DE69318963T2 - Drehratensensor und dessen Herstellungverfahren - Google Patents

Drehratensensor und dessen Herstellungverfahren

Info

Publication number
DE69318963T2
DE69318963T2 DE69318963T DE69318963T DE69318963T2 DE 69318963 T2 DE69318963 T2 DE 69318963T2 DE 69318963 T DE69318963 T DE 69318963T DE 69318963 T DE69318963 T DE 69318963T DE 69318963 T2 DE69318963 T2 DE 69318963T2
Authority
DE
Germany
Prior art keywords
manufacturing process
rate sensor
rotation rate
rotation
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69318963T
Other languages
English (en)
Other versions
DE69318963D1 (de
Inventor
Jiro Terada
Hiroshi Takenaka
Masaharu Ushihara
Masami Tamura
Hitoshi Nishimura
Kikuo Kaino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of DE69318963D1 publication Critical patent/DE69318963D1/de
Application granted granted Critical
Publication of DE69318963T2 publication Critical patent/DE69318963T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
DE69318963T 1993-02-03 1993-07-14 Drehratensensor und dessen Herstellungverfahren Expired - Lifetime DE69318963T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1605493 1993-02-03
JP1612293 1993-02-03

Publications (2)

Publication Number Publication Date
DE69318963D1 DE69318963D1 (de) 1998-07-09
DE69318963T2 true DE69318963T2 (de) 1998-10-01

Family

ID=26352303

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69331116T Expired - Lifetime DE69331116T2 (de) 1993-02-03 1993-07-14 Drehratensensor und Verfahren zu dessen Herstellung
DE69318963T Expired - Lifetime DE69318963T2 (de) 1993-02-03 1993-07-14 Drehratensensor und dessen Herstellungverfahren

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69331116T Expired - Lifetime DE69331116T2 (de) 1993-02-03 1993-07-14 Drehratensensor und Verfahren zu dessen Herstellung

Country Status (3)

Country Link
US (2) US5445025A (de)
EP (2) EP0806631B1 (de)
DE (2) DE69331116T2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5698784A (en) * 1996-01-24 1997-12-16 Gyration, Inc. Vibratory rate gyroscope and methods of assembly and operation
US6101878A (en) 1997-03-24 2000-08-15 Denso Corporation Angular rate sensor and method of improving output characteristic thereof
ATE466288T1 (de) 1999-03-25 2010-05-15 Draper Lab Charles S Dynamisch ausbalancierte mikroelektromechanische vorrichtungen
JP2002243451A (ja) * 2001-02-19 2002-08-28 Matsushita Electric Ind Co Ltd 角速度センサおよびその特性調整方法
JP3791485B2 (ja) 2002-06-04 2006-06-28 株式会社村田製作所 音叉形振動子およびそれを用いた振動ジャイロおよびそれを用いた電子装置および音叉形振動子の製造方法
JP4163067B2 (ja) * 2003-07-14 2008-10-08 日本碍子株式会社 物理量測定方法および装置
US20050062362A1 (en) * 2003-08-28 2005-03-24 Hongyuan Yang Oscillatory gyroscope
CN110375623B (zh) * 2019-07-29 2021-05-28 重庆科技学院 一种磁响应柔性界面材料的滚动角测量装置及方法

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3683213A (en) * 1971-03-09 1972-08-08 Statek Corp Microresonator of tuning fork configuration
JPS5393792A (en) * 1977-01-26 1978-08-17 Seiko Instr & Electronics Ltd Crystal vibrator
US4320320A (en) * 1978-12-01 1982-03-16 Kabushiki Kaisha Suwa Seikosha Coupled mode tuning fork type quartz crystal vibrator
CH630747A5 (fr) * 1979-01-18 1982-06-30 Ebauches Sa Procede d'ajustement de la frequence d'un resonateur et resonateur a frequence ajustee obtenu par la mise en oeuvre de ce procede.
JPS5762612A (en) * 1980-10-02 1982-04-15 Seiko Epson Corp Tuning fork quartz resonator
JPS57103378A (en) * 1980-12-19 1982-06-26 Tdk Corp Preparation of piezoelectric element
JPS57170897A (en) * 1981-04-14 1982-10-21 Citizen Watch Co Ltd Manufacture of quartz oscillator
JPS5863212A (ja) * 1981-10-13 1983-04-15 Citizen Watch Co Ltd 水晶振動子
FR2520936A1 (fr) * 1982-01-29 1983-08-05 Thomson Csf Procede de fabrication collective de transducteurs piezoelectriques, transducteurs obtenus par ce procede et utilisation d'un tel procede
JPS6049215A (ja) * 1983-08-30 1985-03-18 Jeco Co Ltd 角速度センサ
JPS6067815A (ja) * 1983-09-23 1985-04-18 Nippon Denso Co Ltd 角速度センサ
US4899587A (en) * 1984-01-23 1990-02-13 Piezoelectric Technology Investors, Limited Method for sensing rotation using vibrating piezoelectric elements
US4628735A (en) * 1984-12-14 1986-12-16 Sundstrand Data Control, Inc. Vibrating beam accelerometer
JPS61181913A (ja) * 1985-02-07 1986-08-14 Matsushita Electric Ind Co Ltd 角速度センサの製造方法
JPH07101176B2 (ja) * 1985-07-12 1995-11-01 日本電装株式会社 振動型角速度検出装置
JPS62250309A (ja) * 1986-04-23 1987-10-31 Matsushita Electric Ind Co Ltd 角速度センサの製造方法
US4930351A (en) * 1988-03-24 1990-06-05 Wjm Corporation Vibratory linear acceleration and angular rate sensing system
DE3926504C2 (de) * 1988-08-12 1999-11-18 Murata Manufacturing Co Schwingkreisel
JPH032515A (ja) * 1989-05-29 1991-01-08 Japan Aviation Electron Ind Ltd 回転ビーム形２軸角速度計
DE69009314T2 (de) * 1989-07-07 1994-10-06 Matsushita Electric Ind Co Ltd Winkelgeschwindigkeitssensor.
JPH0384412A (ja) * 1989-08-28 1991-04-10 Matsushita Electric Ind Co Ltd 角速度センサ
JP2734155B2 (ja) * 1990-01-18 1998-03-30 松下電器産業株式会社 角速度センサ
JP2567162B2 (ja) * 1991-08-01 1996-12-25 赤井電機株式会社 振動ジャイロ

Also Published As

Publication number Publication date
DE69331116D1 (de) 2001-12-13
EP0806631B1 (de) 2001-11-07
EP0611949A3 (de) 1994-11-30
US5445025A (en) 1995-08-29
DE69331116T2 (de) 2002-03-14
US5723788A (en) 1998-03-03
EP0611949A2 (de) 1994-08-24
EP0611949B1 (de) 1998-06-03
DE69318963D1 (de) 1998-07-09
EP0806631A1 (de) 1997-11-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PANASONIC CORP., KADOMA, OSAKA, JP

8320 Willingness to grant licences declared (paragraph 23)