DE69126768T2 - Linearmotorvorrichtung mit einem Bauteil zur Unterdrückung von Schwingungen - Google Patents

Linearmotorvorrichtung mit einem Bauteil zur Unterdrückung von Schwingungen

Info

Publication number
DE69126768T2
DE69126768T2 DE69126768T DE69126768T DE69126768T2 DE 69126768 T2 DE69126768 T2 DE 69126768T2 DE 69126768 T DE69126768 T DE 69126768T DE 69126768 T DE69126768 T DE 69126768T DE 69126768 T2 DE69126768 T2 DE 69126768T2
Authority
DE
Germany
Prior art keywords
magnetic field
vibration
linear motor
adjustable element
field generating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69126768T
Other languages
German (de)
English (en)
Other versions
DE69126768D1 (de
Inventor
Toshiaki Kagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Publication of DE69126768D1 publication Critical patent/DE69126768D1/de
Application granted granted Critical
Publication of DE69126768T2 publication Critical patent/DE69126768T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60L—PROPULSION OF ELECTRICALLY-PROPELLED VEHICLES; SUPPLYING ELECTRIC POWER FOR AUXILIARY EQUIPMENT OF ELECTRICALLY-PROPELLED VEHICLES; ELECTRODYNAMIC BRAKE SYSTEMS FOR VEHICLES IN GENERAL; MAGNETIC SUSPENSION OR LEVITATION FOR VEHICLES; MONITORING OPERATING VARIABLES OF ELECTRICALLY-PROPELLED VEHICLES; ELECTRIC SAFETY DEVICES FOR ELECTRICALLY-PROPELLED VEHICLES
    • B60L13/00—Electric propulsion for monorail vehicles, suspension vehicles or rack railways; Magnetic suspension or levitation for vehicles
    • B60L13/03—Electric propulsion by linear motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/03—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using magnetic or electromagnetic means
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G15/00—Apparatus for electrographic processes using a charge pattern
    • G03G15/04—Apparatus for electrographic processes using a charge pattern for exposing, i.e. imagewise exposure by optically projecting the original image on a photoconductive recording material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60L—PROPULSION OF ELECTRICALLY-PROPELLED VEHICLES; SUPPLYING ELECTRIC POWER FOR AUXILIARY EQUIPMENT OF ELECTRICALLY-PROPELLED VEHICLES; ELECTRODYNAMIC BRAKE SYSTEMS FOR VEHICLES IN GENERAL; MAGNETIC SUSPENSION OR LEVITATION FOR VEHICLES; MONITORING OPERATING VARIABLES OF ELECTRICALLY-PROPELLED VEHICLES; ELECTRIC SAFETY DEVICES FOR ELECTRICALLY-PROPELLED VEHICLES
    • B60L2200/00—Type of vehicles
    • B60L2200/26—Rail vehicles

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Transportation (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Control Of Linear Motors (AREA)
  • Linear Motors (AREA)
DE69126768T 1990-11-30 1991-11-29 Linearmotorvorrichtung mit einem Bauteil zur Unterdrückung von Schwingungen Expired - Lifetime DE69126768T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2338736A JP2752248B2 (ja) 1990-11-30 1990-11-30 リニアモータ装置

Publications (2)

Publication Number Publication Date
DE69126768D1 DE69126768D1 (de) 1997-08-14
DE69126768T2 true DE69126768T2 (de) 1998-02-05

Family

ID=18320979

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69126768T Expired - Lifetime DE69126768T2 (de) 1990-11-30 1991-11-29 Linearmotorvorrichtung mit einem Bauteil zur Unterdrückung von Schwingungen

Country Status (4)

Country Link
US (1) US5229670A (cg-RX-API-DMAC10.html)
EP (1) EP0488805B1 (cg-RX-API-DMAC10.html)
JP (1) JP2752248B2 (cg-RX-API-DMAC10.html)
DE (1) DE69126768T2 (cg-RX-API-DMAC10.html)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6246204B1 (en) * 1994-06-27 2001-06-12 Nikon Corporation Electromagnetic alignment and scanning apparatus
JP3136923B2 (ja) * 1994-10-28 2001-02-19 セイコーエプソン株式会社 パルスモータの制御装置
US5801462A (en) * 1995-03-31 1998-09-01 Minolta Co., Ltd. Linear motor and image reading apparatus
JP3453991B2 (ja) * 1995-03-31 2003-10-06 ミノルタ株式会社 リニアモータ
US5796186A (en) * 1995-03-31 1998-08-18 Minolta Co., Ltd. Linear motor
JPH08275500A (ja) * 1995-03-31 1996-10-18 Minolta Co Ltd リニアモータ
US6028376A (en) * 1997-04-22 2000-02-22 Canon Kabushiki Kaisha Positioning apparatus and exposure apparatus using the same
US20010003028A1 (en) 1997-09-19 2001-06-07 Nikon Corporation Scanning Exposure Method
US6012346A (en) * 1998-09-18 2000-01-11 New Hampshire Ball Bearing, Inc. Low vibration motion translation system
US6239517B1 (en) * 1999-02-19 2001-05-29 Hitachi Koki Co., Ltd. Linear shuttle motor assembly and a controller therefor
TW546551B (en) * 1999-12-21 2003-08-11 Asml Netherlands Bv Balanced positioning system for use in lithographic apparatus
US20040119436A1 (en) * 2002-12-23 2004-06-24 Michael Binnard Method and apparatus for reducing countermass stroke with initial velocity
JP4473088B2 (ja) * 2004-10-07 2010-06-02 オークマ株式会社 リニアモータ
US9906092B2 (en) 2015-06-26 2018-02-27 Siemens Industry, Inc. Electrodynamic machines, and method for reducing vibration of an electrodynamic machine

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5785567A (en) * 1980-11-14 1982-05-28 Hitachi Ltd Voice coil motor
US4516231A (en) * 1982-08-26 1985-05-07 Rca Corporation Optical disc system having momentum compensation
KR910007482B1 (ko) * 1988-03-18 1991-09-26 가부시끼가이샤 히다찌세이사꾸쇼 리니어 액세스기구와 자기디스크장치
EP0393994B1 (en) * 1989-04-17 1994-06-15 SHARP Corporation A linear driving apparatus

Also Published As

Publication number Publication date
DE69126768D1 (de) 1997-08-14
EP0488805A2 (en) 1992-06-03
EP0488805B1 (en) 1997-07-09
EP0488805A3 (cg-RX-API-DMAC10.html) 1994-02-02
US5229670A (en) 1993-07-20
JPH04208095A (ja) 1992-07-29
JP2752248B2 (ja) 1998-05-18

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Legal Events

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8364 No opposition during term of opposition