DE69222049D1 - Diffusionspumpe - Google Patents

Diffusionspumpe

Info

Publication number
DE69222049D1
DE69222049D1 DE69222049T DE69222049T DE69222049D1 DE 69222049 D1 DE69222049 D1 DE 69222049D1 DE 69222049 T DE69222049 T DE 69222049T DE 69222049 T DE69222049 T DE 69222049T DE 69222049 D1 DE69222049 D1 DE 69222049D1
Authority
DE
Germany
Prior art keywords
diffusion pump
diffusion
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69222049T
Other languages
English (en)
Other versions
DE69222049T2 (de
Inventor
John H Broadhurst
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority claimed from EP92305237A external-priority patent/EP0601242B1/de
Application granted granted Critical
Publication of DE69222049D1 publication Critical patent/DE69222049D1/de
Publication of DE69222049T2 publication Critical patent/DE69222049T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

DE1992622049 1992-06-08 1992-06-08 Diffusionspumpe Expired - Fee Related DE69222049T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP92305237A EP0601242B1 (de) 1991-04-15 1992-06-08 Diffusionspumpe

Publications (2)

Publication Number Publication Date
DE69222049D1 true DE69222049D1 (de) 1997-10-09
DE69222049T2 DE69222049T2 (de) 1998-01-02

Family

ID=8211394

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1992622049 Expired - Fee Related DE69222049T2 (de) 1992-06-08 1992-06-08 Diffusionspumpe

Country Status (1)

Country Link
DE (1) DE69222049T2 (de)

Also Published As

Publication number Publication date
DE69222049T2 (de) 1998-01-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee