DE69326199D1 - Gassensor und seine herstellung - Google Patents

Gassensor und seine herstellung

Info

Publication number
DE69326199D1
DE69326199D1 DE69326199T DE69326199T DE69326199D1 DE 69326199 D1 DE69326199 D1 DE 69326199D1 DE 69326199 T DE69326199 T DE 69326199T DE 69326199 T DE69326199 T DE 69326199T DE 69326199 D1 DE69326199 D1 DE 69326199D1
Authority
DE
Germany
Prior art keywords
production
gas sensor
sensor
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69326199T
Other languages
English (en)
Other versions
DE69326199T2 (de
Inventor
Hiroaki - - Yanagida
Kazuhisa - Hasumi
Kentaro - - Nagano
Shuuichi - - Kamiyama
Osamu - - Okada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mikuni Corp
Osaka Gas Co Ltd
Original Assignee
Mikuni Corp
Osaka Gas Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mikuni Corp, Osaka Gas Co Ltd filed Critical Mikuni Corp
Publication of DE69326199D1 publication Critical patent/DE69326199D1/de
Application granted granted Critical
Publication of DE69326199T2 publication Critical patent/DE69326199T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
DE69326199T 1992-01-10 1993-01-08 Gassensor und seine herstellung Expired - Fee Related DE69326199T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP329492 1992-01-10
PCT/JP1993/000012 WO1993014396A1 (en) 1992-01-10 1993-01-08 Gas sensor and its manufacture

Publications (2)

Publication Number Publication Date
DE69326199D1 true DE69326199D1 (de) 1999-10-07
DE69326199T2 DE69326199T2 (de) 2000-03-23

Family

ID=11553365

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69326199T Expired - Fee Related DE69326199T2 (de) 1992-01-10 1993-01-08 Gassensor und seine herstellung

Country Status (6)

Country Link
US (1) US5618496A (de)
EP (2) EP0575628B1 (de)
JP (2) JP3081399B2 (de)
KR (1) KR100253633B1 (de)
DE (1) DE69326199T2 (de)
WO (1) WO1993014396A1 (de)

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU7536094A (en) * 1993-08-13 1995-03-14 Andre De Haan Process for manufacturing a semiconductor element and gas detector provided with such an element
WO1995010039A1 (fr) * 1993-10-05 1995-04-13 Mitsubishi Materials Corporation Detecteur de gaz et procede permettant de faire la distinction entre plusieurs gas
DE4432729C1 (de) * 1994-09-14 1996-04-11 Siemens Ag Gassensor
DE4433102A1 (de) * 1994-09-16 1996-03-21 Fraunhofer Ges Forschung Elektrodenanordnung zur Signalerfassung gassensitiver Schichten
DE4437692A1 (de) * 1994-10-21 1996-04-25 Fraunhofer Ges Forschung Kohlendioxid-Sensor
DE4445359A1 (de) * 1994-12-20 1996-06-27 Bosch Gmbh Robert Sensor zum Nachweis von brennbaren Gasen
US5841021A (en) * 1995-09-05 1998-11-24 De Castro; Emory S. Solid state gas sensor and filter assembly
TW338795B (en) * 1996-02-21 1998-08-21 Osaka Gas Co Ltd Method of manufacturing nitrogen oxide sensor and nitrogen oxide sensor manufactured by the method and material therefor
US6251344B1 (en) 1997-06-27 2001-06-26 Quantum Group, Inc. Air quality chamber: relative humidity and contamination controlled systems
DE19819575C1 (de) * 1998-04-30 2000-03-16 Siemens Ag Wasserstoffsensor
KR100305660B1 (ko) 1999-02-09 2001-09-26 김희용 이중이온빔법을 이용하여 ＣｕＯ를 첨가한 황화합물계 가스 센서
US6181250B1 (en) * 1999-03-30 2001-01-30 Southeastern Universities Research Assn., Inc. Heat detection system and method
US6237397B1 (en) * 1999-10-06 2001-05-29 Iowa State University Research Foundation, Inc. Chemical sensor and coating for same
AU2002211746A1 (en) * 2000-10-16 2002-04-29 E.I. Dupont De Nemours And Company Method and apparatus for analyzing mixtures of gases
US8154093B2 (en) 2002-01-16 2012-04-10 Nanomix, Inc. Nano-electronic sensors for chemical and biological analytes, including capacitance and bio-membrane devices
US8152991B2 (en) 2005-10-27 2012-04-10 Nanomix, Inc. Ammonia nanosensors, and environmental control system
US7522040B2 (en) * 2004-04-20 2009-04-21 Nanomix, Inc. Remotely communicating, battery-powered nanostructure sensor devices
US20050129573A1 (en) * 2003-09-12 2005-06-16 Nanomix, Inc. Carbon dioxide nanoelectronic sensor
US7547931B2 (en) * 2003-09-05 2009-06-16 Nanomix, Inc. Nanoelectronic capnometer adaptor including a nanoelectric sensor selectively sensitive to at least one gaseous constituent of exhaled breath
US20070048180A1 (en) * 2002-09-05 2007-03-01 Gabriel Jean-Christophe P Nanoelectronic breath analyzer and asthma monitor
US7714398B2 (en) * 2002-09-05 2010-05-11 Nanomix, Inc. Nanoelectronic measurement system for physiologic gases and improved nanosensor for carbon dioxide
US20070048181A1 (en) * 2002-09-05 2007-03-01 Chang Daniel M Carbon dioxide nanosensor, and respiratory CO2 monitors
US6627959B1 (en) * 2002-04-16 2003-09-30 Boston Microsystems, Inc. P-n junction sensor
US7948041B2 (en) 2005-05-19 2011-05-24 Nanomix, Inc. Sensor having a thin-film inhibition layer
US20060263255A1 (en) * 2002-09-04 2006-11-23 Tzong-Ru Han Nanoelectronic sensor system and hydrogen-sensitive functionalization
US20070114573A1 (en) * 2002-09-04 2007-05-24 Tzong-Ru Han Sensor device with heated nanostructure
US6763699B1 (en) 2003-02-06 2004-07-20 The United States Of America As Represented By The Administrator Of Natural Aeronautics And Space Administration Gas sensors using SiC semiconductors and method of fabrication thereof
WO2005062031A1 (en) * 2003-09-05 2005-07-07 Nanomix, Inc. Nanoelectronic capnometer adapter
US8234906B2 (en) * 2006-10-19 2012-08-07 Societe de Chimie Inorganique et Organique en abrege “Sochinor” Sensor for gases emitted by combustion
KR101031209B1 (ko) * 2008-11-27 2011-04-26 한국세라믹기술원 세라믹 가스센서 및 그 제조방법
CN102471051B (zh) 2009-08-07 2014-06-11 纳诺米克斯公司 基于磁性碳纳米管的生物检测
US9134265B2 (en) 2009-11-05 2015-09-15 Kake Educational Institution Gas sensitive material comprising microcrystalline selenium and gas sensor using same
CN102520018A (zh) * 2011-12-12 2012-06-27 中国科学院合肥物质科学研究院 基于半导体氧化物敏感的集成化二氧化碳传感器
JP6228414B2 (ja) * 2012-09-20 2017-11-08 積水化学工業株式会社 複合膜の製造方法
EP2801819A1 (de) * 2013-05-08 2014-11-12 Sensirion AG Metalloxid-chemischer Sensor für tragbare Vorrichtung
WO2015029541A1 (ja) * 2013-08-30 2015-03-05 株式会社村田製作所 ガスセンサ、ガスセンサの製造方法、及びガス濃度の検出方法
KR101760212B1 (ko) * 2016-06-14 2017-07-21 전남대학교산학협력단 가스센서 및 이의 제조방법
CN108426921B (zh) * 2017-02-13 2021-04-06 华邦电子股份有限公司 气体传感器
JP7384399B2 (ja) * 2020-02-26 2023-11-21 国立大学法人京都大学 測定装置及び測定方法
TWI729724B (zh) * 2020-03-10 2021-06-01 新唐科技股份有限公司 氣體感測器
CN114791445B (zh) * 2022-04-28 2024-08-23 电子科技大学中山学院 一种贵金属修饰复合型气体传感器

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4209477A (en) * 1975-08-20 1980-06-24 Mitsubishi Mining & Cement Co., Ltd. Process for preparing a film of densely packed structure
JPS5395097A (en) * 1977-01-31 1978-08-19 Toshiba Corp Gas-sensitive element
US4203946A (en) * 1978-03-20 1980-05-20 Energy For Independence, Inc. Ozone detecting element
JPS5744847A (en) * 1980-08-30 1982-03-13 Matsushita Electric Works Ltd Detecting element for inflammable gas
JPS5830648A (ja) * 1981-08-17 1983-02-23 Hitachi Ltd 半導体ガスセンサ
JPS58191962A (ja) * 1982-05-07 1983-11-09 Hitachi Ltd ガス検出素子
US4587104A (en) * 1983-12-21 1986-05-06 Westinghouse Electric Corp. Semiconductor oxide gas combustibles sensor
JPH0711497B2 (ja) * 1985-06-29 1995-02-08 博明 柳田 ガス検出方法およびガスセンサ
JPS62124454A (ja) * 1985-11-26 1987-06-05 Nippon Telegr & Teleph Corp <Ntt> ヘテロ接合型ガスセンサ
DE3723051A1 (de) * 1987-07-11 1989-01-19 Kernforschungsz Karlsruhe Halbleiter fuer einen resistiven gassensor mit hoher ansprechgeschwindigkeit
JPH0695082B2 (ja) * 1987-10-08 1994-11-24 新コスモス電機株式会社 吸引式オゾンガス検知器
CA1332208C (en) * 1988-11-23 1994-10-04 Franco Consadori Gas sensor
NL9002750A (nl) * 1990-12-13 1992-07-01 Imec Inter Uni Micro Electr Sensor van het diode type.

Also Published As

Publication number Publication date
EP0575628A4 (de) 1995-03-08
WO1993014396A1 (en) 1993-07-22
EP0928964A3 (de) 2003-05-21
EP0928964A2 (de) 1999-07-14
JP3081399B2 (ja) 2000-08-28
US5618496A (en) 1997-04-08
EP0575628B1 (de) 1999-09-01
EP0575628A1 (de) 1993-12-29
KR100253633B1 (ko) 2000-04-15
DE69326199T2 (de) 2000-03-23
JPH05249064A (ja) 1993-09-28
JP3081244B2 (ja) 2000-08-28

Similar Documents

Publication Publication Date Title
DE69326199D1 (de) Gassensor und seine herstellung
DE69305955D1 (de) Beschleunigungssensor und seine herstellung
DE69330509D1 (de) Gleitbauteil und seine herstellung
DE69328528D1 (de) D-Ketohexose-3-Epimerase, und seine Herstellung und Verwendung
DE69415803D1 (de) Stirnflächendichtungsanordnung und herstellung derselben
DE69322807D1 (de) Zahnprothese und Herstellungsverfahren
DE69634813D1 (de) Halbleiter und seine Herstellung
DE69635566T2 (de) Monolithisches Keramikbauelement und seine Herstellung
DE59409879D1 (de) Gassensor
DE69124207D1 (de) Gassensor
DE69329669D1 (de) Magnetoresistiver Sensor und Herstellungsverfahren dafür
DE69414885D1 (de) Gasdichter Film und Herstellung derselben
DE69219171D1 (de) Gassensoren
DE69124630D1 (de) Infrarotsensor und Herstellungsverfahren dafür
DE69127063D1 (de) Wandlerkopf und Herstellungsverfahren
DE69632441D1 (de) Temperaturfühleranordnung und Verwendungen derselben
DE69330128D1 (de) Poröses polytetrafluorethylen und herstellung
DE69326655D1 (de) Zinkoxidvaristor und seine herstellung
DE59606486D1 (de) Herstellung von Poly-o-hydroxyamiden und Poly-o-mercaptoamiden
DE69318675D1 (de) Klebefilm und seine herstellung
DE69325124D1 (de) Sauerstoffmesssonde
DE69330922D1 (de) Bildsensor und Herstellungsverfahren
DE4293670T1 (de) Gassensor
DE69421172D1 (de) Synthetises detergensstueck und herstellung davon
DE69315311D1 (de) Strukturiertes Fasermaterial und seine Herstellung

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee