DE69322480D1 - Piezoelektrisches Filter und Verfahren zu seiner Herstellung - Google Patents

Piezoelektrisches Filter und Verfahren zu seiner Herstellung

Info

Publication number
DE69322480D1
DE69322480D1 DE69322480T DE69322480T DE69322480D1 DE 69322480 D1 DE69322480 D1 DE 69322480D1 DE 69322480 T DE69322480 T DE 69322480T DE 69322480 T DE69322480 T DE 69322480T DE 69322480 D1 DE69322480 D1 DE 69322480D1
Authority
DE
Germany
Prior art keywords
manufacture
piezoelectric filter
piezoelectric
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69322480T
Other languages
English (en)
Other versions
DE69322480T2 (de
Inventor
Yutaka Taguchi
Kazuo Eda
Akihiro Kanaboshi
Tetsuyoshi Ogura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DE69322480D1 publication Critical patent/DE69322480D1/de
Publication of DE69322480T2 publication Critical patent/DE69322480T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/562—Monolithic crystal filters comprising a ceramic piezoelectric layer
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/564—Monolithic crystal filters implemented with thin-film techniques

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
DE1993622480 1992-10-20 1993-10-19 Piezoelektrisches Filter und Verfahren zu seiner Herstellung Expired - Fee Related DE69322480T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP28147492 1992-10-20
JP28147392 1992-10-20

Publications (2)

Publication Number Publication Date
DE69322480D1 true DE69322480D1 (de) 1999-01-21
DE69322480T2 DE69322480T2 (de) 1999-08-05

Family

ID=26554205

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1993622480 Expired - Fee Related DE69322480T2 (de) 1992-10-20 1993-10-19 Piezoelektrisches Filter und Verfahren zu seiner Herstellung

Country Status (2)

Country Link
EP (1) EP0594117B1 (de)
DE (1) DE69322480T2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0742598B1 (de) * 1995-05-08 2000-08-02 Matsushita Electric Industrial Co., Ltd. Verfahren zur Herstellung eines Verbundsubstrats und eine dieses Substrat benutzende piezoelektrischer Anordnung
US5759753A (en) * 1995-07-19 1998-06-02 Matsushita Electric Industrial Co., Ltd. Piezoelectric device and method of manufacturing the same

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5478693A (en) * 1977-12-05 1979-06-22 Matsushima Kogyo Co Ltd Crystal vibrator
JP2643620B2 (ja) * 1991-03-13 1997-08-20 松下電器産業株式会社 電圧制御発振器とその製造方法

Also Published As

Publication number Publication date
DE69322480T2 (de) 1999-08-05
EP0594117B1 (de) 1998-12-09
EP0594117A1 (de) 1994-04-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee