DE69523996D1 - Detektorreihe für interferometrische Messsysteme - Google Patents

Detektorreihe für interferometrische Messsysteme

Info

Publication number
DE69523996D1
DE69523996D1 DE69523996T DE69523996T DE69523996D1 DE 69523996 D1 DE69523996 D1 DE 69523996D1 DE 69523996 T DE69523996 T DE 69523996T DE 69523996 T DE69523996 T DE 69523996T DE 69523996 D1 DE69523996 D1 DE 69523996D1
Authority
DE
Germany
Prior art keywords
detectors
series
measuring systems
interferometric measuring
interferometric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Revoked
Application number
DE69523996T
Other languages
English (en)
Other versions
DE69523996T2 (de
Inventor
Michael Hercher
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=23035046&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69523996(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Application granted granted Critical
Publication of DE69523996D1 publication Critical patent/DE69523996D1/de
Publication of DE69523996T2 publication Critical patent/DE69523996T2/de
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
DE69523996T 1994-07-06 1995-03-31 Detektorreihe für interferometrische Messsysteme Revoked DE69523996T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/271,310 US5530543A (en) 1994-07-06 1994-07-06 Detector array for use in interferometric metrology systems

Publications (2)

Publication Number Publication Date
DE69523996D1 true DE69523996D1 (de) 2002-01-03
DE69523996T2 DE69523996T2 (de) 2002-04-04

Family

ID=23035046

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69523996T Revoked DE69523996T2 (de) 1994-07-06 1995-03-31 Detektorreihe für interferometrische Messsysteme

Country Status (4)

Country Link
US (1) US5530543A (de)
EP (1) EP0694764B1 (de)
JP (1) JPH08178613A (de)
DE (1) DE69523996T2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003021197A1 (en) * 2001-08-30 2003-03-13 Microe Systems Corporation Harmonic suppressing photodetector array
US6744520B2 (en) 2002-03-04 2004-06-01 Industrial Technology Research Institute Method for measuring two-dimensional displacement using conjugate optics
DE10333772A1 (de) * 2002-08-07 2004-02-26 Dr. Johannes Heidenhain Gmbh Interferenzielle Positionsmesseinrichtung
JP4381671B2 (ja) * 2002-10-23 2009-12-09 ソニーマニュファクチュアリングシステムズ株式会社 変位検出装置
TWI224351B (en) * 2003-09-18 2004-11-21 Ind Tech Res Inst Apparatus for detecting displacement of two-dimensional motion
DE10351560A1 (de) 2003-11-03 2005-06-02 Metronic Ag Impulsgeber
JP4869628B2 (ja) * 2005-05-26 2012-02-08 オリンパス株式会社 光学式エンコーダ
US20070024865A1 (en) * 2005-07-26 2007-02-01 Mitchell Donald K Optical encoder having slanted optical detector elements for harmonic suppression
JP2008232705A (ja) 2007-03-19 2008-10-02 Mitsutoyo Corp 光電式エンコーダ
US8309906B2 (en) 2010-06-10 2012-11-13 Mitutoyo Corporation Absolute optical encoder with long range intensity modulation on scale
WO2014095209A1 (en) * 2012-12-17 2014-06-26 Waterford Institute Of Technology Position detector

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2094974B (en) * 1981-03-12 1984-11-14 Mitutoyo Mfg Co Ltd Photoelectric encoder device
US4828392A (en) * 1985-03-13 1989-05-09 Matsushita Electric Industrial Co., Ltd. Exposure apparatus
NL8601719A (nl) * 1986-07-02 1988-02-01 Philips Nv Electronisch instelbare positiegevoelige stralingsdetector, focusfoutdetectiestelsel voorzien van een dergelijke stralingsdetector, en optische lees- en/of schrijfinrichting voorzien van een dergelijk focusfoutdetectiestelsel.
US4776698A (en) * 1986-08-04 1988-10-11 Eastman Kodak Company Measuring
US5098190A (en) * 1989-08-07 1992-03-24 Optra, Inc. Meterology using interferometric measurement technology for measuring scale displacement with three output signals
DE4006789A1 (de) * 1990-03-03 1991-09-05 Zeiss Carl Fa Optisches abtastsystem fuer rasterteilungen
DE4033013C2 (de) * 1990-10-18 1994-11-17 Heidenhain Gmbh Dr Johannes Polarisationsoptische Anordnung
US5155355A (en) * 1991-04-25 1992-10-13 Mitutoyo Corporation Photoelectric encoder having a grating substrate with integral light emitting elements
US5357337A (en) * 1992-11-20 1994-10-18 General Electric Company High speed interferometer fourier transform spectrometer including a weighted capacitive matrix
US5317385A (en) * 1992-12-16 1994-05-31 Federal Products Corporation Portable extended life metrology system for measuring scale displacement with three output signals using a pulsed source

Also Published As

Publication number Publication date
EP0694764A2 (de) 1996-01-31
DE69523996T2 (de) 2002-04-04
US5530543A (en) 1996-06-25
JPH08178613A (ja) 1996-07-12
EP0694764B1 (de) 2001-11-21
EP0694764A3 (de) 1997-04-16

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: AGILENT TECHNOLOGIES, INC., PALO ALTO, CALIF., US

8363 Opposition against the patent
8327 Change in the person/name/address of the patent owner

Owner name: AGILENT TECHNOLOGIES, INC. (N.D.GES.D.STAATES DELA

8331 Complete revocation