DE69603599D1 - Hochleistung-verzoegerungentladungskavitaet im hochfrequenzbereich - Google Patents

Hochleistung-verzoegerungentladungskavitaet im hochfrequenzbereich

Info

Publication number
DE69603599D1
DE69603599D1 DE69603599T DE69603599T DE69603599D1 DE 69603599 D1 DE69603599 D1 DE 69603599D1 DE 69603599 T DE69603599 T DE 69603599T DE 69603599 T DE69603599 T DE 69603599T DE 69603599 D1 DE69603599 D1 DE 69603599D1
Authority
DE
Germany
Prior art keywords
frequency range
discharge cavity
high frequency
delay discharge
performance delay
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69603599T
Other languages
English (en)
Inventor
Pierre Goudmand
Odile Desseaux
Christian Dupret
Brigitte Mutel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Universite de Lille 1 Sciences et Technologies
Original Assignee
Universite de Lille 1 Sciences et Technologies
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Universite de Lille 1 Sciences et Technologies filed Critical Universite de Lille 1 Sciences et Technologies
Application granted granted Critical
Publication of DE69603599D1 publication Critical patent/DE69603599D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
DE69603599T 1995-05-29 1996-05-10 Hochleistung-verzoegerungentladungskavitaet im hochfrequenzbereich Expired - Lifetime DE69603599D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9506301A FR2734979B1 (fr) 1995-05-29 1995-05-29 Cavite de decharge forte puissance a onde lente dans le domaine des radiofrequences
PCT/FR1996/000714 WO1996039011A1 (fr) 1995-05-29 1996-05-10 Cavite de decharge forte puissance a onde lente dans le domaine des radiofrequences

Publications (1)

Publication Number Publication Date
DE69603599D1 true DE69603599D1 (de) 1999-09-09

Family

ID=9479418

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69603599T Expired - Lifetime DE69603599D1 (de) 1995-05-29 1996-05-10 Hochleistung-verzoegerungentladungskavitaet im hochfrequenzbereich

Country Status (5)

Country Link
EP (1) EP0829185B1 (de)
AU (1) AU5903596A (de)
DE (1) DE69603599D1 (de)
FR (1) FR2734979B1 (de)
WO (1) WO1996039011A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19918790A1 (de) * 1999-04-26 2000-11-02 Aurion Anlagentechnik Gmbh Hochfrequenz-Anpassung mit Helikon-Wellen
US7183514B2 (en) * 2003-01-30 2007-02-27 Axcelis Technologies, Inc. Helix coupled remote plasma source

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1091498A (en) * 1965-06-02 1967-11-15 British Titan Products Gas heating apparatus
US4918031A (en) * 1988-12-28 1990-04-17 American Telephone And Telegraph Company,At&T Bell Laboratories Processes depending on plasma generation using a helical resonator
US5304282A (en) * 1991-04-17 1994-04-19 Flamm Daniel L Processes depending on plasma discharges sustained in a helical resonator
US5288971A (en) * 1991-08-09 1994-02-22 Advanced Energy Industries, Inc. System for igniting a plasma for thin film processing
US5234529A (en) * 1991-10-10 1993-08-10 Johnson Wayne L Plasma generating apparatus employing capacitive shielding and process for using such apparatus
FR2702328B1 (fr) * 1993-03-05 1995-05-12 Univ Lille Sciences Tech Dispositif de production d'un plasma.

Also Published As

Publication number Publication date
EP0829185A1 (de) 1998-03-18
AU5903596A (en) 1996-12-18
WO1996039011A1 (fr) 1996-12-05
FR2734979A1 (fr) 1996-12-06
FR2734979B1 (fr) 1997-08-01
EP0829185B1 (de) 1999-08-04

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Legal Events

Date Code Title Description
8332 No legal effect for de