DE69526167D1 - Verfahren zum Herstellen durchsichtiger Sperrschichten - Google Patents

Verfahren zum Herstellen durchsichtiger Sperrschichten

Info

Publication number
DE69526167D1
DE69526167D1 DE69526167T DE69526167T DE69526167D1 DE 69526167 D1 DE69526167 D1 DE 69526167D1 DE 69526167 T DE69526167 T DE 69526167T DE 69526167 T DE69526167 T DE 69526167T DE 69526167 D1 DE69526167 D1 DE 69526167D1
Authority
DE
Germany
Prior art keywords
barrier layers
transparent barrier
making transparent
making
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69526167T
Other languages
English (en)
Inventor
Carlo Misiano
Enrico Simonetti
Francesco Staffetti
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CE TE V CT TECNOLOGIE DEL VUOT
Original Assignee
CE TE V CT TECNOLOGIE DEL VUOT
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CE TE V CT TECNOLOGIE DEL VUOT filed Critical CE TE V CT TECNOLOGIE DEL VUOT
Application granted granted Critical
Publication of DE69526167D1 publication Critical patent/DE69526167D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5826—Treatment with charged particles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0042—Controlling partial pressure or flow rate of reactive or inert gases with feedback of measurements
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/20—Metallic material, boron or silicon on organic substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/548—Controlling the composition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5846—Reactive treatment
    • C23C14/5853—Oxidation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Laminated Bodies (AREA)
  • Physical Vapour Deposition (AREA)
DE69526167T 1994-09-29 1995-06-30 Verfahren zum Herstellen durchsichtiger Sperrschichten Expired - Lifetime DE69526167D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT94RM000626A IT1276331B1 (it) 1994-09-29 1994-09-29 Perfezionamento nei processi di deposizione di strati di barriera trasparente, ossidati parzialmente in modo controllato

Publications (1)

Publication Number Publication Date
DE69526167D1 true DE69526167D1 (de) 2002-05-08

Family

ID=11402749

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69526167T Expired - Lifetime DE69526167D1 (de) 1994-09-29 1995-06-30 Verfahren zum Herstellen durchsichtiger Sperrschichten

Country Status (5)

Country Link
US (2) US5704980A (de)
EP (1) EP0704547B1 (de)
JP (1) JPH08197676A (de)
DE (1) DE69526167D1 (de)
IT (1) IT1276331B1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4261680B2 (ja) * 1999-05-07 2009-04-30 株式会社クレハ 防湿性多層フィルム
DE60040851D1 (de) * 1999-07-21 2009-01-02 Kao Corp N und einrichtung zu dessen herstellung
TW523943B (en) * 2001-12-26 2003-03-11 Ritdisplay Corp Deposition apparatus of organic light emitting device
AU2003207950A1 (en) * 2002-01-07 2003-07-24 Hanita Coatings Translucent barrier static shielding film
US6811815B2 (en) * 2002-06-14 2004-11-02 Avery Dennison Corporation Method for roll-to-roll deposition of optically transparent and high conductivity metallic thin films
EP1591750B1 (de) * 2004-04-26 2016-04-13 Applied Materials GmbH & Co. KG Verfahren und Vorrichtung zur Regelung der Dicke einer Beschichtung auf einem in seiner Längsrichtung bewegten Band
US20070160786A1 (en) * 2004-07-04 2007-07-12 Gila Levin Semi-transparent shielding bag formed by translucent barrier statis shielding film
US9751254B2 (en) * 2008-10-09 2017-09-05 Bobst Manchester Ltd Apparatus for treating substrates
EP3500691A1 (de) * 2016-08-16 2019-06-26 Flisom AG Abscheidungssystem
JP2018171726A (ja) * 2017-03-31 2018-11-08 東レフィルム加工株式会社 アルミニウム蒸着フィルム積層体
JP6642605B2 (ja) * 2018-03-05 2020-02-05 大日本印刷株式会社 真空断熱材用外包材、真空断熱材、および真空断熱材付き物品
TW202311054A (zh) 2021-05-06 2023-03-16 德商巴斯夫塗料有限責任公司 多層障壁膜、其製造及其於光伏打應用之用途

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4197337A (en) * 1978-12-22 1980-04-08 Mobil Oil Corporation Optical transformation of metallized polymeric film material
US4364995A (en) * 1981-02-04 1982-12-21 Minnesota Mining And Manufacturing Company Metal/metal oxide coatings
EP0082001A1 (de) * 1981-12-16 1983-06-22 General Engineering Radcliffe 1979 Limited Vorrichtung und Verfahren zum Metallisieren einer langen Materialstrecke
JPS6082660A (ja) * 1983-10-08 1985-05-10 Konishiroku Photo Ind Co Ltd 酸化物層の形成装置
GB8928706D0 (en) * 1989-12-20 1990-02-28 Bowater Packaging Ltd Transparent barrier packaging materials
DE4308632B4 (de) * 1993-03-18 2007-10-04 Applied Materials Gmbh & Co. Kg Verfahren und Vorrichtung zum Nachbehandeln von Aluminium-beschichteten Kunststoff-Folien
GB9318143D0 (en) * 1993-09-01 1993-10-20 Bowater Packaging Ltd Microwave interactive barrier films

Also Published As

Publication number Publication date
EP0704547A1 (de) 1996-04-03
US5900271A (en) 1999-05-04
JPH08197676A (ja) 1996-08-06
EP0704547B1 (de) 2002-04-03
IT1276331B1 (it) 1997-10-28
US5704980A (en) 1998-01-06
ITRM940626A1 (it) 1996-03-29
ITRM940626A0 (it) 1994-09-29

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Legal Events

Date Code Title Description
8332 No legal effect for de