DE69423962D1 - Mikrominiature tieftemperaturkühler und maschinen mit einem stirling kreislauf - Google Patents

Mikrominiature tieftemperaturkühler und maschinen mit einem stirling kreislauf

Info

Publication number
DE69423962D1
DE69423962D1 DE69423962T DE69423962T DE69423962D1 DE 69423962 D1 DE69423962 D1 DE 69423962D1 DE 69423962 T DE69423962 T DE 69423962T DE 69423962 T DE69423962 T DE 69423962T DE 69423962 D1 DE69423962 D1 DE 69423962D1
Authority
DE
Germany
Prior art keywords
regenerator
microminiature
workspace
diaphragms
amplitude
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69423962T
Other languages
English (en)
Other versions
DE69423962T2 (de
Inventor
Lyn Bowman
M Berchowitz
Israel Urieli
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ohio University
Original Assignee
Ohio University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ohio University filed Critical Ohio University
Publication of DE69423962D1 publication Critical patent/DE69423962D1/de
Application granted granted Critical
Publication of DE69423962T2 publication Critical patent/DE69423962T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02G—HOT GAS OR COMBUSTION-PRODUCT POSITIVE-DISPLACEMENT ENGINE PLANTS; USE OF WASTE HEAT OF COMBUSTION ENGINES; NOT OTHERWISE PROVIDED FOR
    • F02G1/00—Hot gas positive-displacement engine plants
    • F02G1/04—Hot gas positive-displacement engine plants of closed-cycle type
    • F02G1/043—Hot gas positive-displacement engine plants of closed-cycle type the engine being operated by expansion and contraction of a mass of working gas which is heated and cooled in one of a plurality of constantly communicating expansible chambers, e.g. Stirling cycle type engines
    • F02G1/0435—Hot gas positive-displacement engine plants of closed-cycle type the engine being operated by expansion and contraction of a mass of working gas which is heated and cooled in one of a plurality of constantly communicating expansible chambers, e.g. Stirling cycle type engines the engine being of the free piston type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/44—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements the complete device being wholly immersed in a fluid other than air
    • H01L23/445—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements the complete device being wholly immersed in a fluid other than air the fluid being a liquefied gas, e.g. in a cryogenic vessel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02G—HOT GAS OR COMBUSTION-PRODUCT POSITIVE-DISPLACEMENT ENGINE PLANTS; USE OF WASTE HEAT OF COMBUSTION ENGINES; NOT OTHERWISE PROVIDED FOR
    • F02G2250/00—Special cycles or special engines
    • F02G2250/31—Nano- or microengines
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02G—HOT GAS OR COMBUSTION-PRODUCT POSITIVE-DISPLACEMENT ENGINE PLANTS; USE OF WASTE HEAT OF COMBUSTION ENGINES; NOT OTHERWISE PROVIDED FOR
    • F02G2254/00—Heat inputs
    • F02G2254/30—Heat inputs using solar radiation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02G—HOT GAS OR COMBUSTION-PRODUCT POSITIVE-DISPLACEMENT ENGINE PLANTS; USE OF WASTE HEAT OF COMBUSTION ENGINES; NOT OTHERWISE PROVIDED FOR
    • F02G2258/00—Materials used
    • F02G2258/10—Materials used ceramic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2309/00—Gas cycle refrigeration machines
    • F25B2309/003—Gas cycle refrigeration machines characterised by construction or composition of the regenerator
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
    • F25B2400/15—Microelectro-mechanical devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2500/00—Problems to be solved
    • F25B2500/17—Size reduction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/095—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
    • H01L2924/097—Glass-ceramics, e.g. devitrified glass
    • H01L2924/09701—Low temperature co-fired ceramic [LTCC]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30—Technical effects
    • H01L2924/301—Electrical effects
    • H01L2924/3011—Impedance
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49229—Prime mover or fluid pump making

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Combustion & Propulsion (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Thermal Sciences (AREA)
  • Reciprocating Pumps (AREA)
  • Devices That Are Associated With Refrigeration Equipment (AREA)
  • Agricultural Chemicals And Associated Chemicals (AREA)
  • Saccharide Compounds (AREA)
DE69423962T 1993-02-12 1994-02-02 Mikrominiature tieftemperaturkühler und maschinen mit einem stirling kreislauf Expired - Fee Related DE69423962T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US1726593A 1993-02-12 1993-02-12
PCT/US1994/001240 WO1994018433A1 (en) 1993-02-12 1994-02-02 Microminiature stirling cycle cryocoolers and engines

Publications (2)

Publication Number Publication Date
DE69423962D1 true DE69423962D1 (de) 2000-05-18
DE69423962T2 DE69423962T2 (de) 2000-12-07

Family

ID=21781657

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69423962T Expired - Fee Related DE69423962T2 (de) 1993-02-12 1994-02-02 Mikrominiature tieftemperaturkühler und maschinen mit einem stirling kreislauf

Country Status (8)

Country Link
US (1) US5457956A (de)
EP (1) EP0685144B1 (de)
JP (1) JPH08507597A (de)
CN (1) CN1048072C (de)
AT (1) ATE191826T1 (de)
AU (1) AU6235094A (de)
DE (1) DE69423962T2 (de)
WO (1) WO1994018433A1 (de)

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US5749226A (en) * 1993-02-12 1998-05-12 Ohio University Microminiature stirling cycle cryocoolers and engines
US6230501B1 (en) 1994-04-14 2001-05-15 Promxd Technology, Inc. Ergonomic systems and methods providing intelligent adaptive surfaces and temperature control
US5561984A (en) * 1994-04-14 1996-10-08 Tektronix, Inc. Application of micromechanical machining to cooling of integrated circuits
US5629918A (en) * 1995-01-20 1997-05-13 The Regents Of The University Of California Electromagnetically actuated micromachined flap
US5867991A (en) * 1996-04-03 1999-02-09 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Ferroelectric Stirling-cycle refrigerator
US7320457B2 (en) 1997-02-07 2008-01-22 Sri International Electroactive polymer devices for controlling fluid flow
US5813235A (en) * 1997-02-24 1998-09-29 The State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of Oregon State University Resonantly coupled α-stirling cooler
US6148635A (en) * 1998-10-19 2000-11-21 The Board Of Trustees Of The University Of Illinois Active compressor vapor compression cycle integrated heat transfer device
EP1212800B1 (de) 1999-07-20 2007-12-12 Sri International Elektroaktive Polymergeneratoren
US7537197B2 (en) 1999-07-20 2009-05-26 Sri International Electroactive polymer devices for controlling fluid flow
US6272866B1 (en) * 1999-12-08 2001-08-14 Industrial Technology Research Institute Micro cooling engine array system
US6276313B1 (en) * 1999-12-30 2001-08-21 Honeywell International Inc. Microcombustion engine/generator
JP4264613B2 (ja) * 2000-01-31 2009-05-20 ソニー株式会社 電子機器及びその加熱・冷却方法
JP4329204B2 (ja) * 2000-02-02 2009-09-09 ソニー株式会社 電子機器及びその加熱・冷却方法
WO2001063738A2 (en) * 2000-02-23 2001-08-30 Sri International Electroactive polymer thermal electric generators
EP2290721B1 (de) 2000-02-23 2017-09-20 SRI International Durch Umweltenergie angetriebene elektroaktive Polymergeneratoren
US6332323B1 (en) 2000-02-25 2001-12-25 586925 B.C. Inc. Heat transfer apparatus and method employing active regenerative cycle
US6883337B2 (en) * 2000-06-02 2005-04-26 University Of Florida Research Foundation, Inc. Thermal management device
US6598409B2 (en) 2000-06-02 2003-07-29 University Of Florida Thermal management device
IL137562A (en) * 2000-07-27 2004-06-01 Yeda Res & Dev Miniature thermal device
US7235914B2 (en) 2000-10-25 2007-06-26 Washington State University Research Foundation Piezoelectric micro-transducers, methods of use and manufacturing methods for same
US6460493B2 (en) 2000-12-28 2002-10-08 The United States Of America As Represented By The Secretary Of The Air Force Uniflow scavenging microengine
US6595006B2 (en) 2001-02-13 2003-07-22 Technology Applications, Inc. Miniature reciprocating heat pumps and engines
US6385973B1 (en) 2001-07-12 2002-05-14 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Micro-scalable thermal control device
US6484516B1 (en) 2001-12-07 2002-11-26 Air Products And Chemicals, Inc. Method and system for cryogenic refrigeration
AU2003225913A1 (en) 2002-03-18 2003-10-08 Roy David Kornbluh Electroactive polymer devices for moving fluid
US6827128B2 (en) 2002-05-20 2004-12-07 The Board Of Trustees Of The University Of Illinois Flexible microchannel heat exchanger
US7401472B2 (en) * 2003-01-17 2008-07-22 Tecumseh Products Company Modular heating or cooling system
GB0309191D0 (en) * 2003-04-24 2003-05-28 Oxford Magnet Tech Regenerative heat exchanger
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US6880336B2 (en) * 2003-08-20 2005-04-19 Lockheed Martin Corporation Solid state thermal engine
WO2005020245A2 (en) * 2003-08-22 2005-03-03 The Regents Of The University Of California Conduction cooling of a superconducting cable
KR100524343B1 (ko) * 2003-10-30 2005-10-28 한국과학기술연구원 이중 박막을 갖는 마이크로 시스템용 발전기
US7032400B2 (en) 2004-03-29 2006-04-25 Hussmann Corporation Refrigeration unit having a linear compressor
US7691723B2 (en) 2005-01-07 2010-04-06 Honeywell International Inc. Bonding system having stress control
FR2901320B1 (fr) * 2006-05-17 2008-07-04 Univ Savoie Etablissement Publ Dispositif miniaturise apte a fonctionner comme moteur ou refroidisseur selon un cycle thermodynamique de stirling
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US9195058B2 (en) 2011-03-22 2015-11-24 Parker-Hannifin Corporation Electroactive polymer actuator lenticular system
US8950489B2 (en) * 2011-11-21 2015-02-10 Sondex Wireline Limited Annular disposed stirling heat exchanger
US9876160B2 (en) 2012-03-21 2018-01-23 Parker-Hannifin Corporation Roll-to-roll manufacturing processes for producing self-healing electroactive polymer devices
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US10890385B2 (en) 2016-01-21 2021-01-12 Etalim Inc. Apparatus and system for exchanging heat with a fluid
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Also Published As

Publication number Publication date
DE69423962T2 (de) 2000-12-07
CN1103928A (zh) 1995-06-21
EP0685144B1 (de) 2000-04-12
CN1048072C (zh) 2000-01-05
EP0685144A4 (de) 1996-01-24
WO1994018433A1 (en) 1994-08-18
EP0685144A1 (de) 1995-12-06
ATE191826T1 (de) 2000-04-15
AU6235094A (en) 1994-08-29
US5457956A (en) 1995-10-17
JPH08507597A (ja) 1996-08-13

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee