DE69203280D1 - Verschiebungsvorrichtung. - Google Patents

Verschiebungsvorrichtung.

Info

Publication number
DE69203280D1
DE69203280D1 DE69203280T DE69203280T DE69203280D1 DE 69203280 D1 DE69203280 D1 DE 69203280D1 DE 69203280 T DE69203280 T DE 69203280T DE 69203280 T DE69203280 T DE 69203280T DE 69203280 D1 DE69203280 D1 DE 69203280D1
Authority
DE
Germany
Prior art keywords
displacement device
displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69203280T
Other languages
English (en)
Other versions
DE69203280T2 (de
Inventor
Marinus Josephus Jakobus Dona
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronics NV filed Critical Philips Electronics NV
Publication of DE69203280D1 publication Critical patent/DE69203280D1/de
Application granted granted Critical
Publication of DE69203280T2 publication Critical patent/DE69203280T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J7/00—Micromanipulators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
    • G—PHYSICS
    • G12—INSTRUMENT DETAILS
    • G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Robotics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Micromachines (AREA)
  • Control Of Position Or Direction (AREA)
DE69203280T 1991-04-29 1992-04-21 Verschiebungsvorrichtung. Expired - Fee Related DE69203280T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP91201023 1991-04-29

Publications (2)

Publication Number Publication Date
DE69203280D1 true DE69203280D1 (de) 1995-08-10
DE69203280T2 DE69203280T2 (de) 1996-03-07

Family

ID=8207629

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69203280T Expired - Fee Related DE69203280T2 (de) 1991-04-29 1992-04-21 Verschiebungsvorrichtung.

Country Status (4)

Country Link
US (1) US5252884A (de)
EP (1) EP0511704B1 (de)
JP (1) JPH05173638A (de)
DE (1) DE69203280T2 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5341056A (en) * 1991-01-18 1994-08-23 The United States Of America As Represented The Secretary Of The Navy Magnetostrictive motor system
US5432395A (en) * 1993-08-02 1995-07-11 Bonneville Scientific Incorporated Direct-drive field actuator motors
US5589723A (en) * 1994-03-29 1996-12-31 Minolta Co., Ltd. Driving apparatus using transducer
US5631824A (en) * 1994-05-26 1997-05-20 Polytechnic University Feedback control apparatus and method thereof for compensating for changes in structural frequencies
US6154000A (en) * 1994-09-07 2000-11-28 Omnitek Research & Development, Inc. Apparatus for providing a controlled deflection and/or actuator apparatus
US5604413A (en) * 1994-09-07 1997-02-18 Polytechnic University Apparatus for improving operational performance of a machine or device
US6359370B1 (en) * 1995-02-28 2002-03-19 New Jersey Institute Of Technology Piezoelectric multiple degree of freedom actuator
US5786654A (en) * 1995-06-08 1998-07-28 Minolta Co., Ltd. Movable stage utilizing electromechanical transducer
US5705878A (en) * 1995-11-29 1998-01-06 Lewis; Aaron Flat scanning stage for scanned probe microscopy
GB2324650A (en) * 1997-04-25 1998-10-28 Leica Lithography Systems Ltd Pattern-writing machine
DE19817038A1 (de) * 1998-04-17 1999-10-21 Philips Patentverwaltung Piezomotor
DE19833905C2 (de) * 1998-07-22 2002-05-08 Hahn Meitner Inst Berlin Gmbh Piezoelektrische Verstelleinrichtung für die Positonierung eines Probentisches
DE19916277A1 (de) * 1999-04-12 2000-10-26 Forschungszentrum Juelich Gmbh Teleskopartiger Mikromanipulator mit Piezomaterialien
DE10110310B4 (de) * 2001-03-03 2013-08-08 MOD Produktions GmbH Manipulator und Verfahren zum Betrieb eines Manipulators im Submikro-Bereich
JP4637446B2 (ja) * 2002-09-06 2011-02-23 ケミプロ化成株式会社 全固体アクチュエータ
US7180662B2 (en) * 2004-04-12 2007-02-20 Applied Scientific Instrumentation Inc. Stage assembly and method for optical microscope including Z-axis stage and piezoelectric actuator for rectilinear translation of Z stage
US7187107B2 (en) * 2004-12-29 2007-03-06 Industrial Technology Research Institute Closed-loop feedback control positioning stage
NL2013783B1 (en) * 2014-11-12 2016-10-07 Phenom-World Holding B V Sample stage.
US10100907B2 (en) * 2016-04-04 2018-10-16 Nec Corporation Deformation motion mechanism
WO2017196638A2 (en) * 2016-05-13 2017-11-16 Electro Scientific Industries, Inc. Alignment system and method of using the same
CN107610994B (zh) * 2017-08-10 2019-06-07 江苏鲁汶仪器有限公司 一种离子束刻蚀系统
JP7287374B2 (ja) * 2020-10-12 2023-06-06 トヨタ自動車株式会社 アクチュエータ

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3135207A (en) * 1955-07-05 1964-06-02 Univ Cincinnati Res Foundation Method and apparatus for displacing dielectric liquids
US3317760A (en) * 1963-10-31 1967-05-02 George M Coleman Electrolyte-reservoir coupler
US3889086A (en) * 1972-10-02 1975-06-10 Arsene N Lucian Transducers utilizing electrocapillary action
DE2806464C3 (de) * 1978-02-15 1980-09-11 Garching Instrumente, Gesellschaft Zur Industriellen Nutzung Von Forschungsergebnissen Mbh, 8000 Muenchen Elektrisches Bauelement
US4678955A (en) * 1986-04-18 1987-07-07 Rca Corporation Piezoelectric positioning device
JP2709318B2 (ja) * 1988-08-31 1998-02-04 セイコープレシジョン株式会社 液晶パネルおよび液晶パネルを用いた変換装置
JP2965602B2 (ja) * 1990-02-26 1999-10-18 日立金属株式会社 積層型変位素子

Also Published As

Publication number Publication date
US5252884A (en) 1993-10-12
JPH05173638A (ja) 1993-07-13
DE69203280T2 (de) 1996-03-07
EP0511704B1 (de) 1995-07-05
EP0511704A1 (de) 1992-11-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: KONINKLIJKE PHILIPS ELECTRONICS N.V., EINDHOVEN, N

8339 Ceased/non-payment of the annual fee