DE69408699D1 - SiO2 Elektret und Verfahren zu dessen Herstellung - Google Patents

SiO2 Elektret und Verfahren zu dessen Herstellung

Info

Publication number
DE69408699D1
DE69408699D1 DE69408699T DE69408699T DE69408699D1 DE 69408699 D1 DE69408699 D1 DE 69408699D1 DE 69408699 T DE69408699 T DE 69408699T DE 69408699 T DE69408699 T DE 69408699T DE 69408699 D1 DE69408699 D1 DE 69408699D1
Authority
DE
Germany
Prior art keywords
electret
sio2
production
sio2 electret
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69408699T
Other languages
English (en)
Other versions
DE69408699T2 (de
Inventor
Jacques Lewiner
Dider Perino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of DE69408699D1 publication Critical patent/DE69408699D1/de
Application granted granted Critical
Publication of DE69408699T2 publication Critical patent/DE69408699T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G7/00—Capacitors in which the capacitance is varied by non-mechanical means; Processes of their manufacture
    • H01G7/02—Electrets, i.e. having a permanently-polarised dielectric
    • H01G7/025—Electrets, i.e. having a permanently-polarised dielectric having an inorganic dielectric

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Chemical Vapour Deposition (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)
  • Physical Vapour Deposition (AREA)
DE69408699T 1993-01-14 1994-01-12 SiO2 Elektret und Verfahren zu dessen Herstellung Expired - Fee Related DE69408699T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9300297A FR2700414B1 (fr) 1993-01-14 1993-01-14 Perfectionnements apportés aux procédés de fabrication des électrets en SiO2 et aux électrets obtenus.

Publications (2)

Publication Number Publication Date
DE69408699D1 true DE69408699D1 (de) 1998-04-09
DE69408699T2 DE69408699T2 (de) 1998-10-22

Family

ID=9443023

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69408699T Expired - Fee Related DE69408699T2 (de) 1993-01-14 1994-01-12 SiO2 Elektret und Verfahren zu dessen Herstellung

Country Status (6)

Country Link
US (1) US5486423A (de)
EP (1) EP0608162B1 (de)
JP (1) JP3483285B2 (de)
CA (1) CA2113048C (de)
DE (1) DE69408699T2 (de)
FR (1) FR2700414B1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4697763B2 (ja) * 2001-07-31 2011-06-08 パナソニック株式会社 コンデンサマイクロホン
KR100469885B1 (ko) * 2002-07-30 2005-02-02 주식회사 비에스이 반도체 백-일렉트릿의 제조방법
KR100699441B1 (ko) 2005-03-07 2007-03-28 주식회사 씨에스티 콘덴서 마이크로폰용 백 일렉트렛 및 그 제조방법
DE202009014001U1 (de) 2009-10-15 2010-03-18 Bolst, Klaus, Dr.-Ing. Filtersystem bestehend aus einem Elektretfilter und einer vorgeschalteten Ionisationseinheit zur Erhöhung der Leistung des Elektretfilters und Verlängerung der Standzeit dessen bezüglich seiner elektrischen und elektrostatischen Eigenschaften
FR2954626B1 (fr) 2009-12-23 2013-12-06 Commissariat Energie Atomique Resonateur acoustique comprenant un electret, et procede de fabrication de ce resonateur, application aux filtres commutables a resonateurs couples
JP5627130B2 (ja) 2012-08-30 2014-11-19 アオイ電子株式会社 正イオンを含有したエレクトレットの形成方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5068124A (en) * 1989-11-17 1991-11-26 International Business Machines Corporation Method for depositing high quality silicon dioxide by pecvd

Also Published As

Publication number Publication date
EP0608162A1 (de) 1994-07-27
EP0608162B1 (de) 1998-03-04
JP3483285B2 (ja) 2004-01-06
CA2113048A1 (en) 1994-07-15
US5486423A (en) 1996-01-23
JPH06316766A (ja) 1994-11-15
FR2700414A1 (fr) 1994-07-13
DE69408699T2 (de) 1998-10-22
FR2700414B1 (fr) 1995-03-17
CA2113048C (en) 2001-08-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee