DE69113704D1 - Verfahren zur Herstellung optischer integrierter Komponenten. - Google Patents
Verfahren zur Herstellung optischer integrierter Komponenten.Info
- Publication number
- DE69113704D1 DE69113704D1 DE69113704T DE69113704T DE69113704D1 DE 69113704 D1 DE69113704 D1 DE 69113704D1 DE 69113704 T DE69113704 T DE 69113704T DE 69113704 T DE69113704 T DE 69113704T DE 69113704 D1 DE69113704 D1 DE 69113704D1
- Authority
- DE
- Germany
- Prior art keywords
- production
- optical integrated
- integrated components
- components
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
- Optical Couplings Of Light Guides (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9008689A FR2664390B1 (fr) | 1990-07-09 | 1990-07-09 | Procede de realisation de composants optiques integres. |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69113704D1 true DE69113704D1 (de) | 1995-11-16 |
DE69113704T2 DE69113704T2 (de) | 1996-05-09 |
Family
ID=9398503
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE1991613704 Expired - Fee Related DE69113704T2 (de) | 1990-07-09 | 1991-07-08 | Verfahren zur Herstellung optischer integrierter Komponenten. |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0467746B1 (de) |
JP (1) | JPH04234004A (de) |
DE (1) | DE69113704T2 (de) |
FR (1) | FR2664390B1 (de) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9105436D0 (en) * | 1991-03-14 | 1991-05-01 | Bicc Plc | An improved optical waveguide component |
DE4434376A1 (de) * | 1994-09-15 | 1996-03-21 | Siemens Ag | Verfahren zum Herstellen eines integrierten optischen Wellenleiters |
JP4507315B2 (ja) * | 1999-11-24 | 2010-07-21 | 凸版印刷株式会社 | 光・電気配線基板の製造方法 |
GB0201969D0 (en) * | 2002-01-29 | 2002-03-13 | Qinetiq Ltd | Integrated optics devices |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59220703A (ja) * | 1983-05-31 | 1984-12-12 | Fujitsu Ltd | 光導波路の製造方法 |
JPS60129711A (ja) * | 1983-12-16 | 1985-07-11 | Oki Electric Ind Co Ltd | 光導波路形成方法 |
FR2638847B1 (fr) * | 1988-11-04 | 1990-12-14 | Commissariat Energie Atomique | Dispositif optique integre pour la mesure d'indice de refraction d'un fluide |
-
1990
- 1990-07-09 FR FR9008689A patent/FR2664390B1/fr not_active Expired - Fee Related
-
1991
- 1991-07-08 DE DE1991613704 patent/DE69113704T2/de not_active Expired - Fee Related
- 1991-07-08 EP EP19910401885 patent/EP0467746B1/de not_active Expired - Lifetime
- 1991-07-09 JP JP16803291A patent/JPH04234004A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
FR2664390A1 (fr) | 1992-01-10 |
JPH04234004A (ja) | 1992-08-21 |
EP0467746B1 (de) | 1995-10-11 |
FR2664390B1 (fr) | 1993-08-13 |
EP0467746A1 (de) | 1992-01-22 |
DE69113704T2 (de) | 1996-05-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |