DE69317824T2 - Diazo-aromatische polyfunktionelle Verbindungen und sie enthaltende Zusammensetzungen - Google Patents
Diazo-aromatische polyfunktionelle Verbindungen und sie enthaltende ZusammensetzungenInfo
- Publication number
- DE69317824T2 DE69317824T2 DE69317824T DE69317824T DE69317824T2 DE 69317824 T2 DE69317824 T2 DE 69317824T2 DE 69317824 T DE69317824 T DE 69317824T DE 69317824 T DE69317824 T DE 69317824T DE 69317824 T2 DE69317824 T2 DE 69317824T2
- Authority
- DE
- Germany
- Prior art keywords
- diazo
- compositions containing
- polyfunctional compounds
- aromatic polyfunctional
- aromatic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F3/00—Colour separation; Correction of tonal value
- G03F3/10—Checking the colour or tonal value of separation negatives or positives
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/016—Diazonium salts or compounds
- G03F7/021—Macromolecular diazonium compounds; Macromolecular additives, e.g. binders
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19851292 | 1992-07-24 | ||
JP14044193A JP3315757B2 (ja) | 1992-07-24 | 1993-06-11 | 感光性多官能芳香族ジアゾ化合物およびそれを用いた感光性組成物 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69317824D1 DE69317824D1 (de) | 1998-05-14 |
DE69317824T2 true DE69317824T2 (de) | 1998-12-03 |
Family
ID=26472947
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69317824T Expired - Fee Related DE69317824T2 (de) | 1992-07-24 | 1993-07-20 | Diazo-aromatische polyfunktionelle Verbindungen und sie enthaltende Zusammensetzungen |
Country Status (4)
Country | Link |
---|---|
US (2) | US5430130A (de) |
EP (1) | EP0580121B1 (de) |
JP (1) | JP3315757B2 (de) |
DE (1) | DE69317824T2 (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3315757B2 (ja) * | 1992-07-24 | 2002-08-19 | 東洋合成工業株式会社 | 感光性多官能芳香族ジアゾ化合物およびそれを用いた感光性組成物 |
US5942368A (en) * | 1996-04-23 | 1999-08-24 | Konica Corporation | Pigment dispersion composition |
JP4426526B2 (ja) | 2003-07-17 | 2010-03-03 | ハネウエル・インターナシヨナル・インコーポレーテツド | 最新式のマイクロエレクトロニクス用途およびデバイス用の平坦化膜およびそれらの製造方法 |
KR100951044B1 (ko) * | 2007-10-17 | 2010-04-05 | 삼성코닝정밀유리 주식회사 | 디스플레이 장치용 외광 차폐 필름의 제조 방법 |
CN116554444B (zh) * | 2023-06-15 | 2024-03-29 | 嘉庚创新实验室 | 用于光刻介质组合物的聚合物以及光刻介质组合物 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2400221A1 (fr) * | 1977-08-09 | 1979-03-09 | Kodak Pathe | Compose de diazonium photosensible utile, en particulier, pour preparer des planches d'impression lithographique, procede de preparation de ce compose et plaque presensibilisee avec ce compose |
US5206344A (en) * | 1985-06-26 | 1993-04-27 | Cetus Oncology Corporation | Interleukin-2 muteins and polymer conjugation thereof |
US5206349A (en) * | 1990-08-10 | 1993-04-27 | Toyo Gosei Kogy Co., Ltd. | Aromatic diazo compounds and photosensitive compositions using the same |
JP3315757B2 (ja) * | 1992-07-24 | 2002-08-19 | 東洋合成工業株式会社 | 感光性多官能芳香族ジアゾ化合物およびそれを用いた感光性組成物 |
-
1993
- 1993-06-11 JP JP14044193A patent/JP3315757B2/ja not_active Expired - Fee Related
- 1993-07-20 DE DE69317824T patent/DE69317824T2/de not_active Expired - Fee Related
- 1993-07-20 EP EP93111593A patent/EP0580121B1/de not_active Expired - Lifetime
- 1993-07-21 US US08/095,743 patent/US5430130A/en not_active Expired - Lifetime
-
1995
- 1995-01-06 US US08/369,503 patent/US5589315A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0580121B1 (de) | 1998-04-08 |
US5430130A (en) | 1995-07-04 |
JPH0689025A (ja) | 1994-03-29 |
EP0580121A3 (de) | 1995-05-24 |
JP3315757B2 (ja) | 2002-08-19 |
US5589315A (en) | 1996-12-31 |
DE69317824D1 (de) | 1998-05-14 |
EP0580121A2 (de) | 1994-01-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |