DE69230657T2 - Vibrationswellenmotor - Google Patents

Vibrationswellenmotor

Info

Publication number
DE69230657T2
DE69230657T2 DE69230657T DE69230657T DE69230657T2 DE 69230657 T2 DE69230657 T2 DE 69230657T2 DE 69230657 T DE69230657 T DE 69230657T DE 69230657 T DE69230657 T DE 69230657T DE 69230657 T2 DE69230657 T2 DE 69230657T2
Authority
DE
Germany
Prior art keywords
vibration wave
wave motor
motor
vibration
wave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69230657T
Other languages
English (en)
Other versions
DE69230657D1 (de
Inventor
Reiji Mitarai
Hiroaki Takeishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69230657D1 publication Critical patent/DE69230657D1/de
Publication of DE69230657T2 publication Critical patent/DE69230657T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163—Motors with ring stator
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14—Drive circuits; Control arrangements or methods
    • H02N2/145—Large signal circuits, e.g. final stages
    • H02N2/147—Multi-phase circuits
DE69230657T 1991-08-26 1992-08-25 Vibrationswellenmotor Expired - Fee Related DE69230657T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3213637A JP3043124B2 (ja) 1991-08-26 1991-08-26 進行波型モータ装置

Publications (2)

Publication Number Publication Date
DE69230657D1 DE69230657D1 (de) 2000-03-16
DE69230657T2 true DE69230657T2 (de) 2000-07-13

Family

ID=16642455

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69230657T Expired - Fee Related DE69230657T2 (de) 1991-08-26 1992-08-25 Vibrationswellenmotor

Country Status (4)

Country Link
US (1) US5945769A (de)
EP (1) EP0529582B1 (de)
JP (1) JP3043124B2 (de)
DE (1) DE69230657T2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4688245B2 (ja) * 1998-06-02 2011-05-25 セイコーインスツル株式会社 位置決めシステム及び超音波モータ付電子機器
US6424076B1 (en) * 1998-10-07 2002-07-23 The B. F. Goodrich Company Incremental switched deformable mirror
JP5110750B2 (ja) * 2000-09-28 2012-12-26 キヤノン株式会社 振動型アクチュエータの駆動回路
ATE363130T1 (de) * 2000-10-23 2007-06-15 Abb Research Ltd Ein verbesserter ferngesteuerter leistungsschalter
US7129618B2 (en) * 2003-03-31 2006-10-31 Canon Kabushiki Kaisha Control apparatus capable of low-speed driving of vibration type driving apparatus, actuating apparatus using the control apparatus, control method capable of low-speed driving of vibration type driving apparatus, and storage medium storing program including program codes capable of realizing the control method
CN108494286B (zh) * 2018-04-27 2019-11-08 哈尔滨工业大学 采用剪切工作模式的扭转型精密压电驱动器及其制作方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4513219A (en) * 1982-11-25 1985-04-23 Canon Kabushiki Kaisha Vibration wave motor
JPS59110389A (ja) * 1982-12-16 1984-06-26 Canon Inc 振動波モ−タ
JPS59117473A (ja) * 1982-12-21 1984-07-06 Canon Inc 振動波モ−タ
JPS60170472A (ja) * 1984-02-10 1985-09-03 Canon Inc 振動波モ−タ
JPS60210172A (ja) * 1984-04-02 1985-10-22 Canon Inc 振動波モ−タ
US4649311A (en) * 1984-04-02 1987-03-10 Canon Kabushiki Kaisha Vibration wave motor
US4697117A (en) * 1985-11-27 1987-09-29 Taga Electric Co., Ltd. Rotary ultrasonic motor
JPS62247870A (ja) * 1986-04-21 1987-10-28 多賀電気株式会社 超音波振動子の駆動制御方法
JP2709318B2 (ja) * 1988-08-31 1998-02-04 セイコープレシジョン株式会社 液晶パネルおよび液晶パネルを用いた変換装置
JP2906443B2 (ja) * 1989-05-29 1999-06-21 スズキ株式会社 ２サイクル縦置き型エンジン
JPH0370882A (ja) * 1989-08-09 1991-03-26 Mitsubishi Electric Corp 密閉形圧縮機
JPH0687491B2 (ja) * 1989-09-14 1994-11-02 日本電気株式会社 薄膜コンデンサ
US5247220A (en) * 1989-10-20 1993-09-21 Seiko Epson Corporation Ultrasonic motor
EP0424139B1 (de) * 1989-10-20 1997-04-16 Seiko Epson Corporation Ultraschallmotor
DE3939419A1 (de) * 1989-11-29 1991-06-06 Licentia Gmbh Mehrflaechensensorsteuerung fuer einen wanderwellenmotor
US5237237A (en) * 1990-03-12 1993-08-17 Seiko Epson Corporation Ultrasonic motor and drive method
US5610468A (en) * 1990-10-22 1997-03-11 Seiko Epson Corporation Ultrasonic step motor
US5256928A (en) * 1990-10-26 1993-10-26 Matsushita Electric Industrial Co., Ltd. Ultrasonic motor with a vibrator having recesses
JPH04217882A (ja) * 1990-12-19 1992-08-07 Nikon Corp 超音波モータ
DE69228888T2 (de) * 1991-01-17 1999-08-12 Seiko Epson Corp Ultraschallschrittmotor

Also Published As

Publication number Publication date
JP3043124B2 (ja) 2000-05-22
US5945769A (en) 1999-08-31
DE69230657D1 (de) 2000-03-16
JPH0556670A (ja) 1993-03-05
EP0529582A1 (de) 1993-03-03
EP0529582B1 (de) 2000-02-09

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee