DE69413069T2 - Kompensation für sensor mit resonant schwingendem integriertem mikrobalken - Google Patents

Kompensation für sensor mit resonant schwingendem integriertem mikrobalken

Info

Publication number
DE69413069T2
DE69413069T2 DE69413069T DE69413069T DE69413069T2 DE 69413069 T2 DE69413069 T2 DE 69413069T2 DE 69413069 T DE69413069 T DE 69413069T DE 69413069 T DE69413069 T DE 69413069T DE 69413069 T2 DE69413069 T2 DE 69413069T2
Authority
DE
Germany
Prior art keywords
microbalk
compensation
sensor
resonant
integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69413069T
Other languages
English (en)
Other versions
DE69413069D1 (de
Inventor
David Burns
J Zook
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell Inc
Original Assignee
Honeywell Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Inc filed Critical Honeywell Inc
Application granted granted Critical
Publication of DE69413069D1 publication Critical patent/DE69413069D1/de
Publication of DE69413069T2 publication Critical patent/DE69413069T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D3/00—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
    • G01D3/028—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure
    • G01D3/036—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure on measuring arrangements themselves
    • G01D3/0365—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure on measuring arrangements themselves the undesired influence being measured using a separate sensor, which produces an influence related signal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0019—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a semiconductive element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/006—Details of instruments used for thermal compensation
DE69413069T 1993-07-20 1994-07-19 Kompensation für sensor mit resonant schwingendem integriertem mikrobalken Expired - Fee Related DE69413069T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/094,785 US5458000A (en) 1993-07-20 1993-07-20 Static pressure compensation of resonant integrated microbeam sensors
PCT/US1994/008066 WO1995003533A2 (en) 1993-07-20 1994-07-19 Static pressure compensation of resonant integrated microbeam sensors

Publications (2)

Publication Number Publication Date
DE69413069D1 DE69413069D1 (de) 1998-10-08
DE69413069T2 true DE69413069T2 (de) 1999-03-18

Family

ID=22247154

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69413069T Expired - Fee Related DE69413069T2 (de) 1993-07-20 1994-07-19 Kompensation für sensor mit resonant schwingendem integriertem mikrobalken

Country Status (7)

Country Link
US (1) US5458000A (de)
EP (1) EP0740781B1 (de)
JP (1) JP3616095B2 (de)
AU (1) AU677434B2 (de)
CA (1) CA2157909C (de)
DE (1) DE69413069T2 (de)
WO (1) WO1995003533A2 (de)

Families Citing this family (53)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9524624D0 (en) * 1995-12-01 1996-01-31 Weston Aerospace Ltd Pressure sensor
US5772322A (en) * 1996-05-31 1998-06-30 Honeywell Inc. Resonant microbeam temperature sensor
WO1998001731A1 (en) * 1996-07-10 1998-01-15 Honeywell Data Instruments, Inc. Pressure transducer with error compensation
IT1287123B1 (it) * 1996-10-31 1998-08-04 Abb Kent Taylor Spa Dispositivo per la misura di una pressione
US5808210A (en) * 1996-12-31 1998-09-15 Honeywell Inc. Thin film resonant microbeam absolute pressure sensor
US5747705A (en) * 1996-12-31 1998-05-05 Honeywell Inc. Method for making a thin film resonant microbeam absolute
US6408496B1 (en) 1997-07-09 2002-06-25 Ronald S. Maynard Method of manufacturing a vibrational transducer
US6031944A (en) * 1997-12-30 2000-02-29 Honeywell Inc. High temperature resonant integrated microstructure sensor
EP1164378B1 (de) * 2000-06-16 2012-03-14 Infineon Technologies AG Beschleunigungsaufnehmer
US6662647B2 (en) 2001-01-09 2003-12-16 Honeywell International Inc. Conformal fluid data sensor
US6575026B1 (en) 2002-06-28 2003-06-10 Eastman Kodak Company Measuring absolute static pressure at one or more positions along a microfluidic device
US6865944B2 (en) * 2002-12-16 2005-03-15 Honeywell International Inc. Methods and systems for decelerating proof mass movements within MEMS structures
US6817244B2 (en) * 2003-01-06 2004-11-16 Honeywell International Inc. Methods and systems for actively controlling movement within MEMS structures
US6718825B1 (en) 2003-01-17 2004-04-13 Honeywell International Inc. Methods and systems for reducing stick-down within MEMS structures
US6978673B2 (en) * 2003-02-07 2005-12-27 Honeywell International, Inc. Methods and systems for simultaneously fabricating multi-frequency MEMS devices
US6860151B2 (en) * 2003-02-07 2005-03-01 Honeywell International Inc. Methods and systems for controlling movement within MEMS structures
FR2851659B1 (fr) * 2003-02-24 2005-06-24 Sagem Capteur vibrant a ecran radiatif
US6843121B1 (en) 2003-08-25 2005-01-18 Eastman Kodak Company Measuring absolute static pressure at one or more positions along a microfluidic device
US7443509B1 (en) 2004-12-12 2008-10-28 Burns David W Optical and electronic interface for optically coupled resonators
US7499604B1 (en) 2004-12-12 2009-03-03 Burns David W Optically coupled resonant pressure sensor and process
US7176048B1 (en) 2004-12-12 2007-02-13 Burns David W Optically coupled sealed-cavity resonator and process
US7379629B1 (en) 2004-12-12 2008-05-27 Burns David W Optically coupled resonant pressure sensor
US7605391B2 (en) * 2004-12-12 2009-10-20 Burns David W Optically coupled resonator
US7017418B1 (en) * 2004-12-15 2006-03-28 General Electric Company System and method for sensing pressure
FR2888930B1 (fr) * 2004-12-27 2007-08-31 Thales Sa Dispositfi de mesure a resonateur et procede mettant en oeuvre le dispositif
JP2006228776A (ja) * 2005-02-15 2006-08-31 Advantest Corp 荷電粒子ビーム露光装置及び荷電粒子ビーム露光方法
US7042230B1 (en) 2005-02-28 2006-05-09 Alain Izadnegahdar Multi-parameter sensing system
JP3969442B2 (ja) * 2005-09-26 2007-09-05 エプソントヨコム株式会社 圧力センサ
US7663295B2 (en) * 2005-12-15 2010-02-16 Imec Method and system for measuring physical parameters with a piezoelectric bimorph cantilever in a gaseous or liquid environment
US20070163346A1 (en) * 2006-01-18 2007-07-19 Honeywell International Inc. Frequency shifting of rotational harmonics in mems devices
US8011247B2 (en) * 2008-06-26 2011-09-06 Honeywell International Inc. Multistage proof-mass movement deceleration within MEMS structures
US8187902B2 (en) 2008-07-09 2012-05-29 The Charles Stark Draper Laboratory, Inc. High performance sensors and methods for forming the same
JP5227729B2 (ja) * 2008-10-07 2013-07-03 アズビル株式会社 圧力センサ
CN101551403B (zh) * 2009-05-22 2012-09-05 中国科学院上海微系统与信息技术研究所 一种测试加速度,压力和温度的集成硅芯片及制作方法
CN102575965B (zh) * 2009-09-29 2015-02-04 Abb技术有限公司 用于测量工艺流体的压力的压力变送器以及相关方法
US9121771B2 (en) 2010-03-16 2015-09-01 The Penn State Research Foundation Methods and apparatus for ultra-sensitive temperature detection using resonant devices
JP2012118057A (ja) * 2010-11-10 2012-06-21 Panasonic Corp 圧力センサ
FR2977319B1 (fr) * 2011-07-01 2014-03-14 Commissariat Energie Atomique Dispositif de mesure de pression a sensiblite optimisee
FR2992418B1 (fr) * 2012-06-22 2014-08-01 Thales Sa Capteur a element vibrant dans une cavite, a detection integree d anomalies
EP2693183A1 (de) * 2012-08-01 2014-02-05 Honeywell International Inc. Resonanzbeschleunigungs- und Drucksensor auf einem Chip
JP2016102649A (ja) * 2013-03-08 2016-06-02 パナソニック株式会社 歪検出装置
EP3092499B1 (de) * 2013-12-30 2018-10-31 Robert Bosch GmbH Robuste trägheitssensoren
JP6044607B2 (ja) 2014-08-28 2016-12-14 横河電機株式会社 振動式センサ装置
US9689888B2 (en) * 2014-11-14 2017-06-27 Honeywell International Inc. In-plane vibrating beam accelerometer
US10823754B2 (en) * 2014-11-14 2020-11-03 Honeywell International Inc. Accelerometer with strain compensation
FR3030036B1 (fr) * 2014-12-16 2016-12-09 Commissariat Energie Atomique Capteur d'efforts resonant multidimensionnel.
EP3056865B1 (de) * 2015-02-13 2019-09-04 Sensirion AG Sensorenanordnung
JP6653479B2 (ja) * 2015-07-07 2020-02-26 パナソニックＩｐマネジメント株式会社 慣性力センサ
US10036765B2 (en) * 2015-07-10 2018-07-31 Honeywell International Inc. Reducing hysteresis effects in an accelerometer
DE102015222756A1 (de) * 2015-11-18 2017-05-18 Robert Bosch Gmbh Sensorelement für einen Drucksensor
WO2018155057A1 (ja) * 2017-02-21 2018-08-30 日立オートモティブシステムズ株式会社 センサ装置
CN107894295A (zh) * 2017-12-22 2018-04-10 北京中航兴盛测控技术有限公司 一种薄膜扭矩传感器芯片及制造方法
CN112611501B (zh) * 2020-12-30 2022-03-04 中国科学院空天信息创新研究院 一种谐振式差压传感器和补偿方法

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3888115A (en) * 1973-03-30 1975-06-10 Texas Instruments Inc Strain sensor
US4049997A (en) * 1976-02-27 1977-09-20 E. I. Du Pont De Nemours And Company Drive for dynamic mechanical system
US4127110A (en) * 1976-05-24 1978-11-28 Huntington Institute Of Applied Medical Research Implantable pressure transducer
US4175243A (en) * 1977-11-17 1979-11-20 Corbett James P Temperature compensated oscillating crystal force transducer systems
US4372164A (en) * 1980-06-02 1983-02-08 The Foxboro Company Industrial process control instrument employing a resonant sensor
US4444055A (en) * 1981-07-20 1984-04-24 Hayati Balkanli Compensating transducer digitizer
US4439705A (en) * 1981-12-08 1984-03-27 Corbett James P Oscillating crystal transducer systems with symmetrical temperature compensator
US4598381A (en) * 1983-03-24 1986-07-01 Rosemount Inc. Pressure compensated differential pressure sensor and method
US4535638A (en) * 1983-10-03 1985-08-20 Quartztronics, Inc. Resonator transducer system with temperature compensation
JPS6184535A (ja) * 1984-10-03 1986-04-30 Seiko Instr & Electronics Ltd 水晶式気体圧力計
US4765188A (en) * 1986-11-24 1988-08-23 Bourns Instruments, Inc. Pressure transducer with integral digital temperature compensation
US5165289A (en) * 1990-07-10 1992-11-24 Johnson Service Company Resonant mechanical sensor
US5101664A (en) * 1990-10-15 1992-04-07 United Technologies Corporation Optical pressure transducer
DE4039846A1 (de) * 1990-12-13 1992-06-17 Siemens Ag Mikromechanischer resonanter sensor und verfahren zu seiner herstellung
US5186053A (en) * 1990-12-19 1993-02-16 New Sd, Inc. Temperature compensated proofmass assembly for accelerometers
US5233874A (en) * 1991-08-19 1993-08-10 General Motors Corporation Active microaccelerometer
US5275055A (en) * 1992-08-31 1994-01-04 Honeywell Inc. Resonant gauge with microbeam driven in constant electric field
US5339698A (en) * 1993-06-07 1994-08-23 Alliedsignal Inc. Vibrating beam force transducer with automatic adjustment of its electromagnetic drive

Also Published As

Publication number Publication date
AU677434B2 (en) 1997-04-24
CA2157909C (en) 2005-08-30
US5458000A (en) 1995-10-17
WO1995003533A2 (en) 1995-02-02
EP0740781A1 (de) 1996-11-06
DE69413069D1 (de) 1998-10-08
CA2157909A1 (en) 1995-02-02
WO1995003533A3 (en) 1995-03-16
AU7713994A (en) 1995-02-20
JPH09500726A (ja) 1997-01-21
EP0740781B1 (de) 1998-09-02
JP3616095B2 (ja) 2005-02-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee