DE69224895T2 - Vakuumschieber - Google Patents

Vakuumschieber

Info

Publication number
DE69224895T2
DE69224895T2 DE69224895T DE69224895T DE69224895T2 DE 69224895 T2 DE69224895 T2 DE 69224895T2 DE 69224895 T DE69224895 T DE 69224895T DE 69224895 T DE69224895 T DE 69224895T DE 69224895 T2 DE69224895 T2 DE 69224895T2
Authority
DE
Germany
Prior art keywords
gate valve
vacuum gate
vacuum
valve
gate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69224895T
Other languages
English (en)
Other versions
DE69224895D1 (de
Inventor
Kazutoshi Funaba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
VALQUA SEIKI,LTD.,, TOKIO/TOKYO, JP
Original Assignee
Japan Steel Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Steel Works Ltd filed Critical Japan Steel Works Ltd
Application granted granted Critical
Publication of DE69224895D1 publication Critical patent/DE69224895D1/de
Publication of DE69224895T2 publication Critical patent/DE69224895T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/03—Pressure vessels, or vacuum vessels, having closure members or seals specially adapted therefor
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568—Transferring the substrates through a series of coating stations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/12—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with wedge-shaped arrangements of sealing faces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K41/00—Spindle sealings
    • F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
DE69224895T 1992-04-13 1992-04-13 Vakuumschieber Expired - Fee Related DE69224895T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP92303288A EP0565786B1 (de) 1992-04-13 1992-04-13 Vakuumschieber

Publications (2)

Publication Number Publication Date
DE69224895D1 DE69224895D1 (de) 1998-04-30
DE69224895T2 true DE69224895T2 (de) 1998-08-27

Family

ID=8211329

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69224895T Expired - Fee Related DE69224895T2 (de) 1992-04-13 1992-04-13 Vakuumschieber

Country Status (3)

Country Link
US (1) US5271602A (de)
EP (1) EP0565786B1 (de)
DE (1) DE69224895T2 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5524663A (en) * 1994-12-09 1996-06-11 Unique Systems, Inc. Vacuum tube shut-off for power tools
US5579718A (en) * 1995-03-31 1996-12-03 Applied Materials, Inc. Slit valve door
US5909867A (en) * 1998-05-27 1999-06-08 Vat Holding Ag Closing assembly for a chamber having a through-opening
US6698718B2 (en) 2001-08-29 2004-03-02 Wafermasters, Inc. Rotary valve
FI117063B (fi) * 2003-06-06 2006-05-31 Outokumpu Oy Venttiilin tiiviste
US20050268857A1 (en) * 2004-06-02 2005-12-08 Applied Materials, Inc. Uniformly compressed process chamber gate seal for semiconductor processing chamber
US7841582B2 (en) * 2004-06-02 2010-11-30 Applied Materials, Inc. Variable seal pressure slit valve doors for semiconductor manufacturing equipment
US7422653B2 (en) * 2004-07-13 2008-09-09 Applied Materials, Inc. Single-sided inflatable vertical slit valve
US7806383B2 (en) * 2007-06-01 2010-10-05 Applied Materials, Inc. Slit valve
DE102011001186A1 (de) * 2011-01-17 2012-07-19 Z & J Technologies Gmbh Antrieb für ein Schieberventil und Schieberventil
EP2551565A1 (de) * 2011-07-28 2013-01-30 VAT Holding AG Vakuumventil und Verschlussglied zum gasdichten Schliessen eines Fliesswegs mittels einer Linearbewegung
EP2647892B1 (de) * 2012-04-03 2014-12-31 Phönix Armaturen-Werke Bregel GmbH Schieber umfassend ein Schiebergehäuse
DE102014107174A1 (de) * 2014-05-21 2015-11-26 Thyssenkrupp Ag Stellvorrichtung zur Betätigung eines Elementes innerhalb eines von Koksofengas durchströmten Gasraumes und Verfahren zum Betreiben der Stellvorrichtung
US10865536B1 (en) 2019-02-20 2020-12-15 Keith D. Olson Scissors gate valve and system water management system
US11204104B2 (en) * 2019-05-16 2021-12-21 Tapcoenpro, Llc Systems and methods for torque isolation valve actuator
CN110500418B (zh) * 2019-08-07 2024-04-12 安徽省屯溪高压阀门股份有限公司 一种自控大口径快速切断波纹管闸阀

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2856151A (en) * 1957-03-15 1958-10-14 Melville F Peters Fluid valve seals
FR1208769A (fr) * 1957-11-22 1960-02-25 Dewrance & Co Perfectionnements aux dispositifs d'étanchéité
DE1223212B (de) * 1962-09-29 1966-08-18 Johannes Erhard Dichtung fuer Absperrschieber
US3179372A (en) * 1963-02-14 1965-04-20 Norman U Vaudreuil Gate valve
FR1482916A (fr) * 1966-03-25 1967-06-02 Perfectionnements aux vannes dont l'opercule porte un soufflet en matière plastique
FR1603656A (de) * 1968-12-26 1971-05-10
GB1379675A (en) * 1972-06-09 1975-01-08 Montgomerie J B Gate valve
DE2657205A1 (de) * 1976-12-17 1978-06-22 Lothar Gross Dichtungselement, insbesondere fuer durchgangsventile o.dgl.
US4531539A (en) * 1981-11-23 1985-07-30 General Signal Corporation Control valve for flow of solids
US4483514A (en) * 1982-04-08 1984-11-20 International Telephone And Telegraph Corporation Gate member for resilient-seated gate valve
US4694634A (en) * 1985-09-16 1987-09-22 The Babcock & Wilcox Company Vacuum sealing device for insulated steam injection tubing
DE3717724A1 (de) * 1987-05-26 1988-12-08 Schertler Siegfried Ventilschieber mit einem schiebergehaeuse
JPS63312574A (ja) * 1987-06-11 1988-12-21 Nippon Kentetsu Co Ltd 真空装置のゲ−トバルブ装置
DE3801998C1 (de) * 1988-01-23 1989-05-18 Schertler, Siegfried, Haag, Ch
JPH01261573A (ja) * 1988-04-08 1989-10-18 Kokusai Electric Co Ltd 真空仕切弁
DE3831249A1 (de) * 1988-09-14 1990-03-22 Schertler Siegfried Ventilschieber
US5058861A (en) * 1990-02-26 1991-10-22 Baumann Hans D Bellows seal and method for assembling

Also Published As

Publication number Publication date
EP0565786B1 (de) 1998-03-25
DE69224895D1 (de) 1998-04-30
US5271602A (en) 1993-12-21
EP0565786A1 (de) 1993-10-20

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: VALQUA SEIKI,LTD.,, TOKIO/TOKYO, JP

8339 Ceased/non-payment of the annual fee