DE69115477D1 - Interferometrisches system und verfahren - Google Patents

Interferometrisches system und verfahren

Info

Publication number
DE69115477D1
DE69115477D1 DE69115477T DE69115477T DE69115477D1 DE 69115477 D1 DE69115477 D1 DE 69115477D1 DE 69115477 T DE69115477 T DE 69115477T DE 69115477 T DE69115477 T DE 69115477T DE 69115477 D1 DE69115477 D1 DE 69115477D1
Authority
DE
Germany
Prior art keywords
energy
energy beam
emanating
interferometer
collector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69115477T
Other languages
English (en)
Other versions
DE69115477T2 (de
Inventor
Monty Glass
Timothy Dabbs
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commonwealth Scientific and Industrial Research Organization CSIRO
Original Assignee
Commonwealth Scientific and Industrial Research Organization CSIRO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commonwealth Scientific and Industrial Research Organization CSIRO filed Critical Commonwealth Scientific and Industrial Research Organization CSIRO
Application granted granted Critical
Publication of DE69115477D1 publication Critical patent/DE69115477D1/de
Publication of DE69115477T2 publication Critical patent/DE69115477T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Paper (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
DE69115477T 1990-04-23 1991-04-23 Interferometrisches system und verfahren Expired - Fee Related DE69115477T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
AUPJ977790 1990-04-23
AUPK471691 1991-02-21
PCT/AU1991/000154 WO1991016597A1 (en) 1990-04-23 1991-04-23 Interferometry systems and methods

Publications (2)

Publication Number Publication Date
DE69115477D1 true DE69115477D1 (de) 1996-01-25
DE69115477T2 DE69115477T2 (de) 1996-05-30

Family

ID=25643854

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69115477T Expired - Fee Related DE69115477T2 (de) 1990-04-23 1991-04-23 Interferometrisches system und verfahren

Country Status (7)

Country Link
US (1) US5617207A (de)
EP (1) EP0526547B1 (de)
JP (1) JPH05508707A (de)
AT (1) ATE131597T1 (de)
CA (1) CA2080023A1 (de)
DE (1) DE69115477T2 (de)
WO (1) WO1991016597A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9820493D0 (en) 1998-09-22 1998-11-11 Secr Defence Optical phase detector
DE10035835C2 (de) * 2000-07-21 2002-05-29 Med Laserzentrum Luebeck Gmbh Interferometrische Messanordnung zum Überlagern von mindestens zwei Lichtwellen
GB0112079D0 (en) * 2001-05-18 2001-07-11 Farfield Sensors Ltd Sensor Assembly
US7916985B2 (en) * 2007-02-19 2011-03-29 Kla-Tencor Corporation Integrated visible pilot beam for non-visible optical waveguide devices
US8830476B2 (en) * 2012-03-19 2014-09-09 The United States Of America As Represented By The Secretary Of The Army Methods and apparatuses for contact-free holographic imaging of aerosol particles

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3647275A (en) * 1970-09-09 1972-03-07 Optronics International Identification system using reference beam coded holograms
US4313185A (en) * 1979-12-31 1982-01-26 General Electric Company Acoustic vibration sensor and sensing system
EP0058801B1 (de) * 1980-12-17 1987-02-04 Imperial Chemical Industries Plc Messapparat mit Verwendung optischer Interferenztechnik
SE447601B (sv) * 1985-04-04 1986-11-24 Ericsson Telefon Ab L M Fiberoptisk interferometer
DE3623265C2 (de) * 1986-07-10 1994-11-03 Siemens Ag Verfahren und Anordnung zur faseroptischen Messung einer Weglänge oder einer Weglängenänderung
DE3709253A1 (de) * 1987-03-20 1988-09-29 Fraunhofer Ges Forschung Fabry-perot-sensor
JPS6412204A (en) * 1987-07-07 1989-01-17 Topcon Corp Optical ic interferometer
CA1325537C (en) * 1988-08-01 1993-12-28 Timothy Peter Dabbs Confocal microscope
AT392537B (de) * 1989-03-21 1991-04-25 Tabarelli Werner Interferometeranordnung, insbesondere zur entfernungs- bzw. verschiebewegbestimmung eines beweglichen bauteiles
JP2808136B2 (ja) * 1989-06-07 1998-10-08 キヤノン株式会社 測長方法及び装置
AT397307B (de) * 1990-03-02 1994-03-25 Tabarelli Werner Interferometer insbesondere zur längenmessung

Also Published As

Publication number Publication date
EP0526547A1 (de) 1993-02-10
CA2080023A1 (en) 1991-10-24
DE69115477T2 (de) 1996-05-30
US5617207A (en) 1997-04-01
EP0526547B1 (de) 1995-12-13
WO1991016597A1 (en) 1991-10-31
EP0526547A4 (en) 1993-06-09
ATE131597T1 (de) 1995-12-15
JPH05508707A (ja) 1993-12-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee