DE69400103D1 - Verfahren und Vorrichtung zur Überwachung des Borgehalts in Borophosphosilikat - Google Patents

Verfahren und Vorrichtung zur Überwachung des Borgehalts in Borophosphosilikat

Info

Publication number
DE69400103D1
DE69400103D1 DE69400103T DE69400103T DE69400103D1 DE 69400103 D1 DE69400103 D1 DE 69400103D1 DE 69400103 T DE69400103 T DE 69400103T DE 69400103 T DE69400103 T DE 69400103T DE 69400103 D1 DE69400103 D1 DE 69400103D1
Authority
DE
Germany
Prior art keywords
borophosphosilicate
monitoring
boron content
boron
content
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69400103T
Other languages
English (en)
Other versions
DE69400103T2 (de
Inventor
Alain Yves Pierre Charpentier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Matra MHS SA
Original Assignee
Matra MHS SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matra MHS SA filed Critical Matra MHS SA
Publication of DE69400103D1 publication Critical patent/DE69400103D1/de
Application granted granted Critical
Publication of DE69400103T2 publication Critical patent/DE69400103T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/11—Automated chemical analysis
    • Y10T436/117497—Automated chemical analysis with a continuously flowing sample or carrier stream
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/11—Automated chemical analysis
    • Y10T436/117497—Automated chemical analysis with a continuously flowing sample or carrier stream
    • Y10T436/118339—Automated chemical analysis with a continuously flowing sample or carrier stream with formation of a segmented stream
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/22—Hydrogen, per se

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Formation Of Insulating Films (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
DE69400103T 1993-04-06 1994-04-01 Verfahren und Vorrichtung zur Überwachung des Borgehalts in Borophosphosilikat Expired - Fee Related DE69400103T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9304069A FR2703797B1 (fr) 1993-04-06 1993-04-06 Procede et dispositif de controle de la teneur en bore de borophosphosilicate.

Publications (2)

Publication Number Publication Date
DE69400103D1 true DE69400103D1 (de) 1996-04-25
DE69400103T2 DE69400103T2 (de) 1996-08-22

Family

ID=9445808

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69400103T Expired - Fee Related DE69400103T2 (de) 1993-04-06 1994-04-01 Verfahren und Vorrichtung zur Überwachung des Borgehalts in Borophosphosilikat

Country Status (4)

Country Link
US (2) US5441893A (de)
EP (1) EP0619385B1 (de)
DE (1) DE69400103T2 (de)
FR (1) FR2703797B1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100453658B1 (ko) * 1998-01-08 2004-12-17 삼성전자주식회사 엑스피에스를 이용한 비피에스지 막질의 농도 분석 방법 및 그를 위한 프로그램을 저장한 기록매체
DE10115750B4 (de) * 2001-03-20 2017-05-24 Robert Bosch Gmbh Verfahren und Vorrichtung zur Steuerung und/oder Diagnose eines einen Massenstrom beeinflussenden Steuersystems
US7142987B2 (en) * 2001-11-07 2006-11-28 Genvault Corporation Apparatus, system, and method of archival and retrieval of samples
US7682557B2 (en) * 2006-12-15 2010-03-23 Smith International, Inc. Multiple processes of high pressures and temperatures for sintered bodies

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4226898A (en) * 1978-03-16 1980-10-07 Energy Conversion Devices, Inc. Amorphous semiconductors equivalent to crystalline semiconductors produced by a glow discharge process
JPS5933532B2 (ja) * 1981-04-03 1984-08-16 スタンレー電気株式会社 非晶質シリコンの形成方法
US4369031A (en) * 1981-09-15 1983-01-18 Thermco Products Corporation Gas control system for chemical vapor deposition system
US4379943A (en) * 1981-12-14 1983-04-12 Energy Conversion Devices, Inc. Current enhanced photovoltaic device
US4532196A (en) * 1982-01-25 1985-07-30 Stanley Electric Co., Ltd. Amorphous silicon photoreceptor with nitrogen and boron
AU1760483A (en) * 1982-08-05 1984-02-09 Treloar, W.J. And Sons Pty. Ltd. Resonant sensor for distinguishing fluids
US4557950A (en) * 1984-05-18 1985-12-10 Thermco Systems, Inc. Process for deposition of borophosphosilicate glass
EP0204182B1 (de) * 1985-05-22 1991-06-05 Siemens Aktiengesellschaft Verfahren zum Herstellen von mit Bor und Phosphor dotierten Siliziumoxid-Schichten für integrierte Halbleiterschaltungen
US4845043A (en) * 1987-04-23 1989-07-04 Catalano Anthony W Method for fabricating photovoltaic device having improved short wavelength photoresponse
US5200043A (en) * 1989-11-08 1993-04-06 Mitsui Toatsu Chemicals, Inc. Method for treating waste gas
JP2643529B2 (ja) * 1990-04-06 1997-08-20 日本電気株式会社 ガスソース分子線エピタキシャル成長装置
DE4035032C1 (de) * 1990-11-03 1992-04-30 Degussa Ag, 6000 Frankfurt, De
US5231047A (en) * 1991-12-19 1993-07-27 Energy Conversion Devices, Inc. High quality photovoltaic semiconductor material and laser ablation method of fabrication same

Also Published As

Publication number Publication date
US5468642A (en) 1995-11-21
FR2703797B1 (fr) 1995-06-23
EP0619385A1 (de) 1994-10-12
US5441893A (en) 1995-08-15
EP0619385B1 (de) 1996-03-20
DE69400103T2 (de) 1996-08-22
FR2703797A1 (fr) 1994-10-14

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DE69400103D1 (de) Verfahren und Vorrichtung zur Überwachung des Borgehalts in Borophosphosilikat

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee