DE69129289T2 - Arrangement for the treatment of exhaust gases containing organic halogen compounds - Google Patents

Arrangement for the treatment of exhaust gases containing organic halogen compounds

Info

Publication number
DE69129289T2
DE69129289T2 DE69129289T DE69129289T DE69129289T2 DE 69129289 T2 DE69129289 T2 DE 69129289T2 DE 69129289 T DE69129289 T DE 69129289T DE 69129289 T DE69129289 T DE 69129289T DE 69129289 T2 DE69129289 T2 DE 69129289T2
Authority
DE
Germany
Prior art keywords
arrangement
treatment
exhaust gases
containing organic
halogen compounds
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69129289T
Other languages
German (de)
Other versions
DE69129289D1 (en
Inventor
Masahiro Tajima
Masashi Harada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tosoh Corp
Original Assignee
Tosoh Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tosoh Corp filed Critical Tosoh Corp
Application granted granted Critical
Publication of DE69129289D1 publication Critical patent/DE69129289D1/en
Publication of DE69129289T2 publication Critical patent/DE69129289T2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J27/00—Catalysts comprising the elements or compounds of halogens, sulfur, selenium, tellurium, phosphorus or nitrogen; Catalysts comprising carbon compounds
    • B01J27/14—Phosphorus; Compounds thereof
    • B01J27/16—Phosphorus; Compounds thereof containing oxygen, i.e. acids, anhydrides and their derivates with N, S, B or halogens without carriers or on carriers based on C, Si, Al or Zr; also salts of Si, Al and Zr
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/8659—Removing halogens or halogen compounds
    • B01D53/8662—Organic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J21/00—Catalysts comprising the elements, oxides, or hydroxides of magnesium, boron, aluminium, carbon, silicon, titanium, zirconium, or hafnium
    • B01J21/06—Silicon, titanium, zirconium or hafnium; Oxides or hydroxides thereof
    • B01J21/063—Titanium; Oxides or hydroxides thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J21/00—Catalysts comprising the elements, oxides, or hydroxides of magnesium, boron, aluminium, carbon, silicon, titanium, zirconium, or hafnium
    • B01J21/06—Silicon, titanium, zirconium or hafnium; Oxides or hydroxides thereof
    • B01J21/066—Zirconium or hafnium; Oxides or hydroxides thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/38—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of noble metals
    • B01J23/54—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of noble metals combined with metals, oxides or hydroxides provided for in groups B01J23/02 - B01J23/36
    • B01J23/56—Platinum group metals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/38—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of noble metals
    • B01J23/54—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of noble metals combined with metals, oxides or hydroxides provided for in groups B01J23/02 - B01J23/36
    • B01J23/56—Platinum group metals
    • B01J23/64—Platinum group metals with arsenic, antimony, bismuth, vanadium, niobium, tantalum, polonium, chromium, molybdenum, tungsten, manganese, technetium or rhenium
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/70—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper
    • B01J23/76—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper combined with metals, oxides or hydroxides provided for in groups B01J23/02 - B01J23/36
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/70—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper
    • B01J23/76—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper combined with metals, oxides or hydroxides provided for in groups B01J23/02 - B01J23/36
    • B01J23/84—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper combined with metals, oxides or hydroxides provided for in groups B01J23/02 - B01J23/36 with arsenic, antimony, bismuth, vanadium, niobium, tantalum, polonium, chromium, molybdenum, tungsten, manganese, technetium or rhenium
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J27/00—Catalysts comprising the elements or compounds of halogens, sulfur, selenium, tellurium, phosphorus or nitrogen; Catalysts comprising carbon compounds
    • B01J27/02—Sulfur, selenium or tellurium; Compounds thereof
    • B01J27/053—Sulfates
DE69129289T 1990-10-26 1991-10-25 Arrangement for the treatment of exhaust gases containing organic halogen compounds Expired - Lifetime DE69129289T2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP28714990 1990-10-26
JP3280299A JPH0663357A (en) 1990-10-26 1991-10-02 Device for treating waste gas containing organic halogen compounds

Publications (2)

Publication Number Publication Date
DE69129289D1 DE69129289D1 (en) 1998-05-28
DE69129289T2 true DE69129289T2 (en) 1998-09-24

Family

ID=26553715

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69129289T Expired - Lifetime DE69129289T2 (en) 1990-10-26 1991-10-25 Arrangement for the treatment of exhaust gases containing organic halogen compounds

Country Status (4)

Country Link
US (1) US5238656A (en)
EP (1) EP0485787B1 (en)
JP (1) JPH0663357A (en)
DE (1) DE69129289T2 (en)

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JP4011116B2 (en) 1995-06-06 2007-11-21 ビーピー・コーポレーション・ノース・アメリカ・インコーポレーテッド Catalytic exhaust gas treatment system for reduction of volatile chemical emissions
JP3266759B2 (en) * 1995-06-14 2002-03-18 株式会社日立製作所 Method and apparatus for treating organic halogen compounds
US6652817B1 (en) 1995-06-14 2003-11-25 Hitachi, Ltd. Apparatus for processing organohalogen compounds
JP2985762B2 (en) * 1996-03-18 1999-12-06 日本電気株式会社 Exhaust gas processing method and processing apparatus
JP3900566B2 (en) * 1996-11-19 2007-04-04 昭和電工株式会社 Catalytic cracking of fluorinated hydrocarbons
US5955037A (en) * 1996-12-31 1999-09-21 Atmi Ecosys Corporation Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases
US20010001652A1 (en) 1997-01-14 2001-05-24 Shuichi Kanno Process for treating flourine compound-containing gas
JP3593875B2 (en) * 1997-03-24 2004-11-24 昭和電工株式会社 Method for catalytic decomposition of perfluoro compounds
JP3900579B2 (en) * 1997-03-24 2007-04-04 昭和電工株式会社 Decomposition method of hydrofluorocarbon
AU7642598A (en) * 1997-04-12 1998-11-11 Firma Adelmann Ag Process for decomposing halogenated hydrocarbons with a catalyst, its productionand installation for carrying out the process
JP4596432B2 (en) * 1997-06-20 2010-12-08 昭和電工株式会社 Method and apparatus for decomposing fluorine-containing compounds
EP0885648B1 (en) * 1997-06-20 2004-01-07 Hitachi, Ltd. A treatment method for decomposing fluorine compounds, and apparatus and use of a catalyst therefor
TW550112B (en) 1997-11-14 2003-09-01 Hitachi Ltd Method for processing perfluorocarbon, and apparatus therefor
KR100637884B1 (en) * 1998-08-17 2006-10-23 가부시키가이샤 에바라 세이사꾸쇼 Method and apparatus for treating waste gas containing fluorochemical
WO2000074822A1 (en) * 1999-06-07 2000-12-14 Nkk Corporation Method and apparatus for decomposing halogenated hydrocarbon gas
US6423284B1 (en) * 1999-10-18 2002-07-23 Advanced Technology Materials, Inc. Fluorine abatement using steam injection in oxidation treatment of semiconductor manufacturing effluent gases
US6638486B2 (en) * 2000-03-08 2003-10-28 Nippon Shokubai Co., Ltd. Catalyst for purification of exhaust gases, production process therefor, and process for purification of exhaust gases
US6905663B1 (en) * 2000-04-18 2005-06-14 Jose I. Arno Apparatus and process for the abatement of semiconductor manufacturing effluents containing fluorine gas
JP3889932B2 (en) * 2001-02-02 2007-03-07 株式会社荏原製作所 Method and apparatus for treating gas containing fluorine-containing compound and CO
JP4502349B2 (en) * 2001-02-23 2010-07-14 三井造船株式会社 Exhaust gas treatment apparatus and exhaust gas treatment method
JP2003159513A (en) * 2001-09-13 2003-06-03 Seiko Epson Corp Method and apparatus for detoxifying organohalide gas and system and method for manufacturing semiconductor device
JP2005021786A (en) * 2003-07-01 2005-01-27 Tsurui Chemical Co Ltd Apparatus for removing and detoxicating organic halogen compound
JP2006068667A (en) * 2004-09-03 2006-03-16 Osada Giken Co Ltd Apparatus for treating combustion exhaust gas
US7569193B2 (en) 2003-12-19 2009-08-04 Applied Materials, Inc. Apparatus and method for controlled combustion of gaseous pollutants
US7736599B2 (en) 2004-11-12 2010-06-15 Applied Materials, Inc. Reactor design to reduce particle deposition during process abatement
JP4680743B2 (en) * 2005-10-12 2011-05-11 シャープ株式会社 Toxic gas treatment equipment
EP1954926A2 (en) 2005-10-31 2008-08-13 Applied Materials, Inc. Process abatement reactor
JP5318333B2 (en) * 2006-05-11 2013-10-16 昭和電工株式会社 Method and apparatus for treating fluorine compound-containing gas
JP2008207139A (en) * 2007-02-28 2008-09-11 Hitachi Ltd Exhaust gas treating method and device
JP4845812B2 (en) * 2007-06-01 2011-12-28 株式会社荏原製作所 Equipment for treating exhaust gas containing fluorine-containing compounds
JP5448465B2 (en) * 2009-01-14 2014-03-19 株式会社トクヤマ Method for treating exhaust gas containing aliphatic halogenated hydrocarbons
JP5079832B2 (en) 2010-03-03 2012-11-21 東芝テック株式会社 Printing device
JP5626849B2 (en) * 2010-05-07 2014-11-19 学校法人 関西大学 Method for decomposing fluorine gas with zeolite
US20110318932A1 (en) * 2010-06-28 2011-12-29 Uop Llc Pyrolysis Methods, Catalysts, and Apparatuses for Treating and/or Detecting Gas Contaminants
KR102111914B1 (en) 2014-03-06 2020-05-18 어플라이드 머티어리얼스, 인코포레이티드 Plasma abatement of compounds containing heavy atoms
CN109621703B (en) * 2019-01-11 2021-08-27 四川大学 For enhanced biological removal of H2S iron oxide-biochar composite material and preparation method thereof
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Also Published As

Publication number Publication date
JPH0663357A (en) 1994-03-08
EP0485787A1 (en) 1992-05-20
US5238656A (en) 1993-08-24
DE69129289D1 (en) 1998-05-28
EP0485787B1 (en) 1998-04-22

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