DE69619079D1 - Drehgeschwindigkeitssensor - Google Patents

Drehgeschwindigkeitssensor

Info

Publication number
DE69619079D1
DE69619079D1 DE69619079T DE69619079T DE69619079D1 DE 69619079 D1 DE69619079 D1 DE 69619079D1 DE 69619079 T DE69619079 T DE 69619079T DE 69619079 T DE69619079 T DE 69619079T DE 69619079 D1 DE69619079 D1 DE 69619079D1
Authority
DE
Germany
Prior art keywords
angular velocity
velocity sensor
sensor
angular
velocity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69619079T
Other languages
English (en)
Other versions
DE69619079T2 (de
Inventor
Kazufumi Moriya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of DE69619079D1 publication Critical patent/DE69619079D1/de
Application granted granted Critical
Publication of DE69619079T2 publication Critical patent/DE69619079T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
DE69619079T 1995-12-05 1996-12-05 Drehgeschwindigkeitssensor Expired - Lifetime DE69619079T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7344474A JP3028766B2 (ja) 1995-12-05 1995-12-05 角速度センサ

Publications (2)

Publication Number Publication Date
DE69619079D1 true DE69619079D1 (de) 2002-03-21
DE69619079T2 DE69619079T2 (de) 2002-07-11

Family

ID=18369551

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69619079T Expired - Lifetime DE69619079T2 (de) 1995-12-05 1996-12-05 Drehgeschwindigkeitssensor

Country Status (4)

Country Link
US (1) US5900549A (de)
EP (1) EP0778458B1 (de)
JP (1) JP3028766B2 (de)
DE (1) DE69619079T2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0911606A1 (de) 1997-10-23 1999-04-28 STMicroelectronics S.r.l. Integrierter Winkelgeschwindigkeitssensor und Verfahren zu seiner Herstellung
FR2770899B1 (fr) * 1997-11-07 1999-12-10 Commissariat Energie Atomique Microgyrometre vibrant
WO2001027559A2 (en) * 1999-10-13 2001-04-19 Analog Devices, Inc. Feedback mechanism for rate gyroscopes
JP2001227954A (ja) * 2000-02-15 2001-08-24 Toyota Motor Corp 物理量検出装置
JP3606164B2 (ja) * 2000-06-02 2005-01-05 株式会社村田製作所 静電容量型外力検出装置
JP4250387B2 (ja) * 2002-08-20 2009-04-08 長野計器株式会社 変換器およびその製造方法
US8151642B2 (en) * 2007-10-30 2012-04-10 Rohm Co., Ltd. Semiconductor device
US9726489B2 (en) * 2010-12-07 2017-08-08 Georgia Tech Research Corporation Mode-matched single proof-mass dual-axis gyroscope and method of fabrication
US11867509B2 (en) * 2021-03-03 2024-01-09 Invensense, Inc. Robust method for gyroscope drive amplitude measurement

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61114123A (ja) 1984-11-09 1986-05-31 Hitachi Ltd 振動ジヤイロ
JPS61139719A (ja) 1984-12-12 1986-06-27 Nissan Motor Co Ltd 半導体回転センサ
US5359893A (en) * 1991-12-19 1994-11-01 Motorola, Inc. Multi-axes gyroscope
JP3293194B2 (ja) 1992-10-13 2002-06-17 株式会社デンソー 力学量センサ
WO1994017363A1 (en) * 1993-01-29 1994-08-04 Murata Manufacturing Co., Ltd. Angular velocity sensor
US5447068A (en) * 1994-03-31 1995-09-05 Ford Motor Company Digital capacitive accelerometer

Also Published As

Publication number Publication date
JPH09159460A (ja) 1997-06-20
US5900549A (en) 1999-05-04
EP0778458B1 (de) 2002-02-06
EP0778458A1 (de) 1997-06-11
DE69619079T2 (de) 2002-07-11
JP3028766B2 (ja) 2000-04-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition