DE69113704D1 - Verfahren zur Herstellung optischer integrierter Komponenten. - Google Patents

Verfahren zur Herstellung optischer integrierter Komponenten.

Info

Publication number
DE69113704D1
DE69113704D1 DE69113704T DE69113704T DE69113704D1 DE 69113704 D1 DE69113704 D1 DE 69113704D1 DE 69113704 T DE69113704 T DE 69113704T DE 69113704 T DE69113704 T DE 69113704T DE 69113704 D1 DE69113704 D1 DE 69113704D1
Authority
DE
Germany
Prior art keywords
production
optical integrated
integrated components
components
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69113704T
Other languages
English (en)
Other versions
DE69113704T2 (de
Inventor
Serge Valette
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of DE69113704D1 publication Critical patent/DE69113704D1/de
Application granted granted Critical
Publication of DE69113704T2 publication Critical patent/DE69113704T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Couplings Of Light Guides (AREA)
DE1991613704 1990-07-09 1991-07-08 Verfahren zur Herstellung optischer integrierter Komponenten. Expired - Fee Related DE69113704T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9008689A FR2664390B1 (fr) 1990-07-09 1990-07-09 Procede de realisation de composants optiques integres.

Publications (2)

Publication Number Publication Date
DE69113704D1 true DE69113704D1 (de) 1995-11-16
DE69113704T2 DE69113704T2 (de) 1996-05-09

Family

ID=9398503

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1991613704 Expired - Fee Related DE69113704T2 (de) 1990-07-09 1991-07-08 Verfahren zur Herstellung optischer integrierter Komponenten.

Country Status (4)

Country Link
EP (1) EP0467746B1 (de)
JP (1) JPH04234004A (de)
DE (1) DE69113704T2 (de)
FR (1) FR2664390B1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9105436D0 (en) * 1991-03-14 1991-05-01 Bicc Plc An improved optical waveguide component
DE4434376A1 (de) * 1994-09-15 1996-03-21 Siemens Ag Verfahren zum Herstellen eines integrierten optischen Wellenleiters
JP4507315B2 (ja) * 1999-11-24 2010-07-21 凸版印刷株式会社 光・電気配線基板の製造方法
GB0201969D0 (en) * 2002-01-29 2002-03-13 Qinetiq Ltd Integrated optics devices

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59220703A (ja) * 1983-05-31 1984-12-12 Fujitsu Ltd 光導波路の製造方法
JPS60129711A (ja) * 1983-12-16 1985-07-11 Oki Electric Ind Co Ltd 光導波路形成方法
FR2638847B1 (fr) * 1988-11-04 1990-12-14 Commissariat Energie Atomique Dispositif optique integre pour la mesure d'indice de refraction d'un fluide

Also Published As

Publication number Publication date
FR2664390A1 (fr) 1992-01-10
JPH04234004A (ja) 1992-08-21
EP0467746B1 (de) 1995-10-11
FR2664390B1 (fr) 1993-08-13
EP0467746A1 (de) 1992-01-22
DE69113704T2 (de) 1996-05-09

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee