DE 69619525T2 DE 69619525 T DE69619525 T DE 69619525T DE 69619525 T DE69619525 T DE 69619525T DE 69619525 T2 DE69619525 T2 DE 69619525T2
Authority
DE
Germany
Prior art keywords
lilac
large area
low
impedance matching
area coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69619525T
Other languages
English (en)
Other versions
DE69619525D1 (de
Inventor
Charles Gates
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lam Research Corp
Original Assignee
Lam Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Research Corp filed Critical Lam Research Corp
Publication of DE69619525D1 publication Critical patent/DE69619525D1/de
Application granted granted Critical
Publication of DE69619525T2 publication Critical patent/DE69619525T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Drying Of Semiconductors (AREA)
  • Chemical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
DE69619525T 1995-06-30 1996-06-20 Niederinduktive, grossflächige spule für eine induktiv gekoppelte plasmaquelle Expired - Lifetime DE69619525T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/491,342 US5874704A (en) 1995-06-30 1995-06-30 Low inductance large area coil for an inductively coupled plasma source
PCT/US1996/010804 WO1997002588A1 (en) 1995-06-30 1996-06-20 Low inductance large area coil for an inductively coupled plasma source

Publications (2)

Publication Number Publication Date
DE69619525D1 DE69619525D1 (de) 2002-04-04
DE69619525T2 true DE69619525T2 (de) 2002-08-08

Family

ID=23951788

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69619525T Expired - Lifetime DE69619525T2 (de) 1995-06-30 1996-06-20 Niederinduktive, grossflächige spule für eine induktiv gekoppelte plasmaquelle

Country Status (9)

Country Link
US (2) US5874704A (de)
EP (1) EP0835518B1 (de)
JP (1) JPH11509031A (de)
KR (1) KR100417327B1 (de)
CN (1) CN1106669C (de)
AT (1) ATE213869T1 (de)
AU (1) AU6289296A (de)
DE (1) DE69619525T2 (de)
WO (1) WO1997002588A1 (de)

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DE102012109461A1 (de) * 2012-10-04 2014-06-12 PAC Plasma Applications Consulting GmbH & Co. KG Selbsttragende Spuleneinheit für eine Plasmaquelle, Verfahren zur Herstellung einer solchen Spuleneinheit und entsprechende Plasmaquelle

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JP5137675B2 (ja) * 2008-04-28 2013-02-06 三菱電機株式会社 誘導加熱調理器
JP4752879B2 (ja) * 2008-07-04 2011-08-17 パナソニック電工株式会社 平面コイル
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PT2502255E (pt) 2009-11-20 2014-06-11 Oerlikon Trading Ag Trübbach Sistema de secções de bobina para simulação de bobinas circulares para dispositivos de vácuo
KR101287834B1 (ko) * 2009-12-21 2013-07-19 한국전자통신연구원 자기공명을 이용한 에너지 공급 장치, 조리 장치 및 방법
SI23611A (sl) 2011-01-20 2012-07-31 Institut@@quot@JoĹľef@Stefan@quot Metoda in naprava za vzbujanje visokofrekvenčne plinske plazme
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DE102012109461A1 (de) * 2012-10-04 2014-06-12 PAC Plasma Applications Consulting GmbH & Co. KG Selbsttragende Spuleneinheit für eine Plasmaquelle, Verfahren zur Herstellung einer solchen Spuleneinheit und entsprechende Plasmaquelle

Also Published As

Publication number Publication date
EP0835518A1 (de) 1998-04-15
KR100417327B1 (ko) 2004-03-31
EP0835518B1 (de) 2002-02-27
US6184488B1 (en) 2001-02-06
AU6289296A (en) 1997-02-05
DE69619525D1 (de) 2002-04-04
US5874704A (en) 1999-02-23
ATE213869T1 (de) 2002-03-15
KR19990028399A (ko) 1999-04-15
CN1106669C (zh) 2003-04-23
CN1189240A (zh) 1998-07-29
JPH11509031A (ja) 1999-08-03
WO1997002588A1 (en) 1997-01-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: ZEITLER, VOLPERT, KANDLBINDER, 80539 MUENCHEN