DE69224193D1 - Kapazitiever sensor zum schichtdickenmessen - Google Patents

Kapazitiever sensor zum schichtdickenmessen

Info

Publication number
DE69224193D1
DE69224193D1 DE69224193T DE69224193T DE69224193D1 DE 69224193 D1 DE69224193 D1 DE 69224193D1 DE 69224193 T DE69224193 T DE 69224193T DE 69224193 T DE69224193 T DE 69224193T DE 69224193 D1 DE69224193 D1 DE 69224193D1
Authority
DE
Germany
Prior art keywords
measuring thickness
capacity sensor
capacity
sensor
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69224193T
Other languages
English (en)
Other versions
DE69224193T2 (de
Inventor
Anthony Haynes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SUSSEX GAUGING LTD., LEWES, EAST SUSSEX, GB
Original Assignee
SUSSEX INSTR PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=10695467&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69224193(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by SUSSEX INSTR PLC filed Critical SUSSEX INSTR PLC
Publication of DE69224193D1 publication Critical patent/DE69224193D1/de
Application granted granted Critical
Publication of DE69224193T2 publication Critical patent/DE69224193T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/08—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using capacitive means
    • G01B7/087—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using capacitive means for measuring of objects while moving

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
DE69224193T 1991-05-23 1992-05-22 Kapazitiever sensor zum schichtdickenmessen Expired - Fee Related DE69224193T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB919111140A GB9111140D0 (en) 1991-05-23 1991-05-23 Film thickness measuring capacitive sensor
PCT/GB1992/000934 WO1992020989A1 (en) 1991-05-23 1992-05-22 Film thickness measuring capacitive sensors

Publications (2)

Publication Number Publication Date
DE69224193D1 true DE69224193D1 (de) 1998-02-26
DE69224193T2 DE69224193T2 (de) 1998-05-07

Family

ID=10695467

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69224193T Expired - Fee Related DE69224193T2 (de) 1991-05-23 1992-05-22 Kapazitiever sensor zum schichtdickenmessen

Country Status (4)

Country Link
EP (1) EP0591239B1 (de)
DE (1) DE69224193T2 (de)
GB (1) GB9111140D0 (de)
WO (1) WO1992020989A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2690244B1 (fr) * 1992-01-10 1997-03-21 Leteurtre Jean Procede et/ou dispositif de mise en óoeuvre du procede de mesure capacitive susceptible d'effectuer des mesures dimensionnelles sans contact et de tres haute precision en milieu industriel.
EP0686826A1 (de) * 1994-06-10 1995-12-13 FRIEDRICH THEYSOHN GmbH Messvorrichtung für die berührungslose Dickenmessung von bewegten Langprodukten, insbesondere Flachprodukten
DE102004039652A1 (de) 2004-08-11 2006-02-23 Octagon Process Technology Gmbh Dickenprofilmessgerät für dünnschichtige Messobjekte
DE502005003829D1 (de) 2005-01-13 2008-06-05 Plast Control Gmbh Vorrichtung und Verfahren zur kapazitiven Vermessung von Materialien
DE102005051675B3 (de) 2005-10-28 2007-04-19 Windmöller & Hölscher Kg Foliendickensensor mit porösem Bläser
DE102007034415A1 (de) 2007-07-20 2009-01-22 Windmöller & Hölscher Kg Foliendickensensor mit porösem Bläser
ITMI20131703A1 (it) * 2013-10-15 2015-04-16 Syncro S R L Metodo di misura dello spessore di un film di materiale dielettrico noto e relativo dispositivo di misura
US10209054B2 (en) 2016-04-20 2019-02-19 Duke University Non-invasive thickness measurement using capacitance measurement

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4450404A (en) * 1981-10-26 1984-05-22 Accuray Corporation Pneumatic surface follower with negative feedback of a variable force counteracting the levitating force
US4498045A (en) * 1982-05-27 1985-02-05 Motorola, Inc. Apparatus and method for determining surface contour of piezoelectric wafers
SE434997B (sv) * 1983-01-12 1984-08-27 Per Roode Berglund Anordning for metning av tjockleken av en rorlig bana
DE3612914A1 (de) * 1986-04-17 1987-10-22 Heidelberger Druckmasch Ag Vorrichtung zum messen der dicke von papier oder dergleichen
DE4011646A1 (de) * 1990-04-11 1991-10-24 Micro Epsilon Messtechnik Dickenmesseinrichtung

Also Published As

Publication number Publication date
DE69224193T2 (de) 1998-05-07
EP0591239A1 (de) 1994-04-13
WO1992020989A1 (en) 1992-11-26
GB9111140D0 (en) 1991-07-17
EP0591239B1 (de) 1998-01-21

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8327 Change in the person/name/address of the patent owner

Owner name: SUSSEX GAUGING LTD., LEWES, EAST SUSSEX, GB

8365 Fully valid after opposition proceedings
8339 Ceased/non-payment of the annual fee