DE69405924D1 - Verfahren zur Herstellung eines Siliziumkörper enthaltenden Gegenstands - Google Patents

Verfahren zur Herstellung eines Siliziumkörper enthaltenden Gegenstands

Info

Publication number
DE69405924D1
DE69405924D1 DE69405924T DE69405924T DE69405924D1 DE 69405924 D1 DE69405924 D1 DE 69405924D1 DE 69405924 T DE69405924 T DE 69405924T DE 69405924 T DE69405924 T DE 69405924T DE 69405924 D1 DE69405924 D1 DE 69405924D1
Authority
DE
Germany
Prior art keywords
producing
containing silicon
article containing
silicon body
article
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69405924T
Other languages
English (en)
Other versions
DE69405924T2 (de
Inventor
Jason Oliver Fiering
Barry Miller
Joseph Shmulovich
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
AT&T Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AT&T Corp filed Critical AT&T Corp
Publication of DE69405924D1 publication Critical patent/DE69405924D1/de
Application granted granted Critical
Publication of DE69405924T2 publication Critical patent/DE69405924T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/3063—Electrolytic etching
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49169—Assembling electrical component directly to terminal or elongated conductor

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Weting (AREA)
DE69405924T 1993-06-29 1994-06-22 Verfahren zur Herstellung eines Siliziumkörper enthaltenden Gegenstands Expired - Fee Related DE69405924T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/084,689 US5391269A (en) 1993-06-29 1993-06-29 Method of making an article comprising a silicon body

Publications (2)

Publication Number Publication Date
DE69405924D1 true DE69405924D1 (de) 1997-11-06
DE69405924T2 DE69405924T2 (de) 1998-04-09

Family

ID=22186612

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69405924T Expired - Fee Related DE69405924T2 (de) 1993-06-29 1994-06-22 Verfahren zur Herstellung eines Siliziumkörper enthaltenden Gegenstands

Country Status (4)

Country Link
US (1) US5391269A (de)
EP (1) EP0632487B1 (de)
JP (1) JP3162910B2 (de)
DE (1) DE69405924T2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5890745A (en) * 1997-01-29 1999-04-06 The Board Of Trustees Of The Leland Stanford Junior University Micromachined fluidic coupler
US6103095A (en) * 1998-02-27 2000-08-15 Candescent Technologies Corporation Non-hazardous wet etching method
US6312581B1 (en) 1999-11-30 2001-11-06 Agere Systems Optoelectronics Guardian Corp. Process for fabricating an optical device
KR100442615B1 (ko) * 2002-03-05 2004-08-02 삼성전자주식회사 정전용량 감소를 위한 적층구조 및 그 제조방법
US20060108672A1 (en) * 2004-11-24 2006-05-25 Brennan John M Die bonded device and method for transistor packages
US7852615B2 (en) * 2008-01-22 2010-12-14 Avx Corporation Electrolytic capacitor anode treated with an organometallic compound
US7768773B2 (en) * 2008-01-22 2010-08-03 Avx Corporation Sintered anode pellet etched with an organic acid for use in an electrolytic capacitor
US7760488B2 (en) * 2008-01-22 2010-07-20 Avx Corporation Sintered anode pellet treated with a surfactant for use in an electrolytic capacitor
US10399166B2 (en) 2015-10-30 2019-09-03 General Electric Company System and method for machining workpiece of lattice structure and article machined therefrom

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4765865A (en) * 1987-05-04 1988-08-23 Ford Motor Company Silicon etch rate enhancement
US5179609A (en) * 1991-08-30 1993-01-12 At&T Bell Laboratories Optical assembly including fiber attachment

Also Published As

Publication number Publication date
EP0632487B1 (de) 1997-10-01
JP3162910B2 (ja) 2001-05-08
JPH07321087A (ja) 1995-12-08
US5391269A (en) 1995-02-21
EP0632487A3 (de) 1996-06-26
EP0632487A2 (de) 1995-01-04
DE69405924T2 (de) 1998-04-09

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee