DE69224193D1 - Kapazitiever sensor zum schichtdickenmessen - Google Patents
Kapazitiever sensor zum schichtdickenmessenInfo
- Publication number
- DE69224193D1 DE69224193D1 DE69224193T DE69224193T DE69224193D1 DE 69224193 D1 DE69224193 D1 DE 69224193D1 DE 69224193 T DE69224193 T DE 69224193T DE 69224193 T DE69224193 T DE 69224193T DE 69224193 D1 DE69224193 D1 DE 69224193D1
- Authority
- DE
- Germany
- Prior art keywords
- measuring thickness
- capacity sensor
- capacity
- sensor
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
- G01B7/08—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using capacitive means
- G01B7/087—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using capacitive means for measuring of objects while moving
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB919111140A GB9111140D0 (en) | 1991-05-23 | 1991-05-23 | Film thickness measuring capacitive sensor |
PCT/GB1992/000934 WO1992020989A1 (en) | 1991-05-23 | 1992-05-22 | Film thickness measuring capacitive sensors |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69224193D1 true DE69224193D1 (de) | 1998-02-26 |
DE69224193T2 DE69224193T2 (de) | 1998-05-07 |
Family
ID=10695467
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69224193T Expired - Fee Related DE69224193T2 (de) | 1991-05-23 | 1992-05-22 | Kapazitiever sensor zum schichtdickenmessen |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0591239B1 (de) |
DE (1) | DE69224193T2 (de) |
GB (1) | GB9111140D0 (de) |
WO (1) | WO1992020989A1 (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2690244B1 (fr) * | 1992-01-10 | 1997-03-21 | Leteurtre Jean | Procede et/ou dispositif de mise en óoeuvre du procede de mesure capacitive susceptible d'effectuer des mesures dimensionnelles sans contact et de tres haute precision en milieu industriel. |
EP0686826A1 (de) * | 1994-06-10 | 1995-12-13 | FRIEDRICH THEYSOHN GmbH | Messvorrichtung für die berührungslose Dickenmessung von bewegten Langprodukten, insbesondere Flachprodukten |
DE102004039652A1 (de) | 2004-08-11 | 2006-02-23 | Octagon Process Technology Gmbh | Dickenprofilmessgerät für dünnschichtige Messobjekte |
DE502005003829D1 (de) | 2005-01-13 | 2008-06-05 | Plast Control Gmbh | Vorrichtung und Verfahren zur kapazitiven Vermessung von Materialien |
DE102005051675B3 (de) | 2005-10-28 | 2007-04-19 | Windmöller & Hölscher Kg | Foliendickensensor mit porösem Bläser |
DE102007034415A1 (de) | 2007-07-20 | 2009-01-22 | Windmöller & Hölscher Kg | Foliendickensensor mit porösem Bläser |
ITMI20131703A1 (it) * | 2013-10-15 | 2015-04-16 | Syncro S R L | Metodo di misura dello spessore di un film di materiale dielettrico noto e relativo dispositivo di misura |
US10209054B2 (en) | 2016-04-20 | 2019-02-19 | Duke University | Non-invasive thickness measurement using capacitance measurement |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4450404A (en) * | 1981-10-26 | 1984-05-22 | Accuray Corporation | Pneumatic surface follower with negative feedback of a variable force counteracting the levitating force |
US4498045A (en) * | 1982-05-27 | 1985-02-05 | Motorola, Inc. | Apparatus and method for determining surface contour of piezoelectric wafers |
SE434997B (sv) * | 1983-01-12 | 1984-08-27 | Per Roode Berglund | Anordning for metning av tjockleken av en rorlig bana |
DE3612914A1 (de) * | 1986-04-17 | 1987-10-22 | Heidelberger Druckmasch Ag | Vorrichtung zum messen der dicke von papier oder dergleichen |
DE4011646A1 (de) * | 1990-04-11 | 1991-10-24 | Micro Epsilon Messtechnik | Dickenmesseinrichtung |
-
1991
- 1991-05-23 GB GB919111140A patent/GB9111140D0/en active Pending
-
1992
- 1992-05-22 WO PCT/GB1992/000934 patent/WO1992020989A1/en active IP Right Grant
- 1992-05-22 EP EP92910517A patent/EP0591239B1/de not_active Expired - Lifetime
- 1992-05-22 DE DE69224193T patent/DE69224193T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE69224193T2 (de) | 1998-05-07 |
EP0591239A1 (de) | 1994-04-13 |
WO1992020989A1 (en) | 1992-11-26 |
GB9111140D0 (en) | 1991-07-17 |
EP0591239B1 (de) | 1998-01-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8363 | Opposition against the patent | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: SUSSEX GAUGING LTD., LEWES, EAST SUSSEX, GB |
|
8365 | Fully valid after opposition proceedings | ||
8339 | Ceased/non-payment of the annual fee |