DE69610149D1 - Verfahren zur Herstellung einer Polyphenolverbindung und positiv-arbeitende, Polyphenolverbindung enthaltende, Fotoresistzusammensetzung - Google Patents

Verfahren zur Herstellung einer Polyphenolverbindung und positiv-arbeitende, Polyphenolverbindung enthaltende, Fotoresistzusammensetzung

Info

Publication number
DE69610149D1
DE69610149D1 DE69610149T DE69610149T DE69610149D1 DE 69610149 D1 DE69610149 D1 DE 69610149D1 DE 69610149 T DE69610149 T DE 69610149T DE 69610149 T DE69610149 T DE 69610149T DE 69610149 D1 DE69610149 D1 DE 69610149D1
Authority
DE
Germany
Prior art keywords
polyphenol compound
producing
composition containing
photoresist composition
positive working
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69610149T
Other languages
English (en)
Other versions
DE69610149T2 (de
Inventor
Kunihiko Kodama
Makoto Momota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Corp
Original Assignee
Fuji Photo Film Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Photo Film Co Ltd filed Critical Fuji Photo Film Co Ltd
Publication of DE69610149D1 publication Critical patent/DE69610149D1/de
Application granted granted Critical
Publication of DE69610149T2 publication Critical patent/DE69610149T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C39/00—Compounds having at least one hydroxy or O-metal group bound to a carbon atom of a six-membered aromatic ring
    • C07C39/12—Compounds having at least one hydroxy or O-metal group bound to a carbon atom of a six-membered aromatic ring polycyclic with no unsaturation outside the aromatic rings
    • C07C39/15—Compounds having at least one hydroxy or O-metal group bound to a carbon atom of a six-membered aromatic ring polycyclic with no unsaturation outside the aromatic rings with all hydroxy groups on non-condensed rings, e.g. phenylphenol
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C37/00—Preparation of compounds having hydroxy or O-metal groups bound to a carbon atom of a six-membered aromatic ring
    • C07C37/11—Preparation of compounds having hydroxy or O-metal groups bound to a carbon atom of a six-membered aromatic ring by reactions increasing the number of carbon atoms
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C2601/00—Systems containing only non-condensed rings
    • C07C2601/12—Systems containing only non-condensed rings with a six-membered ring
    • C07C2601/14—The ring being saturated

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Materials For Photolithography (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
DE69610149T 1995-06-02 1996-05-31 Verfahren zur Herstellung einer Polyphenolverbindung und positiv-arbeitende, Polyphenolverbindung enthaltende, Fotoresistzusammensetzung Expired - Fee Related DE69610149T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13653595 1995-06-02

Publications (2)

Publication Number Publication Date
DE69610149D1 true DE69610149D1 (de) 2000-10-12
DE69610149T2 DE69610149T2 (de) 2001-04-05

Family

ID=15177467

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69610149T Expired - Fee Related DE69610149T2 (de) 1995-06-02 1996-05-31 Verfahren zur Herstellung einer Polyphenolverbindung und positiv-arbeitende, Polyphenolverbindung enthaltende, Fotoresistzusammensetzung

Country Status (4)

Country Link
US (1) US5853949A (de)
EP (1) EP0745575B1 (de)
KR (1) KR100436810B1 (de)
DE (1) DE69610149T2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100973799B1 (ko) * 2003-01-03 2010-08-03 삼성전자주식회사 Ｍｍｎ 헤드 코터용 포토레지스트 조성물
US7266951B2 (en) 2004-10-26 2007-09-11 Whirlpool Corporation Ice making and dispensing system
US7284390B2 (en) 2005-05-18 2007-10-23 Whirlpool Corporation Refrigerator with intermediate temperature icemaking compartment
US7568357B2 (en) 2005-05-18 2009-08-04 Maytag Corporation Freeze tolerant waterline valve for a refrigerator
US7900465B2 (en) 2005-05-27 2011-03-08 Maytag Corporation Insulated ice compartment for bottom mount refrigerator with controlled damper
JP4762630B2 (ja) * 2005-08-03 2011-08-31 東京応化工業株式会社 レジスト組成物およびレジストパターン形成方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2839586A (en) * 1956-05-23 1958-06-17 Union Carbide Corp Mannich base synthesis of bisphenols
DE1106432B (de) * 1959-08-27 1961-05-10 Bbc Brown Boveri & Cie Kernreaktor, in dessen Core der Brennstoff in Gestalt von Formkoerpern einschuettbar ist
DE1197469B (de) * 1962-09-19 1965-07-29 Bayer Ag Verfahren zur Herstellung von mehrkernigen Polyphenolen
GB1202762A (en) * 1968-06-21 1970-08-19 Shell Int Research Esters of substituted benzyl alcohols and polyphenols prepared from said esters
GB1258550A (de) * 1970-03-09 1971-12-30
JPS6383035A (ja) * 1986-09-29 1988-04-13 Mitsui Petrochem Ind Ltd ３核体置換フエノ−ルの製造方法および３核体置換フエノ−ルのグリシジルエ−テル化物を含む組成物
US5178986A (en) * 1988-10-17 1993-01-12 Shipley Company Inc. Positive photoresist composition with naphthoquinonediazidesulfonate of oligomeric phenol
JP3466218B2 (ja) * 1992-06-04 2003-11-10 住友化学工業株式会社 ポジ型レジスト組成物
US5541033A (en) * 1995-02-01 1996-07-30 Ocg Microelectronic Materials, Inc. Selected o-quinonediazide sulfonic acid esters of phenolic compounds and their use in radiation-sensitive compositions

Also Published As

Publication number Publication date
KR100436810B1 (ko) 2004-09-04
EP0745575B1 (de) 2000-09-06
US5853949A (en) 1998-12-29
EP0745575A1 (de) 1996-12-04
KR970001293A (ko) 1997-01-24
DE69610149T2 (de) 2001-04-05

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: FUJIFILM CORP., TOKIO/TOKYO, JP

8339 Ceased/non-payment of the annual fee