DE69203620D1 - Verfahren zur Herstellung einphasiger TlCaBaCuO-Dünnschichten. - Google Patents

Verfahren zur Herstellung einphasiger TlCaBaCuO-Dünnschichten.

Info

Publication number
DE69203620D1
DE69203620D1 DE69203620T DE69203620T DE69203620D1 DE 69203620 D1 DE69203620 D1 DE 69203620D1 DE 69203620 T DE69203620 T DE 69203620T DE 69203620 T DE69203620 T DE 69203620T DE 69203620 D1 DE69203620 D1 DE 69203620D1
Authority
DE
Germany
Prior art keywords
tlcabacuo
phase
production
thin films
films
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69203620T
Other languages
English (en)
Other versions
DE69203620T2 (de
Inventor
Victor Y Lee
Wen Y Lee
Jesse R Salem
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of DE69203620D1 publication Critical patent/DE69203620D1/de
Application granted granted Critical
Publication of DE69203620T2 publication Critical patent/DE69203620T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0661—Processes performed after copper oxide formation, e.g. patterning

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
DE69203620T 1991-01-29 1992-01-23 Verfahren zur Herstellung einphasiger TlCaBaCuO-Dünnschichten. Expired - Fee Related DE69203620T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US64738291A 1991-01-29 1991-01-29

Publications (2)

Publication Number Publication Date
DE69203620D1 true DE69203620D1 (de) 1995-08-31
DE69203620T2 DE69203620T2 (de) 1996-03-14

Family

ID=24596774

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69203620T Expired - Fee Related DE69203620T2 (de) 1991-01-29 1992-01-23 Verfahren zur Herstellung einphasiger TlCaBaCuO-Dünnschichten.

Country Status (3)

Country Link
EP (1) EP0497503B1 (de)
JP (1) JPH04310521A (de)
DE (1) DE69203620T2 (de)

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2817170B2 (ja) * 1988-02-25 1998-10-27 住友電気工業株式会社 超電導材料の製造方法
JPH0672069B2 (ja) * 1988-05-11 1994-09-14 松下電器産業株式会社 超電導体の製造方法
JPH0286014A (ja) * 1988-06-17 1990-03-27 Sumitomo Electric Ind Ltd 複合酸化物超電導薄膜と、その成膜方法
JPH0238302A (ja) * 1988-07-29 1990-02-07 Hitachi Ltd 超電導薄膜形成方法
US5139998A (en) * 1988-08-31 1992-08-18 Superconductor Technologies, Inc. Controlled thallous oxide evaporation for thallium superconductor films and reactor design
ATE135134T1 (de) * 1988-08-31 1996-03-15 Superconductor Tech Supraleitendes erzeugnis enthaltend thallium
JPH02133320A (ja) * 1988-11-14 1990-05-22 Hitachi Ltd 超電導薄膜の作成方法
JPH02170478A (ja) * 1988-12-23 1990-07-02 Hitachi Ltd 超電導薄膜素子の形成方法
JP2783845B2 (ja) * 1989-05-31 1998-08-06 三洋電機株式会社 酸化物超電導薄膜の製造方法
US5096881A (en) * 1990-03-15 1992-03-17 The University Of Arkansas Preparation of a superconducting Tl2 Ca2 Ba2 Cu3 O.sub.x2 O3 vapor

Also Published As

Publication number Publication date
EP0497503A3 (en) 1992-12-30
EP0497503A2 (de) 1992-08-05
JPH04310521A (ja) 1992-11-02
EP0497503B1 (de) 1995-07-26
DE69203620T2 (de) 1996-03-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee