DE69208704D1 - Resonanzdruckfühler - Google Patents

Resonanzdruckfühler

Info

Publication number
DE69208704D1
DE69208704D1 DE69208704T DE69208704T DE69208704D1 DE 69208704 D1 DE69208704 D1 DE 69208704D1 DE 69208704 T DE69208704 T DE 69208704T DE 69208704 T DE69208704 T DE 69208704T DE 69208704 D1 DE69208704 D1 DE 69208704D1
Authority
DE
Germany
Prior art keywords
pressure sensor
resonance pressure
resonance
sensor
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69208704T
Other languages
English (en)
Other versions
DE69208704T2 (de
Inventor
Michel Dufour
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Application granted granted Critical
Publication of DE69208704D1 publication Critical patent/DE69208704D1/de
Publication of DE69208704T2 publication Critical patent/DE69208704T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0019—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a semiconductive element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
DE69208704T 1991-03-27 1992-03-25 Resonanzdruckfühler Expired - Lifetime DE69208704T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9103708A FR2674627B1 (fr) 1991-03-27 1991-03-27 Capteur de pression resonant.

Publications (2)

Publication Number Publication Date
DE69208704D1 true DE69208704D1 (de) 1996-04-11
DE69208704T2 DE69208704T2 (de) 1996-10-02

Family

ID=9411182

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69208704T Expired - Lifetime DE69208704T2 (de) 1991-03-27 1992-03-25 Resonanzdruckfühler

Country Status (5)

Country Link
US (1) US5317917A (de)
EP (1) EP0506554B1 (de)
JP (1) JPH0666655A (de)
DE (1) DE69208704T2 (de)
FR (1) FR2674627B1 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5526692A (en) * 1993-12-29 1996-06-18 Keiser Corporation Sensor
GB9524624D0 (en) * 1995-12-01 1996-01-31 Weston Aerospace Ltd Pressure sensor
GB2307744B (en) * 1995-12-01 1999-12-01 Solartron Group Ltd Pressure sensor
US5873840A (en) * 1997-08-21 1999-02-23 Neff; Samuel R. Intracranial pressure monitoring system
US6182513B1 (en) 1998-12-23 2001-02-06 Radi Medical Systems Ab Resonant sensor and method of making a pressure sensor comprising a resonant beam structure
US6165135A (en) * 1999-07-14 2000-12-26 Neff; Samuel R. System and method of interrogating implanted passive resonant-circuit devices
US6598481B1 (en) * 2000-03-30 2003-07-29 Halliburton Energy Services, Inc. Quartz pressure transducer containing microelectronics
DE10034390C2 (de) * 2000-07-14 2003-06-26 Eads Deutschland Gmbh Drucksensor und Verfahren zu seiner Herstellung, sowie Verbrennungskraftmaschine mit Drucksensor
US6532822B1 (en) * 2000-09-26 2003-03-18 Clark Davis Boyd Resonant torsion pendulum pressure sensor
US7017420B2 (en) * 2001-06-08 2006-03-28 Silex Microsystems Ab Miniaturized pressure sensor
JP2003083829A (ja) * 2001-09-12 2003-03-19 Toyo Commun Equip Co Ltd 圧力センサ
US7424376B2 (en) * 2002-07-25 2008-09-09 Carpenter Brent L Precise pressure measurement by vibrating an oval conduit along different cross-sectional axes
US8162839B2 (en) * 2003-08-27 2012-04-24 Microtech Medical Technologies Ltd. Protected passive resonating sensors
US7415883B2 (en) * 2004-06-28 2008-08-26 Zuli Holdings Ltd Method for protecting resonating sensors and open protected resonating sensors
US7800595B2 (en) * 2003-12-18 2010-09-21 3M Innovative Properties Company Piezoelectric transducer
DE102004020914B4 (de) * 2004-04-28 2008-05-29 Max Frank Gmbh & Co Kg Kragplattenanschlusselement
US7490519B2 (en) * 2005-09-30 2009-02-17 General Electric Company System and method for sensing differential pressure
US20070236213A1 (en) * 2006-03-30 2007-10-11 Paden Bradley E Telemetry method and apparatus using magnetically-driven mems resonant structure
US7784350B2 (en) * 2007-02-07 2010-08-31 Halliburton Energy Services, Inc. Downhole transducer with adjacent heater
DE102007000200A1 (de) * 2007-04-03 2008-10-09 Invendo Medical Gmbh Druckmesseinrichtung
JP4973718B2 (ja) * 2009-01-27 2012-07-11 セイコーエプソン株式会社 圧力検出ユニット、及び圧力センサー
FR2977319B1 (fr) 2011-07-01 2014-03-14 Commissariat Energie Atomique Dispositif de mesure de pression a sensiblite optimisee
US9861524B2 (en) * 2013-03-14 2018-01-09 New Jersey Institute Of Technology Smart shunt devices and methods
FR3037397B1 (fr) * 2015-06-12 2017-06-16 Sagem Defense Securite Dispositif de detection de pression a decouplage mecanique
FR3098810B1 (fr) * 2019-07-18 2021-10-15 Commissariat Energie Atomique Liaison mécanique pour dispositif MEMS et NEMS de mesure d'une variation de pression et dispositif comprenant une telle liaison mécanique

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4406966A (en) * 1980-01-28 1983-09-27 Paroscientific, Inc. Isolating and temperature compensating system for resonators
US4382385A (en) * 1980-04-17 1983-05-10 Paroscientific, Inc. Digital differential pressure transducer
FR2509856A1 (fr) * 1981-07-20 1983-01-21 Crouzet Sa Capteur de pression differentielle
GB2215053B (en) * 1988-02-13 1991-09-11 Stc Plc Transducer device

Also Published As

Publication number Publication date
FR2674627B1 (fr) 1994-04-29
DE69208704T2 (de) 1996-10-02
FR2674627A1 (fr) 1992-10-02
JPH0666655A (ja) 1994-03-11
US5317917A (en) 1994-06-07
EP0506554B1 (de) 1996-03-06
EP0506554A1 (de) 1992-09-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition