DE69303871D1 - Mikrolaser auf Siliziumbasis mit dotierten Glasdünnschichtfilmen - Google Patents

Mikrolaser auf Siliziumbasis mit dotierten Glasdünnschichtfilmen

Info

Publication number
DE69303871D1
DE69303871D1 DE69303871T DE69303871T DE69303871D1 DE 69303871 D1 DE69303871 D1 DE 69303871D1 DE 69303871 T DE69303871 T DE 69303871T DE 69303871 T DE69303871 T DE 69303871T DE 69303871 D1 DE69303871 D1 DE 69303871D1
Authority
DE
Germany
Prior art keywords
silicon
doped glass
glass thin
film films
microlaser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69303871T
Other languages
English (en)
Other versions
DE69303871T2 (de
Inventor
Chih-Chen Cho
Walter M Duncan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Application granted granted Critical
Publication of DE69303871D1 publication Critical patent/DE69303871D1/de
Publication of DE69303871T2 publication Critical patent/DE69303871T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/0627—Construction or shape of active medium the resonator being monolithic, e.g. microlaser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/16—Solid materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/0602—Crystal lasers or glass lasers
    • H01S3/0604—Crystal lasers or glass lasers in the form of a plate or disc
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/0632—Thin film lasers in which light propagates in the plane of the thin film
    • H01S3/0635—Thin film lasers in which light propagates in the plane of the thin film provided with a periodic structure, e.g. using distributed feed-back, grating couplers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/16—Solid materials
    • H01S3/1601—Solid materials characterised by an active (lasing) ion
    • H01S3/1603—Solid materials characterised by an active (lasing) ion rare earth
    • H01S3/1611—Solid materials characterised by an active (lasing) ion rare earth neodymium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/16—Solid materials
    • H01S3/163—Solid materials characterised by a crystal matrix
    • H01S3/1645—Solid materials characterised by a crystal matrix halide
    • H01S3/165—Solid materials characterised by a crystal matrix halide with the formula MF2, wherein M is Ca, Sr or Ba
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
    • H01S5/041—Optical pumping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
    • H01S5/3223—IV compounds
    • H01S5/3224—Si
    • H01S5/3227—Si porous Si

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Semiconductor Lasers (AREA)
  • Lasers (AREA)
DE69303871T 1992-09-15 1993-09-15 Mikrolaser auf Siliziumbasis mit dotierten Glasdünnschichtfilmen Expired - Fee Related DE69303871T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/945,991 US5369657A (en) 1992-09-15 1992-09-15 Silicon-based microlaser by doped thin films

Publications (2)

Publication Number Publication Date
DE69303871D1 true DE69303871D1 (de) 1996-09-05
DE69303871T2 DE69303871T2 (de) 1996-12-12

Family

ID=25483801

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69303871T Expired - Fee Related DE69303871T2 (de) 1992-09-15 1993-09-15 Mikrolaser auf Siliziumbasis mit dotierten Glasdünnschichtfilmen

Country Status (4)

Country Link
US (1) US5369657A (de)
EP (1) EP0588327B1 (de)
JP (1) JPH077200A (de)
DE (1) DE69303871T2 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5306385A (en) * 1992-09-15 1994-04-26 Texas Instruments Incorporated Method for generating photoluminescence emission lines from transition element doped CAF2 thin films over a Si-based substrate
US6614161B1 (en) * 1993-07-20 2003-09-02 University Of Georgia Research Foundation, Inc. Resonant microcavity display
US5478658A (en) * 1994-05-20 1995-12-26 At&T Corp. Article comprising a microcavity light source
US5682402A (en) * 1995-01-10 1997-10-28 Hitachi, Ltd. Organic luminescent devices with a multiplex structure
FR2734094B1 (fr) * 1995-05-12 1997-06-06 Commissariat Energie Atomique Emetteur infrarouge monolithique a semi-conducteur pompe par un microlaser solide declenche
US5881089A (en) * 1997-05-13 1999-03-09 Lucent Technologies Inc. Article comprising an organic laser
KR100377716B1 (ko) * 1998-02-25 2003-03-26 인터내셔널 비지네스 머신즈 코포레이션 광학적 방사를 위해 희토류 원소로 도핑된 실리콘 구조체 및 방사방법
EP1035623A1 (de) * 1998-12-04 2000-09-13 Interuniversitair Micro-Elektronica Centrum Vzw Vorrichtung für die Emission von elektromagnetischer Strahlung und Herstellungsverfahren
US6627923B1 (en) 1999-07-12 2003-09-30 Massachusetts Institute Of Technology Resonant microcavities
US6603605B1 (en) * 1999-11-05 2003-08-05 Interuniversitair Microelektronica Centrum (Imec, Vzw) System for guiding a beam of electromagnetic radiation
US6879618B2 (en) * 2001-04-11 2005-04-12 Eastman Kodak Company Incoherent light-emitting device apparatus for driving vertical laser cavity
US20070051963A1 (en) * 2005-09-06 2007-03-08 Yifan Chen Semiconductor light source
JP4768466B2 (ja) * 2006-02-16 2011-09-07 シャープ株式会社 発光デバイス装置
EP2467881A4 (de) 2009-08-21 2014-12-24 California Inst Of Techn Systeme und verfahren zum optischen antreiben von wandlern und entsprechende wandler
US9031102B2 (en) 2012-03-01 2015-05-12 California Institute Of Technology Methods of modulating microlasers at ultralow power levels, and systems thereof
US9065241B2 (en) * 2012-05-11 2015-06-23 Massachusetts Institute Of Technology Methods, systems, and apparatus for high energy optical-pulse amplification at high average power
CN109600904B (zh) * 2019-01-08 2020-03-06 惠州学院 半导体激光加速器及其激光加速单元

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3731225A (en) * 1962-04-02 1973-05-01 Sanders Associates Inc Fiber optic laser system
US4081763A (en) * 1973-01-04 1978-03-28 Natalya Andreevna Vlasenko Electroluminescent laser
US4782494A (en) * 1986-05-30 1988-11-01 Hughes Aircraft Company Method of providing continuous lasing operation
JP2553696B2 (ja) * 1989-03-24 1996-11-13 松下電器産業株式会社 多色発光薄膜エレクトロルミネセンス装置
US5117437A (en) * 1990-03-02 1992-05-26 The University Of Michigan Continuous-wave pair-pumped laser system
US5038358A (en) * 1990-03-02 1991-08-06 The University Of Michigan Trio upconversion laser system
US5107538A (en) * 1991-06-06 1992-04-21 At&T Bell Laboratories Optical waveguide system comprising a rare-earth Si-based optical device
US5301204A (en) * 1992-09-15 1994-04-05 Texas Instruments Incorporated Porous silicon as a light source for rare earth-doped CaF2 laser

Also Published As

Publication number Publication date
DE69303871T2 (de) 1996-12-12
US5369657A (en) 1994-11-29
EP0588327A1 (de) 1994-03-23
JPH077200A (ja) 1995-01-10
EP0588327B1 (de) 1996-07-31

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee