DE69304570T2 - Magazin - Google Patents

Magazin

Info

Publication number
DE69304570T2
DE69304570T2 DE69304570T DE69304570T DE69304570T2 DE 69304570 T2 DE69304570 T2 DE 69304570T2 DE 69304570 T DE69304570 T DE 69304570T DE 69304570 T DE69304570 T DE 69304570T DE 69304570 T2 DE69304570 T2 DE 69304570T2
Authority
DE
Germany
Prior art keywords
magazine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69304570T
Other languages
English (en)
Other versions
DE69304570D1 (de
Inventor
Toshiaki Fujii
Hidetomo Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Research Co Ltd
Original Assignee
Ebara Research Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Research Co Ltd filed Critical Ebara Research Co Ltd
Publication of DE69304570D1 publication Critical patent/DE69304570D1/de
Application granted granted Critical
Publication of DE69304570T2 publication Critical patent/DE69304570T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67389—Closed carriers characterised by atmosphere control
    • H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/02—Plant or installations having external electricity supply
    • B03C3/04—Plant or installations having external electricity supply dry type
    • B03C3/12—Plant or installations having external electricity supply dry type characterised by separation of ionising and collecting stations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34—Constructional details or accessories or operation thereof
    • B03C3/38—Particle charging or ionising stations, e.g. using electric discharge, radioactive radiation or flames
    • B03C3/383—Particle charging or ionising stations, e.g. using electric discharge, radioactive radiation or flames using radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34—Constructional details or accessories or operation thereof
    • B03C3/40—Electrode constructions
    • B03C3/45—Collecting-electrodes
    • B03C3/47—Collecting-electrodes flat, e.g. plates, discs, gratings

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electrostatic Separation (AREA)
DE69304570T 1992-03-13 1993-03-12 Magazin Expired - Fee Related DE69304570T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8836092 1992-03-13

Publications (2)

Publication Number Publication Date
DE69304570D1 DE69304570D1 (de) 1996-10-17
DE69304570T2 true DE69304570T2 (de) 1997-04-03

Family

ID=13940648

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69304570T Expired - Fee Related DE69304570T2 (de) 1992-03-13 1993-03-12 Magazin

Country Status (3)

Country Link
US (1) US5380503A (de)
EP (1) EP0560379B1 (de)
DE (1) DE69304570T2 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07253677A (ja) * 1994-03-16 1995-10-03 Mitsubishi Electric Corp 光オゾンアッシャ，光アッシング方法，及び半導体装置の製造方法
US6159421A (en) * 1995-10-17 2000-12-12 Ebara Corporation Method of cleaning gases
KR100485918B1 (ko) * 1995-10-17 2005-09-14 가부시키가이샤 에바라 세이사꾸쇼 기체의청정화방법및장치
US6620385B2 (en) 1996-08-20 2003-09-16 Ebara Corporation Method and apparatus for purifying a gas containing contaminants
US5837040A (en) * 1996-09-09 1998-11-17 International Decontamination Systems Llc Room air decontamination device
JP3405439B2 (ja) 1996-11-05 2003-05-12 株式会社荏原製作所 固体表面の清浄化方法
US5843196A (en) * 1997-01-21 1998-12-01 International Business Machines Corporation Ultra-clean transport carrier
KR100576758B1 (ko) * 1997-11-28 2006-05-03 가부시키가이샤 에바라 세이사꾸쇼 반도체기판용 반송박스
DE19919169A1 (de) * 1999-04-28 2000-11-02 Philips Corp Intellectual Pty Vorrichtung zur Desinfektion von Wasser mit einer UV-C-Gasentladungslampe
GB0012040D0 (en) * 2000-05-19 2000-07-05 Suvair Ltd Air disinfection apparatus
KR100340334B1 (ko) * 2000-06-20 2002-06-12 윤종용 기체 청정화 시스템
JP3939101B2 (ja) * 2000-12-04 2007-07-04 株式会社荏原製作所 基板搬送方法および基板搬送容器
CA2365148A1 (en) * 2001-12-14 2003-06-14 Stuart Engel Outwardly projecting air purifier
US20030206841A1 (en) * 2002-05-03 2003-11-06 Lopiccolo James D. Air treatment system
CN100394654C (zh) * 2003-01-16 2008-06-11 松下电器产业株式会社 光电子放出板及使用该板的负粒子发生装置
US8252097B2 (en) * 2005-12-29 2012-08-28 Environmental Management Confederation, Inc. Distributed air cleaner system for enclosed electronic devices
US7708813B2 (en) * 2005-12-29 2010-05-04 Environmental Management Confederation, Inc. Filter media for active field polarized media air cleaner
US9789494B2 (en) 2005-12-29 2017-10-17 Environmental Management Confederation, Inc. Active field polarized media air cleaner
US8814994B2 (en) 2005-12-29 2014-08-26 Environmental Management Confederation, Inc. Active field polarized media air cleaner
US8795601B2 (en) 2005-12-29 2014-08-05 Environmental Management Confederation, Inc. Filter media for active field polarized media air cleaner
US7686869B2 (en) * 2005-12-29 2010-03-30 Environmental Management Confederation, Inc. Active field polarized media air cleaner
MX2017013124A (es) 2015-04-14 2018-01-26 Environmental Man Confederation Inc Medio de filtración corrugado para limpiador de aire polarizante.

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1679490B1 (de) * 1967-02-27 1970-05-21 Berckheim Graf Von Deckenelektrode fuer Anlagen zur Erhoehung der Feldstaerke in Raeumen
US3782905A (en) * 1972-05-01 1974-01-01 A Huang Electrostatic precipitating apparatus and method
US4010374A (en) * 1975-06-02 1977-03-01 Ppg Industries, Inc. Ultraviolet light processor and method of exposing surfaces to ultraviolet light
US4183780A (en) * 1978-08-21 1980-01-15 International Business Machines Corporation Photon enhanced reactive ion etching
JPS61178050A (ja) * 1985-02-04 1986-08-09 Ebara Corp 紫外線照射による空気清浄方法及びその装置
JPH0736418B2 (ja) * 1986-05-19 1995-04-19 富士通株式会社 ウエーハキャリア
JPS63230171A (ja) * 1987-03-20 1988-09-26 東海興業株式会社 脱臭装置
JP2623290B2 (ja) * 1988-04-18 1997-06-25 株式会社荏原製作所 気体の清浄方法及びその装置
JPH02303557A (ja) * 1989-05-16 1990-12-17 Ebara Res Co Ltd 光電子による気体中の微粒子の荷電方法
US5060805A (en) * 1989-06-20 1991-10-29 Ebara Research Co., Ltd. Photoelectron emitting member
JP2877449B2 (ja) * 1989-06-20 1999-03-31 株式会社荏原総合研究所 光電子放出材
IT1248429B (it) * 1989-12-13 1995-01-16 Michele Gazzano Apparecchio per la sterilizzazione di ambienti mediante radiazioni ultraviolette
JPH08211B2 (ja) * 1990-11-02 1996-01-10 株式会社荏原総合研究所 密閉空間の清浄方法及び装置

Also Published As

Publication number Publication date
EP0560379B1 (de) 1996-09-11
US5380503A (en) 1995-01-10
DE69304570D1 (de) 1996-10-17
EP0560379A1 (de) 1993-09-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Free format text: NOETH UND KOLLEGEN, 80336 MUENCHEN

8339 Ceased/non-payment of the annual fee