DE69610352D1 - Mehrstufige Verdrängungsvakuumpumpe - Google Patents

Mehrstufige Verdrängungsvakuumpumpe

Info

Publication number
DE69610352D1
DE69610352D1 DE69610352T DE69610352T DE69610352D1 DE 69610352 D1 DE69610352 D1 DE 69610352D1 DE 69610352 T DE69610352 T DE 69610352T DE 69610352 T DE69610352 T DE 69610352T DE 69610352 D1 DE69610352 D1 DE 69610352D1
Authority
DE
Germany
Prior art keywords
displacement pump
positive displacement
stage positive
stage
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69610352T
Other languages
English (en)
Other versions
DE69610352T2 (de
Inventor
Masami Nagayama
Katsuaki Usui
Hiroaki Ogamino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of DE69610352D1 publication Critical patent/DE69610352D1/de
Application granted granted Critical
Publication of DE69610352T2 publication Critical patent/DE69610352T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2/00—Rotary-piston machines or pumps
    • F04C2/08—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C2/12—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C2/14—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C2/18—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with similar tooth forms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/30—Casings or housings

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
DE69610352T 1995-04-19 1996-04-16 Mehrstufige Verdrängungsvakuumpumpe Expired - Lifetime DE69610352T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11792895 1995-04-19

Publications (2)

Publication Number Publication Date
DE69610352D1 true DE69610352D1 (de) 2000-10-26
DE69610352T2 DE69610352T2 (de) 2001-05-17

Family

ID=14723679

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69610352T Expired - Lifetime DE69610352T2 (de) 1995-04-19 1996-04-16 Mehrstufige Verdrängungsvakuumpumpe

Country Status (4)

Country Link
US (1) US5816782A (de)
EP (1) EP0738833B1 (de)
KR (1) KR100382309B1 (de)
DE (1) DE69610352T2 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69503301T2 (de) * 1994-04-21 1999-03-11 Ebara Corp Mehrachsen-Elektromotor und mit einem solchen Motor kombinierte Verdrängungspumpe
DE19923201A1 (de) * 1999-05-20 2000-11-23 Mannesmann Vdo Ag Für einen Einsatz in einem aggressiven Medium vorgesehener Einsatz
JP2003129979A (ja) * 2001-10-23 2003-05-08 Taiko Kikai Industries Co Ltd 密閉式メカニカルブースタ
JP3758550B2 (ja) * 2001-10-24 2006-03-22 アイシン精機株式会社 多段真空ポンプ
DE10223869A1 (de) * 2002-05-29 2003-12-11 Leybold Vakuum Gmbh Zwei-Wellen-Vakuumpumpe
GB0310615D0 (en) * 2003-05-08 2003-06-11 Boc Group Plc Improvements in seal assemblies
GB0319300D0 (en) * 2003-08-18 2003-09-17 Boc Group Plc Low pulsation booster pumps
JP4218756B2 (ja) * 2003-10-17 2009-02-04 株式会社荏原製作所 真空排気装置
DE102005008887A1 (de) * 2005-02-26 2006-08-31 Leybold Vacuum Gmbh Einwellige Vakuum-Verdränderpumpe
GB0620144D0 (en) * 2006-10-11 2006-11-22 Boc Group Plc Vacuum pump
US20080226480A1 (en) * 2007-03-15 2008-09-18 Ion Metrics, Inc. Multi-Stage Trochoidal Vacuum Pump
DE202010015439U1 (de) * 2010-11-16 2012-02-17 Hugo Vogelsang Maschinenbau Gmbh Drehkolbenpumpe und Gehäuse-Halbschale für selbige
TWI612759B (zh) * 2012-03-29 2018-01-21 荏原製作所股份有限公司 密封電動機、真空泵
TWI594551B (zh) 2012-03-29 2017-08-01 荏原製作所股份有限公司 密封電動機、真空泵
DE202017001029U1 (de) 2017-02-17 2018-05-18 Leybold Gmbh Mehrstufige Wälzkolbenpumpe
KR101878798B1 (ko) 2017-03-29 2018-07-16 한국에어로(주) 싱글 스크류 타입의 진공펌프장치

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1531607A (en) * 1923-01-24 1925-03-31 Thomas W Green High-pressure rotary pump
GB637942A (en) * 1941-05-31 1950-05-31 Jarves Carter Marble Improvements in rotary compressors of the gear wheel type
CH380281A (de) * 1959-02-26 1964-07-31 Svenska Rotor Maskiner Ab Schraubenradmaschine
GB1248031A (en) * 1967-09-21 1971-09-29 Edwards High Vacuum Int Ltd Two-stage rotary vacuum pumps
US3545888A (en) * 1968-09-16 1970-12-08 Edwards High Vacuum Int Ltd Multistage rotary pumps
JPS62189388A (ja) * 1987-01-30 1987-08-19 Ebara Corp 多段ル−ツ型真空ポンプ
JPH03111690A (ja) * 1989-09-22 1991-05-13 Tokuda Seisakusho Ltd 真空ポンプ
JP3112490B2 (ja) * 1991-04-08 2000-11-27 アネルバ株式会社 メカニカル真空ポンプ
JPH06185483A (ja) * 1991-12-02 1994-07-05 Shinku Kiko Kk ドライメカニカルブースタポンプ

Also Published As

Publication number Publication date
EP0738833B1 (de) 2000-09-20
EP0738833A1 (de) 1996-10-23
KR960038125A (ko) 1996-11-21
DE69610352T2 (de) 2001-05-17
KR100382309B1 (ko) 2003-07-07
US5816782A (en) 1998-10-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition