DE69523996D1 - Detektorreihe für interferometrische Messsysteme - Google Patents
Detektorreihe für interferometrische MesssystemeInfo
- Publication number
- DE69523996D1 DE69523996D1 DE69523996T DE69523996T DE69523996D1 DE 69523996 D1 DE69523996 D1 DE 69523996D1 DE 69523996 T DE69523996 T DE 69523996T DE 69523996 T DE69523996 T DE 69523996T DE 69523996 D1 DE69523996 D1 DE 69523996D1
- Authority
- DE
- Germany
- Prior art keywords
- detectors
- series
- measuring systems
- interferometric measuring
- interferometric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Revoked
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/271,310 US5530543A (en) | 1994-07-06 | 1994-07-06 | Detector array for use in interferometric metrology systems |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69523996D1 true DE69523996D1 (de) | 2002-01-03 |
DE69523996T2 DE69523996T2 (de) | 2002-04-04 |
Family
ID=23035046
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69523996T Revoked DE69523996T2 (de) | 1994-07-06 | 1995-03-31 | Detektorreihe für interferometrische Messsysteme |
Country Status (4)
Country | Link |
---|---|
US (1) | US5530543A (de) |
EP (1) | EP0694764B1 (de) |
JP (1) | JPH08178613A (de) |
DE (1) | DE69523996T2 (de) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003021197A1 (en) * | 2001-08-30 | 2003-03-13 | Microe Systems Corporation | Harmonic suppressing photodetector array |
US6744520B2 (en) | 2002-03-04 | 2004-06-01 | Industrial Technology Research Institute | Method for measuring two-dimensional displacement using conjugate optics |
DE10333772A1 (de) * | 2002-08-07 | 2004-02-26 | Dr. Johannes Heidenhain Gmbh | Interferenzielle Positionsmesseinrichtung |
JP4381671B2 (ja) * | 2002-10-23 | 2009-12-09 | ソニーマニュファクチュアリングシステムズ株式会社 | 変位検出装置 |
TWI224351B (en) * | 2003-09-18 | 2004-11-21 | Ind Tech Res Inst | Apparatus for detecting displacement of two-dimensional motion |
DE10351560A1 (de) | 2003-11-03 | 2005-06-02 | Metronic Ag | Impulsgeber |
JP4869628B2 (ja) * | 2005-05-26 | 2012-02-08 | オリンパス株式会社 | 光学式エンコーダ |
US20070024865A1 (en) * | 2005-07-26 | 2007-02-01 | Mitchell Donald K | Optical encoder having slanted optical detector elements for harmonic suppression |
JP2008232705A (ja) | 2007-03-19 | 2008-10-02 | Mitsutoyo Corp | 光電式エンコーダ |
US8309906B2 (en) | 2010-06-10 | 2012-11-13 | Mitutoyo Corporation | Absolute optical encoder with long range intensity modulation on scale |
WO2014095209A1 (en) * | 2012-12-17 | 2014-06-26 | Waterford Institute Of Technology | Position detector |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2094974B (en) * | 1981-03-12 | 1984-11-14 | Mitutoyo Mfg Co Ltd | Photoelectric encoder device |
US4828392A (en) * | 1985-03-13 | 1989-05-09 | Matsushita Electric Industrial Co., Ltd. | Exposure apparatus |
NL8601719A (nl) * | 1986-07-02 | 1988-02-01 | Philips Nv | Electronisch instelbare positiegevoelige stralingsdetector, focusfoutdetectiestelsel voorzien van een dergelijke stralingsdetector, en optische lees- en/of schrijfinrichting voorzien van een dergelijk focusfoutdetectiestelsel. |
US4776698A (en) * | 1986-08-04 | 1988-10-11 | Eastman Kodak Company | Measuring |
US5098190A (en) * | 1989-08-07 | 1992-03-24 | Optra, Inc. | Meterology using interferometric measurement technology for measuring scale displacement with three output signals |
DE4006789A1 (de) * | 1990-03-03 | 1991-09-05 | Zeiss Carl Fa | Optisches abtastsystem fuer rasterteilungen |
DE4033013C2 (de) * | 1990-10-18 | 1994-11-17 | Heidenhain Gmbh Dr Johannes | Polarisationsoptische Anordnung |
US5155355A (en) * | 1991-04-25 | 1992-10-13 | Mitutoyo Corporation | Photoelectric encoder having a grating substrate with integral light emitting elements |
US5357337A (en) * | 1992-11-20 | 1994-10-18 | General Electric Company | High speed interferometer fourier transform spectrometer including a weighted capacitive matrix |
US5317385A (en) * | 1992-12-16 | 1994-05-31 | Federal Products Corporation | Portable extended life metrology system for measuring scale displacement with three output signals using a pulsed source |
-
1994
- 1994-07-06 US US08/271,310 patent/US5530543A/en not_active Expired - Lifetime
-
1995
- 1995-03-31 EP EP95104868A patent/EP0694764B1/de not_active Revoked
- 1995-03-31 DE DE69523996T patent/DE69523996T2/de not_active Revoked
- 1995-07-06 JP JP7196195A patent/JPH08178613A/ja not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
EP0694764A2 (de) | 1996-01-31 |
DE69523996T2 (de) | 2002-04-04 |
US5530543A (en) | 1996-06-25 |
JPH08178613A (ja) | 1996-07-12 |
EP0694764B1 (de) | 2001-11-21 |
EP0694764A3 (de) | 1997-04-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8327 | Change in the person/name/address of the patent owner |
Owner name: AGILENT TECHNOLOGIES, INC., PALO ALTO, CALIF., US |
|
8363 | Opposition against the patent | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: AGILENT TECHNOLOGIES, INC. (N.D.GES.D.STAATES DELA |
|
8331 | Complete revocation |