DE69530155D1 - Semiconductor arrangement with field plate and power converter with this semiconductor arrangement - Google Patents

Semiconductor arrangement with field plate and power converter with this semiconductor arrangement

Info

Publication number
DE69530155D1
DE69530155D1 DE69530155T DE69530155T DE69530155D1 DE 69530155 D1 DE69530155 D1 DE 69530155D1 DE 69530155 T DE69530155 T DE 69530155T DE 69530155 T DE69530155 T DE 69530155T DE 69530155 D1 DE69530155 D1 DE 69530155D1
Authority
DE
Germany
Prior art keywords
semiconductor arrangement
power converter
field plate
semiconductor
arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69530155T
Other languages
German (de)
Other versions
DE69530155T2 (en
Inventor
Mutsuhiro Mori
Yasumichi Yasuda
Hiromi Hosoya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of DE69530155D1 publication Critical patent/DE69530155D1/en
Publication of DE69530155T2 publication Critical patent/DE69530155T2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/402—Field plates
    • H01L29/404—Multiple field plate structures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/408—Electrodes ; Multistep manufacturing processes therefor with an insulating layer with a particular dielectric or electrostatic property, e.g. with static charges or for controlling trapped charges or moving ions, or with a plate acting on the insulator potential or the insulator charges, e.g. for controlling charges effect or potential distribution in the insulating layer, or with a semi-insulating layer contacting directly the semiconductor surface
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Inverter Devices (AREA)
  • Thyristors (AREA)
DE69530155T 1994-09-20 1995-09-12 Semiconductor arrangement with field plate and power converter with this semiconductor arrangement Expired - Lifetime DE69530155T2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP06224747A JP3111827B2 (en) 1994-09-20 1994-09-20 Semiconductor device and power conversion device using the same

Publications (2)

Publication Number Publication Date
DE69530155D1 true DE69530155D1 (en) 2003-05-08
DE69530155T2 DE69530155T2 (en) 2004-01-15

Family

ID=16818609

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69530155T Expired - Lifetime DE69530155T2 (en) 1994-09-20 1995-09-12 Semiconductor arrangement with field plate and power converter with this semiconductor arrangement

Country Status (4)

Country Link
US (3) US5691553A (en)
EP (1) EP0703627B1 (en)
JP (1) JP3111827B2 (en)
DE (1) DE69530155T2 (en)

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JP3111827B2 (en) * 1994-09-20 2000-11-27 株式会社日立製作所 Semiconductor device and power conversion device using the same
KR100248115B1 (en) * 1997-05-20 2000-03-15 김덕중 Power semiconductor device with field plate and the manufacturing method thereof
JPH11297994A (en) * 1998-04-07 1999-10-29 Hitachi Ltd Semiconductor device
GB2373634B (en) * 2000-10-31 2004-12-08 Fuji Electric Co Ltd Semiconductor device
DE10104264C2 (en) * 2001-01-31 2003-03-13 Infineon Technologies Ag Power diode with field plate edge structure
JP3551153B2 (en) * 2001-02-01 2004-08-04 日産自動車株式会社 Semiconductor device
JP5162804B2 (en) * 2001-09-12 2013-03-13 富士電機株式会社 Semiconductor device
JP3701227B2 (en) * 2001-10-30 2005-09-28 三菱電機株式会社 Semiconductor device and manufacturing method thereof
US6608349B1 (en) * 2001-11-13 2003-08-19 National Semiconductor Corporation Narrow/short high performance MOSFET device design
US6898364B2 (en) * 2002-08-27 2005-05-24 Northrop Grumman Corporation Buffer layer promotion of decrease of one or more strain gradients in optical fiber winding
JP2004158844A (en) * 2002-10-15 2004-06-03 Fuji Electric Device Technology Co Ltd Semiconductor device and method of manufacturing the same
DE102004017723B4 (en) * 2003-04-10 2011-12-08 Fuji Electric Co., Ltd Backward blocking semiconductor device and method of making the same
JP4899290B2 (en) * 2003-04-10 2012-03-21 富士電機株式会社 Reverse blocking semiconductor device
US7652326B2 (en) * 2003-05-20 2010-01-26 Fairchild Semiconductor Corporation Power semiconductor devices and methods of manufacture
DE102004004045B4 (en) * 2004-01-27 2009-04-02 Infineon Technologies Ag Semiconductor device with temporary field stop area and method for its production
JP4992269B2 (en) * 2006-03-30 2012-08-08 株式会社日立製作所 Power semiconductor device
JP4935192B2 (en) * 2006-05-31 2012-05-23 三菱電機株式会社 Semiconductor device
JP2008181988A (en) * 2007-01-24 2008-08-07 Hitachi Ltd Semiconductor device
CN101345254A (en) * 2007-07-12 2009-01-14 富士电机电子技术株式会社 Semiconductor device
JP4912353B2 (en) * 2008-05-16 2012-04-11 三菱電機株式会社 Power semiconductor device and manufacturing method thereof
JP5439901B2 (en) * 2009-03-31 2014-03-12 富士通セミコンダクター株式会社 Semiconductor device and manufacturing method thereof
JP5748188B2 (en) 2009-09-29 2015-07-15 富士電機株式会社 Semiconductor device
JP5656422B2 (en) * 2010-03-11 2015-01-21 三菱電機株式会社 Measuring method
JP5515922B2 (en) 2010-03-24 2014-06-11 富士電機株式会社 Semiconductor device
JP5218474B2 (en) * 2010-05-27 2013-06-26 富士電機株式会社 Semiconductor device
DE102010024257B4 (en) 2010-06-18 2020-04-30 Semikron Elektronik Gmbh & Co. Kg Power semiconductor component with two-stage doping profile
US8319290B2 (en) 2010-06-18 2012-11-27 Fairchild Semiconductor Corporation Trench MOS barrier schottky rectifier with a planar surface using CMP techniques
WO2012115091A1 (en) * 2011-02-24 2012-08-30 富士フイルム株式会社 Electroconductive sheet and touch panel
US8937319B2 (en) 2011-03-07 2015-01-20 Shindengen Electric Manufacturing Co., Ltd. Schottky barrier diode
JP5979836B2 (en) 2011-09-09 2016-08-31 ルネサスエレクトロニクス株式会社 Semiconductor device and manufacturing method of semiconductor device
JP2013149761A (en) * 2012-01-18 2013-08-01 Fuji Electric Co Ltd Semiconductor device
JP2013055347A (en) * 2012-11-08 2013-03-21 Sanken Electric Co Ltd Semiconductor device
WO2014084124A1 (en) 2012-11-29 2014-06-05 富士電機株式会社 Semiconductor device
JP6047429B2 (en) * 2013-03-08 2016-12-21 株式会社 日立パワーデバイス Semiconductor device and power conversion device using the same
JP6237064B2 (en) * 2013-09-30 2017-11-29 サンケン電気株式会社 Semiconductor device
KR20150088631A (en) * 2014-01-24 2015-08-03 삼성전기주식회사 Touch sensor
JP6347308B2 (en) 2016-02-26 2018-06-27 富士電機株式会社 Semiconductor device and manufacturing method of semiconductor device
US11127822B2 (en) 2016-02-26 2021-09-21 Fuji Electric Co., Ltd. Semiconductor device and method of manufacturing semiconductor device
DE112017000081B4 (en) * 2016-03-14 2022-12-29 Fuji Electric Co., Ltd. Semiconductor device and manufacturing method
JP6631727B2 (en) 2017-01-25 2020-01-15 富士電機株式会社 Semiconductor device
CN108461541A (en) * 2017-02-17 2018-08-28 中芯国际集成电路制造(上海)有限公司 Terminal structure, IGBT device and its manufacturing method of IGBT
JP2018148154A (en) * 2017-03-09 2018-09-20 ソニーセミコンダクタソリューションズ株式会社 Semiconductor device and electronic apparatus
JP2021185593A (en) * 2020-05-25 2021-12-09 株式会社 日立パワーデバイス Semiconductor device and power conversion device
JP2022168904A (en) 2021-04-27 2022-11-09 富士電機株式会社 Silicon carbide semiconductor device and method for manufacturing silicon carbide semiconductor device

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NL6904619A (en) * 1969-03-25 1970-09-29
JPS57160159A (en) * 1981-03-28 1982-10-02 Toshiba Corp High breakdown voltage planar type semiconductor device
DE3142616A1 (en) * 1981-10-28 1983-05-05 Robert Bosch Gmbh, 7000 Stuttgart "PLANAR TRANSISTOR STRUCTURE"
DE3220250A1 (en) * 1982-05-28 1983-12-01 Siemens AG, 1000 Berlin und 8000 München SEMICONDUCTOR COMPONENT WITH PLANAR STRUCTURE
JPS5976466A (en) * 1982-10-25 1984-05-01 Mitsubishi Electric Corp Planar type semiconductor device
JPS63138766A (en) * 1986-11-29 1988-06-10 Nec Kansai Ltd Semiconductor element
JPS63227063A (en) * 1987-03-17 1988-09-21 Tdk Corp High breakdown voltage semiconductor device
JP2812093B2 (en) * 1992-09-17 1998-10-15 株式会社日立製作所 Semiconductor device having planar junction
JP2850694B2 (en) * 1993-03-10 1999-01-27 株式会社日立製作所 High breakdown voltage planar type semiconductor device
JPH0794704A (en) * 1993-09-24 1995-04-07 Hitachi Ltd Semiconductor device
JP3111827B2 (en) * 1994-09-20 2000-11-27 株式会社日立製作所 Semiconductor device and power conversion device using the same

Also Published As

Publication number Publication date
EP0703627B1 (en) 2003-04-02
JP3111827B2 (en) 2000-11-27
US5898199A (en) 1999-04-27
US6198126B1 (en) 2001-03-06
DE69530155T2 (en) 2004-01-15
JPH0888346A (en) 1996-04-02
EP0703627A1 (en) 1996-03-27
US5691553A (en) 1997-11-25

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Legal Events

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