DE69427357D1 - Verfahren zur herstellung von zusammensetzungen zur reinigung von halbleiterverfahrensgasen zur entfernung von lewis-säure und oxydationsmittelverunreinigungen - Google Patents

Verfahren zur herstellung von zusammensetzungen zur reinigung von halbleiterverfahrensgasen zur entfernung von lewis-säure und oxydationsmittelverunreinigungen

Info

Publication number
DE69427357D1
DE69427357D1 DE69427357T DE69427357T DE69427357D1 DE 69427357 D1 DE69427357 D1 DE 69427357D1 DE 69427357 T DE69427357 T DE 69427357T DE 69427357 T DE69427357 T DE 69427357T DE 69427357 D1 DE69427357 D1 DE 69427357D1
Authority
DE
Germany
Prior art keywords
oxydiser
impurities
lewis acid
semiconductor process
process gases
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69427357T
Other languages
English (en)
Other versions
DE69427357T2 (de
Inventor
M Tom
V Mcmanus
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Millipore Investment Holdings Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Millipore Investment Holdings Ltd filed Critical Millipore Investment Holdings Ltd
Publication of DE69427357D1 publication Critical patent/DE69427357D1/de
Application granted granted Critical
Publication of DE69427357T2 publication Critical patent/DE69427357T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • E—FIXED CONSTRUCTIONS
    • E02—HYDRAULIC ENGINEERING; FOUNDATIONS; SOIL SHIFTING
    • E02F—DREDGING; SOIL-SHIFTING
    • E02F9/00—Component parts of dredgers or soil-shifting machines, not restricted to one of the kinds covered by groups E02F3/00 - E02F7/00
    • E02F9/20—Drives; Control devices
    • E02F9/22—Hydraulic or pneumatic drives
    • E02F9/2221—Control of flow rate; Load sensing arrangements
    • E02F9/2232—Control of flow rate; Load sensing arrangements using one or more variable displacement pumps
    • E02F9/2235—Control of flow rate; Load sensing arrangements using one or more variable displacement pumps including an electronic controller
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/26—Drying gases or vapours
    • B01D53/28—Selection of materials for use as drying agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/38—Removing components of undefined structure
    • B01D53/40—Acidic components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/28—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof characterised by their form or physical properties
    • B01J20/28054—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof characterised by their form or physical properties characterised by their surface properties or porosity
    • B01J20/28057—Surface area, e.g. B.E.T specific surface area
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/28—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof characterised by their form or physical properties
    • B01J20/28054—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof characterised by their form or physical properties characterised by their surface properties or porosity
    • B01J20/28078—Pore diameter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/30—Processes for preparing, regenerating, or reactivating
    • B01J20/32—Impregnating or coating ; Solid sorbent compositions obtained from processes involving impregnating or coating
    • B01J20/3202—Impregnating or coating ; Solid sorbent compositions obtained from processes involving impregnating or coating characterised by the carrier, support or substrate used for impregnation or coating
    • B01J20/3206—Organic carriers, supports or substrates
    • B01J20/3208—Polymeric carriers, supports or substrates
    • B01J20/321—Polymeric carriers, supports or substrates consisting of a polymer obtained by reactions involving only carbon to carbon unsaturated bonds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/30—Processes for preparing, regenerating, or reactivating
    • B01J20/32—Impregnating or coating ; Solid sorbent compositions obtained from processes involving impregnating or coating
    • B01J20/3231—Impregnating or coating ; Solid sorbent compositions obtained from processes involving impregnating or coating characterised by the coating or impregnating layer
    • B01J20/3234—Inorganic material layers
    • B01J20/3236—Inorganic material layers containing metal, other than zeolites, e.g. oxides, hydroxides, sulphides or salts
    • E—FIXED CONSTRUCTIONS
    • E02—HYDRAULIC ENGINEERING; FOUNDATIONS; SOIL SHIFTING
    • E02F—DREDGING; SOIL-SHIFTING
    • E02F9/00—Component parts of dredgers or soil-shifting machines, not restricted to one of the kinds covered by groups E02F3/00 - E02F7/00
    • E02F9/20—Drives; Control devices
    • E02F9/22—Hydraulic or pneumatic drives
    • E02F9/2278—Hydraulic circuits
    • E02F9/2282—Systems using center bypass type changeover valves
    • E—FIXED CONSTRUCTIONS
    • E02—HYDRAULIC ENGINEERING; FOUNDATIONS; SOIL SHIFTING
    • E02F—DREDGING; SOIL-SHIFTING
    • E02F9/00—Component parts of dredgers or soil-shifting machines, not restricted to one of the kinds covered by groups E02F3/00 - E02F7/00
    • E02F9/20—Drives; Control devices
    • E02F9/22—Hydraulic or pneumatic drives
    • E02F9/2278—Hydraulic circuits
    • E02F9/2296—Systems with a variable displacement pump

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Civil Engineering (AREA)
  • Structural Engineering (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mining & Mineral Resources (AREA)
  • General Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Biomedical Technology (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Gas Separation By Absorption (AREA)
  • Treating Waste Gases (AREA)
DE69427357T 1993-06-29 1994-06-28 Verfahren zur herstellung von zusammensetzungen zur reinigung von halbleiterverfahrensgasen zur entfernung von lewis-säure und oxydationsmittelverunreinigungen Expired - Fee Related DE69427357T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/084,414 US5385689A (en) 1993-06-29 1993-06-29 Process and composition for purifying semiconductor process gases to remove Lewis acid and oxidant impurities therefrom
PCT/US1994/007300 WO1995001409A1 (en) 1993-06-29 1994-06-28 Process and composition for purifying semiconductor process gases to remove lewis acid and oxidant impurities therefrom

Publications (2)

Publication Number Publication Date
DE69427357D1 true DE69427357D1 (de) 2001-07-05
DE69427357T2 DE69427357T2 (de) 2001-10-31

Family

ID=22184823

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69427357T Expired - Fee Related DE69427357T2 (de) 1993-06-29 1994-06-28 Verfahren zur herstellung von zusammensetzungen zur reinigung von halbleiterverfahrensgasen zur entfernung von lewis-säure und oxydationsmittelverunreinigungen

Country Status (6)

Country Link
US (2) US5385689A (de)
EP (1) EP0714425B1 (de)
JP (1) JP3436934B2 (de)
DE (1) DE69427357T2 (de)
IL (1) IL110156A (de)
WO (1) WO1995001409A1 (de)

Families Citing this family (54)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5853678A (en) * 1993-03-17 1998-12-29 Nipon Sanso Corporation Method for removing hydrides, alkoxides and alkylates out of a gas using cupric hydroxide
US5885845A (en) * 1993-12-22 1999-03-23 Nippon Sanso Corporation Method for detecting inorganic hydrides, inorganic halides and organometallic compounds in a gas using copper hydroxide
US5707424A (en) * 1994-10-13 1998-01-13 Advanced Technology Materials, Inc. Process system with integrated gas storage and delivery unit
US6083298A (en) * 1994-10-13 2000-07-04 Advanced Technology Materials, Inc. Process for fabricating a sorbent-based gas storage and dispensing system, utilizing sorbent material pretreatment
US6204180B1 (en) 1997-05-16 2001-03-20 Advanced Technology Materials, Inc. Apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing sorbent-based fluid storage and dispensing system for reagent delivery
US5518528A (en) * 1994-10-13 1996-05-21 Advanced Technology Materials, Inc. Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds
US6132492A (en) * 1994-10-13 2000-10-17 Advanced Technology Materials, Inc. Sorbent-based gas storage and delivery system for dispensing of high-purity gas, and apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing same
US5704967A (en) * 1995-10-13 1998-01-06 Advanced Technology Materials, Inc. Fluid storage and delivery system comprising high work capacity physical sorbent
US6110807A (en) * 1995-06-07 2000-08-29 Saes Getters S.P.A. Process for producing high-porosity non-evaporable getter materials
US5916245A (en) * 1996-05-20 1999-06-29 Advanced Technology Materials, Inc. High capacity gas storage and dispensing system
DE69718137T2 (de) * 1996-05-20 2003-10-09 Advanced Tech Materials Flüssigkeitsbehälter und -abgabesystem mit physikalischem sorptionsmittel mit hoher kapazität
US5977687A (en) * 1996-07-12 1999-11-02 Advanced Technology Materials, Inc. Piezoelectric end point sensor for detection of breakthrough of fluid, and fluid processing apparatus comprising same
US5827947A (en) * 1997-01-17 1998-10-27 Advanced Technology Materials, Inc. Piezoelectric sensor for hydride gases, and fluid monitoring apparatus comprising same
US6027547A (en) * 1997-05-16 2000-02-22 Advanced Technology Materials, Inc. Fluid storage and dispensing vessel with modified high surface area solid as fluid storage medium
US6019823A (en) * 1997-05-16 2000-02-01 Advanced Technology Materials, Inc. Sorbent-based fluid storage and dispensing vessel with replaceable sorbent cartridge members
US5985008A (en) * 1997-05-20 1999-11-16 Advanced Technology Materials, Inc. Sorbent-based fluid storage and dispensing system with high efficiency sorbent medium
US5851270A (en) * 1997-05-20 1998-12-22 Advanced Technology Materials, Inc. Low pressure gas source and dispensing apparatus with enhanced diffusive/extractive means
US5980608A (en) * 1998-01-07 1999-11-09 Advanced Technology Materials, Inc. Throughflow gas storage and dispensing system
KR100731836B1 (ko) * 1998-04-09 2007-06-25 허니웰 인터내셔널 인코포레이티드 디보란의 제조 및 정제
US6029500A (en) * 1998-05-19 2000-02-29 Advanced Technology Materials, Inc. Piezoelectric quartz crystal hydrogen sensor, and hydrogen sensing method utilizing same
US6079252A (en) * 1998-05-20 2000-06-27 Advanced Technology Materials, Inc. Leak detection device, and fluid vessel assembly comprising same
US6156578A (en) * 1998-06-01 2000-12-05 Advanced Technology Materials, Inc. Quartz crystal microbalance system for detecting concentration of a selected gas component in a multicomponent gas stream
US6070576A (en) * 1998-06-02 2000-06-06 Advanced Technology Materials, Inc. Adsorbent-based storage and dispensing system
US6218326B1 (en) * 1998-07-29 2001-04-17 University Of Iowa Research Foundation Supported molten-metal catalysts
DE19846284C2 (de) * 1998-10-08 2002-11-21 Messer Griesheim Gmbh Verfahren zur Entfernung von Phosphin
US6295861B1 (en) 1999-01-28 2001-10-02 Advanced Technology Materials, Inc. Quartz crystal microbalance sensors and semiconductor manufacturing process systems comprising same
TW550307B (en) * 2000-04-19 2003-09-01 Getters Spa A process for the purification of organometallic compounds or heteroatomic organic compounds with hydrogenated getter alloys
US6461411B1 (en) * 2000-12-04 2002-10-08 Matheson Tri-Gas Method and materials for purifying hydride gases, inert gases, and non-reactive gases
US6576138B2 (en) 2000-12-14 2003-06-10 Praxair Technology, Inc. Method for purifying semiconductor gases
US6581649B2 (en) * 2001-07-13 2003-06-24 L'air Liquide - Societe Anonyme A'directiore Et Conseil De Surveillance Pour L'etude Et L'exploitation Des Procedes Georges Claude Methods and apparatus for delivering high purity liquids with low vapor pressure
US7832550B2 (en) * 2001-07-17 2010-11-16 American Air Liquide, Inc. Reactive gases with concentrations of increased stability and processes for manufacturing same
US6752852B1 (en) * 2001-07-17 2004-06-22 American Air Liquide, Inc. Apparatus for removing moisture from fluids comprising acid gases; methods of using same, and compositions
US6793966B2 (en) * 2001-09-10 2004-09-21 Howmet Research Corporation Chemical vapor deposition apparatus and method
US6733734B2 (en) * 2001-10-31 2004-05-11 Matheson Tri-Gas Materials and methods for the purification of hydride gases
US7601225B2 (en) * 2002-06-17 2009-10-13 Asm International N.V. System for controlling the sublimation of reactants
US7446078B2 (en) * 2002-07-09 2008-11-04 Air Products And Chemicals, Inc. Adsorbent for water removal from ammonia
US9741881B2 (en) 2003-04-14 2017-08-22 S'tile Photovoltaic module including integrated photovoltaic cells
US9493358B2 (en) 2003-04-14 2016-11-15 Stile Photovoltaic module including integrated photovoltaic cells
US8192648B2 (en) * 2003-04-14 2012-06-05 S'tile Method for forming a sintered semiconductor material
US7553355B2 (en) * 2003-06-23 2009-06-30 Matheson Tri-Gas Methods and materials for the reduction and control of moisture and oxygen in OLED devices
US7156380B2 (en) * 2003-09-29 2007-01-02 Asm International, N.V. Safe liquid source containers
US6892473B1 (en) 2003-12-08 2005-05-17 Air Products And Chemicals, Inc. Process for removing water from ammonia
US7160360B2 (en) * 2003-12-08 2007-01-09 Air Products And Chemicals, Inc. Purification of hydride gases
US7297181B2 (en) * 2004-07-07 2007-11-20 Air Liquide America L.P. Purification and transfilling of ammonia
US7833353B2 (en) * 2007-01-24 2010-11-16 Asm Japan K.K. Liquid material vaporization apparatus for semiconductor processing apparatus
US8343583B2 (en) 2008-07-10 2013-01-01 Asm International N.V. Method for vaporizing non-gaseous precursor in a fluidized bed
RU2518602C2 (ru) * 2008-11-17 2014-06-10 ВОЛТЕЙКС, ЭлЭлСи Очистка германа
US8012876B2 (en) * 2008-12-02 2011-09-06 Asm International N.V. Delivery of vapor precursor from solid source
US8679231B2 (en) 2011-01-19 2014-03-25 Advanced Technology Materials, Inc. PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing same
US8361199B2 (en) 2011-05-27 2013-01-29 Air Liquide Electronics U.S. Lp Purification of H2Se
RU2533491C1 (ru) * 2013-08-08 2014-11-20 Федеральное государственное унитарное предприятие "Государственный ордена Трудового Красного Знамени научно-исследовательский институт химии и технологии элементоорганических соединений" (ФГУП "ГНИИХТЭОС") Способ получения хемосорбента для очистки инертных газов и газов-восстановителей от примесей
CN105699512B (zh) * 2016-01-22 2018-07-06 保定市北方特种气体有限公司 纯乙硼烷中乙烷杂质的检测方法
CN107870113B (zh) * 2016-09-27 2024-02-09 核工业北京地质研究院 一种Ar-Ar同位素定年测试中的气体纯化装置
CN113181752B (zh) * 2021-03-26 2021-12-07 博纯材料股份有限公司 一种锗烷收集纯化设备及方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7607390A (nl) * 1975-07-09 1977-01-11 Montedison Spa Werkwijze voor de vervaardiging van metallische en/of metaalkeramische en/of keramische spons.
US4603148A (en) * 1983-05-12 1986-07-29 Hercules Incorporated Macroreticulate polymer scavengers for the removal of impurities from inert fluids
US4604270A (en) * 1984-09-28 1986-08-05 Hercules Incorporated Scavengers for the removal of impurities from inert fluids
US4640270A (en) * 1985-05-06 1987-02-03 Chin Te Chien Male organ jacket
DE3618942A1 (de) * 1986-06-05 1987-12-10 Messer Griesheim Gmbh Masse zur entfernung durch chemiesorption von homogen geloesten beimengungen, insbesondere sauerstoff, aus gasen oder fluessigkeiten
US4659552A (en) * 1986-07-21 1987-04-21 Hercules Incorporated Scavengers for the removal of impurities from arsine and phosphine
US4925646A (en) * 1987-03-24 1990-05-15 Advanced Technology Materials, Inc. Process and composition for drying of gaseous hydrogen halides
US4781900A (en) * 1987-03-24 1988-11-01 Advanced Technology Materials, Inc. Process and composition for purifying arsine, phosphine, ammonia, and inert gases to remove Lewis acid and oxidant impurities therefrom
US4950419A (en) * 1987-03-24 1990-08-21 Advanced Technology Materials, Inc. Process, composition, and apparatus for purifying inert gases to remove lewis acid and oxidant impurities therefrom
US4761395A (en) * 1987-03-24 1988-08-02 Advanced Technology Materials, Inc. Process and composition for purifying arsine, phosphine, ammonia, and inert gases to remove Lewis acid and oxidant impurities therefrom
US4853148A (en) * 1987-03-24 1989-08-01 Advanced Technology Materials, Inc. Process and composition for drying of gaseous hydrogen halides
US5015411A (en) * 1987-03-24 1991-05-14 Advanced Technology Materials, Inc. Process, composition, and apparatus for purifying inert gases to remove Lewis acid and oxidant impurities therefrom
US4983363A (en) * 1987-03-24 1991-01-08 Advanced Technology Materials, Inc. Apparatus for purifying arsine, phosphine, ammonia, and inert gases to remove Lewis acid and oxidant impurities therefrom
US4865822A (en) * 1987-07-31 1989-09-12 Advanced Technology Materials, Inc. Process for purifying hydrogen selenide and hydrogen telluride, to remove moisture and oxidant impurities therefrom
US4797227A (en) * 1987-07-31 1989-01-10 Advanced Technology Materials Inc. Process and composition for purifying hydrogen selenide and hydrogen telluride, to remove moisture and oxidant impurities therefrom
IT1227219B (it) * 1988-09-26 1991-03-27 Getters Spa Apparecchiatura e metodo relativo per asportare impurezze gassose da gas inerti ed assicurare livelli estremamente bassi di idrogeno
US4950416A (en) * 1988-10-19 1990-08-21 Vista Chemical Company Liquid dishwasher detergent composition

Also Published As

Publication number Publication date
US5531971A (en) 1996-07-02
WO1995001409A1 (en) 1995-01-12
IL110156A (en) 1998-02-22
JP3436934B2 (ja) 2003-08-18
JPH08511992A (ja) 1996-12-17
EP0714425A4 (de) 1996-10-16
EP0714425A1 (de) 1996-06-05
EP0714425B1 (de) 2001-05-30
US5385689A (en) 1995-01-31
DE69427357T2 (de) 2001-10-31
IL110156A0 (en) 1994-10-07

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Owner name: MYKROLIS CORP. (N.D.GES.D. STAATES DELAWARE), BEDF

8339 Ceased/non-payment of the annual fee