DE69409555D1 - Turbomolecular pump - Google Patents

Turbomolecular pump

Info

Publication number
DE69409555D1
DE69409555D1 DE69409555T DE69409555T DE69409555D1 DE 69409555 D1 DE69409555 D1 DE 69409555D1 DE 69409555 T DE69409555 T DE 69409555T DE 69409555 T DE69409555 T DE 69409555T DE 69409555 D1 DE69409555 D1 DE 69409555D1
Authority
DE
Germany
Prior art keywords
turbomolecular pump
turbomolecular
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69409555T
Other languages
German (de)
Other versions
DE69409555T2 (en
Inventor
Takeshi Jinbo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP5002845A external-priority patent/JP2656199B2/en
Priority claimed from JP5002843A external-priority patent/JP2568364B2/en
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of DE69409555D1 publication Critical patent/DE69409555D1/en
Application granted granted Critical
Publication of DE69409555T2 publication Critical patent/DE69409555T2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE1994609555 1993-01-11 1994-01-11 Turbomolecular pump Expired - Fee Related DE69409555T2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP5002845A JP2656199B2 (en) 1993-01-11 1993-01-11 Opening method of vacuum chamber and PVD apparatus
JP5002843A JP2568364B2 (en) 1993-01-11 1993-01-11 Turbo pump with trap panel

Publications (2)

Publication Number Publication Date
DE69409555D1 true DE69409555D1 (en) 1998-05-20
DE69409555T2 DE69409555T2 (en) 1998-12-03

Family

ID=26336317

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1994609555 Expired - Fee Related DE69409555T2 (en) 1993-01-11 1994-01-11 Turbomolecular pump

Country Status (2)

Country Link
EP (1) EP0610666B1 (en)
DE (1) DE69409555T2 (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5483803A (en) * 1993-06-16 1996-01-16 Helix Technology Corporation High conductance water pump
FR2723987A1 (en) * 1994-08-23 1996-03-01 Commissariat Energie Atomique Cryo-mechanical multistage axial-flow vacuum pump for light gas
FR2739574B1 (en) * 1995-10-04 1997-11-14 Cit Alcatel SECONDARY PUMPING GROUP
IT1287016B1 (en) * 1996-07-18 1998-07-24 Varian Spa VACUUM PUMP.
US5901558A (en) * 1997-08-20 1999-05-11 Helix Technology Corporation Water pump with integral gate valve
US5887438A (en) * 1997-08-20 1999-03-30 Helix Technology Corporation Low profile in line cryogenic water pump
DE102004005415B3 (en) * 2003-12-19 2005-05-25 Universität Regensburg Cryogenic vacuum pump for generating high vacuum, especially within a vacuum chamber, comprises an additional cooling device that is spatially assigned and thermally connected to a cooling stage
US7927066B2 (en) * 2005-03-02 2011-04-19 Tokyo Electron Limited Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component
KR101063398B1 (en) 2009-12-01 2011-09-07 기아자동차주식회사 Washer pump device with washer liquid heating function
GB2584160A (en) * 2019-05-24 2020-11-25 Edwards Ltd Vacuum assembly and vacuum pump with an axial through passage
WO2020239975A1 (en) * 2019-05-29 2020-12-03 Edwards Limited A turbomolecular pump, a vacuum pumping system and a method of evacuating a vacuum chamber
FR3118651B1 (en) 2021-01-06 2023-03-31 Pfeiffer Vacuum Heating device and turbomolecular vacuum pump
CN117846986A (en) * 2024-01-02 2024-04-09 北京中科科仪股份有限公司 Molecular pump

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3625019A (en) * 1969-10-27 1971-12-07 Sargent Welch Scientific Co Vacuum pump with demountable cold trap and getter pump
DE3512614A1 (en) * 1985-04-06 1986-10-16 Leybold-Heraeus GmbH, 5000 Köln METHOD FOR COMMISSIONING AND / OR REGENERATING A CRYOPUM PUMP AND CYRUM PUMP SUITABLE FOR THIS METHOD
US4926648A (en) * 1988-03-07 1990-05-22 Toshiba Corp. Turbomolecular pump and method of operating the same
JPH01253590A (en) * 1988-03-31 1989-10-09 Aisin Seiki Co Ltd High-vacuum pump
JP2538796B2 (en) * 1989-05-09 1996-10-02 株式会社東芝 Vacuum exhaust device and vacuum exhaust method

Also Published As

Publication number Publication date
DE69409555T2 (en) 1998-12-03
EP0610666B1 (en) 1998-04-15
EP0610666A1 (en) 1994-08-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee