DE69319358D1 - Verfahren zur Herstellung von Alkylarsinverbindungen - Google Patents

Verfahren zur Herstellung von Alkylarsinverbindungen

Info

Publication number
DE69319358D1
DE69319358D1 DE69319358T DE69319358T DE69319358D1 DE 69319358 D1 DE69319358 D1 DE 69319358D1 DE 69319358 T DE69319358 T DE 69319358T DE 69319358 T DE69319358 T DE 69319358T DE 69319358 D1 DE69319358 D1 DE 69319358D1
Authority
DE
Germany
Prior art keywords
alkylarsine
compounds
preparation
alkyl
arsines
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69319358T
Other languages
English (en)
Other versions
DE69319358T2 (de
Inventor
C Joseph Calbick
Mark A Kuck
Donald H Valentine
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cytec Technology Corp
Original Assignee
Cytec Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cytec Technology Corp filed Critical Cytec Technology Corp
Application granted granted Critical
Publication of DE69319358D1 publication Critical patent/DE69319358D1/de
Publication of DE69319358T2 publication Critical patent/DE69319358T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/301—AIII BV compounds, where A is Al, Ga, In or Tl and B is N, P, As, Sb or Bi
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F9/00—Compounds containing elements of Groups 5 or 15 of the Periodic Table
    • C07F9/66—Arsenic compounds
    • C07F9/70—Organo-arsenic compounds
    • C07F9/72—Aliphatic compounds
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00—Technologies relating to chemical industry
    • Y02P20/50—Improvements relating to the production of bulk chemicals
    • Y02P20/582—Recycling of unreacted starting or intermediate materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S252/00—Compositions
    • Y10S252/95—Doping agent source material
    • Y10S252/951—Doping agent source material for vapor transport
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/935—Gas flow control

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Low-Molecular Organic Synthesis Reactions Using Catalysts (AREA)
  • Catalysts (AREA)
DE69319358T 1992-03-09 1993-01-25 Verfahren zur Herstellung von Alkylarsinverbindungen Expired - Fee Related DE69319358T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/848,505 US5274149A (en) 1991-07-11 1992-03-09 Process for making alkyl arsine compounds

Publications (2)

Publication Number Publication Date
DE69319358D1 true DE69319358D1 (de) 1998-08-06
DE69319358T2 DE69319358T2 (de) 1998-12-17

Family

ID=25303463

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69319358T Expired - Fee Related DE69319358T2 (de) 1992-03-09 1993-01-25 Verfahren zur Herstellung von Alkylarsinverbindungen

Country Status (8)

Country Link
US (2) US5274149A (de)
EP (1) EP0560029B1 (de)
JP (1) JP3376565B2 (de)
AT (1) ATE167867T1 (de)
CA (1) CA2091141A1 (de)
DE (1) DE69319358T2 (de)
DK (1) DK0560029T3 (de)
ES (1) ES2118145T3 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5274149A (en) * 1991-07-11 1993-12-28 American Cyanamid Company Process for making alkyl arsine compounds
US6956127B2 (en) 2002-01-17 2005-10-18 Shipley Company, L.L.C. Alkyl group VA metal compounds
US8784663B2 (en) * 2009-11-20 2014-07-22 Nokia Corporation Trapping nanostructures
US20230391804A1 (en) 2022-06-02 2023-12-07 Gelest, Inc. High purity alkyl tin compounds and manufacturing methods thereof
CN115181131A (zh) * 2022-08-11 2022-10-14 安徽亚格盛电子新材料有限公司 一种连续化合成叔丁基砷的方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE618264A (de) * 1959-06-18
US4404265A (en) * 1969-10-01 1983-09-13 Rockwell International Corporation Epitaxial composite and method of making
US4368098A (en) * 1969-10-01 1983-01-11 Rockwell International Corporation Epitaxial composite and method of making
US4734514A (en) * 1984-10-25 1988-03-29 Morton Thiokol, Inc. Hydrocarbon-substituted analogs of phosphine and arsine, particularly for metal organic chemical vapor deposition
US4857655A (en) * 1988-01-20 1989-08-15 American Cyanamid Company Process for making alkyl arsine compounds
JPH01260813A (ja) * 1988-04-11 1989-10-18 Sumitomo Chem Co Ltd 化合物半導体の気相成長方法
US4900855A (en) * 1988-12-14 1990-02-13 Cvd Incorporated Chemical process for obtaining high purification of monoalkylarsines and dialkylarsines and purified mono- and dialkylarsines
US5068372A (en) * 1990-07-16 1991-11-26 Cvd Incorporated Method for the synthesis of primary arsines
US5124278A (en) * 1990-09-21 1992-06-23 Air Products And Chemicals, Inc. Amino replacements for arsine, antimony and phosphine
US5274149A (en) * 1991-07-11 1993-12-28 American Cyanamid Company Process for making alkyl arsine compounds

Also Published As

Publication number Publication date
CA2091141A1 (en) 1993-09-10
DE69319358T2 (de) 1998-12-17
ES2118145T3 (es) 1998-09-16
JPH069671A (ja) 1994-01-18
EP0560029A1 (de) 1993-09-15
ATE167867T1 (de) 1998-07-15
EP0560029B1 (de) 1998-07-01
US5274149A (en) 1993-12-28
JP3376565B2 (ja) 2003-02-10
DK0560029T3 (da) 1998-10-26
US5415129A (en) 1995-05-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee