DE69309283D1 - Kaltkathoden - Google Patents
KaltkathodenInfo
- Publication number
- DE69309283D1 DE69309283D1 DE69309283T DE69309283T DE69309283D1 DE 69309283 D1 DE69309283 D1 DE 69309283D1 DE 69309283 T DE69309283 T DE 69309283T DE 69309283 T DE69309283 T DE 69309283T DE 69309283 D1 DE69309283 D1 DE 69309283D1
- Authority
- DE
- Germany
- Prior art keywords
- cold cathodes
- cathodes
- cold
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
- H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2209/00—Apparatus and processes for manufacture of discharge tubes
- H01J2209/02—Manufacture of cathodes
- H01J2209/022—Cold cathodes
- H01J2209/0223—Field emission cathodes
- H01J2209/0226—Sharpening or resharpening of emitting point or edge
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Cold Cathode And The Manufacture (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB929216647A GB9216647D0 (en) | 1992-08-05 | 1992-08-05 | Cold cathodes |
PCT/GB1993/001650 WO1994003916A1 (en) | 1992-08-05 | 1993-08-04 | Method of manufacturing cold cathodes |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69309283D1 true DE69309283D1 (de) | 1997-04-30 |
DE69309283T2 DE69309283T2 (de) | 1997-07-03 |
Family
ID=10719877
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69309283T Expired - Fee Related DE69309283T2 (de) | 1992-08-05 | 1993-08-04 | Kaltkathoden |
Country Status (6)
Country | Link |
---|---|
US (1) | US5652474A (de) |
EP (1) | EP0654171B1 (de) |
JP (1) | JP2941058B2 (de) |
DE (1) | DE69309283T2 (de) |
GB (1) | GB9216647D0 (de) |
WO (1) | WO1994003916A1 (de) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6187604B1 (en) | 1994-09-16 | 2001-02-13 | Micron Technology, Inc. | Method of making field emitters using porous silicon |
JP3095780B2 (ja) | 1994-11-04 | 2000-10-10 | マイクロン、ディスプレイテクノロジー、インコーポレーテッド | 低温酸化法を用いてエミッタサイトを尖らせる方法 |
JP3281533B2 (ja) * | 1996-03-26 | 2002-05-13 | パイオニア株式会社 | 冷電子放出表示装置及び半導体冷電子放出素子 |
US5990605A (en) * | 1997-03-25 | 1999-11-23 | Pioneer Electronic Corporation | Electron emission device and display device using the same |
JP3631015B2 (ja) | 1997-11-14 | 2005-03-23 | キヤノン株式会社 | 電子放出素子及びその製造方法 |
EP0926698A3 (de) * | 1997-12-25 | 2001-10-17 | Pioneer Electronic Corporation | Flacher Bildschirm mit Elektronenemittern |
KR100375848B1 (ko) * | 1999-03-19 | 2003-03-15 | 가부시끼가이샤 도시바 | 전계방출소자의 제조방법 및 디스플레이 장치 |
US20040003679A1 (en) * | 2002-07-05 | 2004-01-08 | David Ide | Apparatus and method for in vitro recording and stimulation of cells |
CA2533191C (en) * | 2003-07-22 | 2012-11-13 | Yeda Research And Development Company Ltd. | Electron emission device |
US7786662B2 (en) * | 2005-05-19 | 2010-08-31 | Texas Instruments Incorporated | Display using a movable electron field emitter and method of manufacture thereof |
US8023250B2 (en) * | 2008-09-12 | 2011-09-20 | Avx Corporation | Substrate for use in wet capacitors |
US8279585B2 (en) * | 2008-12-09 | 2012-10-02 | Avx Corporation | Cathode for use in a wet capacitor |
JP6311547B2 (ja) * | 2013-11-05 | 2018-04-18 | 東京エレクトロン株式会社 | マスク構造体の形成方法、成膜装置及び記憶媒体 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SU700882A2 (ru) * | 1975-11-14 | 1979-11-30 | Томский Институт Автоматизированных Систем Управления И Радиоэлектроники | Способ изготовлени холодного катода |
GB8816689D0 (en) * | 1988-07-13 | 1988-08-17 | Emi Plc Thorn | Method of manufacturing cold cathode field emission device & field emission device manufactured by method |
US5085746A (en) * | 1990-09-10 | 1992-02-04 | North Carolina State University | Method of fabricating scanning tunneling microscope tips |
JP2550798B2 (ja) * | 1991-04-12 | 1996-11-06 | 富士通株式会社 | 微小冷陰極の製造方法 |
US5525857A (en) * | 1994-08-19 | 1996-06-11 | Texas Instruments Inc. | Low density, high porosity material as gate dielectric for field emission device |
-
1992
- 1992-08-05 GB GB929216647A patent/GB9216647D0/en active Pending
-
1993
- 1993-08-04 US US08/381,842 patent/US5652474A/en not_active Expired - Fee Related
- 1993-08-04 DE DE69309283T patent/DE69309283T2/de not_active Expired - Fee Related
- 1993-08-04 EP EP93917990A patent/EP0654171B1/de not_active Expired - Lifetime
- 1993-08-04 WO PCT/GB1993/001650 patent/WO1994003916A1/en active IP Right Grant
- 1993-08-04 JP JP6505129A patent/JP2941058B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0654171B1 (de) | 1997-03-26 |
US5652474A (en) | 1997-07-29 |
JPH07509803A (ja) | 1995-10-26 |
JP2941058B2 (ja) | 1999-08-25 |
DE69309283T2 (de) | 1997-07-03 |
GB9216647D0 (en) | 1992-09-16 |
EP0654171A1 (de) | 1995-05-24 |
WO1994003916A1 (en) | 1994-02-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: BTG INTERNATIONAL LTD., LONDON, GB |
|
8339 | Ceased/non-payment of the annual fee |